KLA
Patents, Design & Utilities
Last updated:
List of all KLA patents 72 in total
| Status | Patent |
|---|---|
Application | Utility: SEMICONDUCTOR FABRICATION PROCESS PARAMETER DETERMINATION USING A GENERATIVE ADVERSARIAL NETWORK Filling date: 6 Sep 2025 Issue date: 30 Sep 2021 |
Application | Utility: Scatterometry Based Methods And Systems For Measurement Of Strain In Semiconductor Structures Filling date: 6 Sep 2025 Issue date: 23 Sep 2021 |
Application | Utility: DETERMINING FOCUS SETTINGS FOR SPECIMEN SCANS Filling date: 6 Sep 2025 Issue date: 23 Sep 2021 |
Application | Utility: DETERMINING METROLOGY-LIKE INFORMATION FOR A SPECIMEN USING AN INSPECTION TOOL Filling date: 6 Sep 2025 Issue date: 23 Sep 2021 |
Application | Utility: Systems and Methods of High-Resolution Review for Semiconductor Inspection in Backend and Wafer Level Packaging Filling date: 6 Sep 2025 Issue date: 23 Sep 2021 |
Application | Utility: Arrayed Column Detector Filling date: 6 Sep 2025 Issue date: 9 Sep 2021 |
Application | Utility: INSTRUMENTED SUBSTRATE APPARATUS Filling date: 6 Sep 2025 Issue date: 26 Aug 2021 |
Application | Utility: METHOD AND APPARATUS FOR BEAM STABILIZATION AND REFERENCE CORRECTION FOR EUV INSPECTION Filling date: 6 Sep 2025 Issue date: 26 Aug 2021 |
Application | Utility: Measurement And Control Of Wafer Tilt For X-Ray Based Metrology Filling date: 6 Sep 2025 Issue date: 26 Aug 2021 |
Application | Utility: Electromagnet Coils Made From Flexible Circuits Filling date: 6 Sep 2025 Issue date: 26 Aug 2021 |
Application | Utility: DETECTING DEFECTS IN ARRAY REGIONS ON SPECIMENS Filling date: 6 Sep 2025 Issue date: 19 Aug 2021 |
Application | Utility: BROADBAND ILLUMINATION TUNING Filling date: 6 Sep 2025 Issue date: 12 Aug 2021 |
Application | Utility: Semiconductor Metrology And Inspection Based On An X-Ray Source With An Electron Emitter Array Filling date: 6 Sep 2025 Issue date: 5 Aug 2021 |
Application | Utility: LASER SUSTAINED PLASMA LIGHT SOURCE WITH HIGH PRESSURE FLOW Filling date: 6 Sep 2025 Issue date: 5 Aug 2021 |
Application | Utility: SYSTEM AND METHOD FOR IDENTIFYING LATENT RELIABILITY DEFECTS IN SEMICONDUCTOR DEVICES Filling date: 6 Sep 2025 Issue date: 5 Aug 2021 |
Application | Utility: OVERLAY METROLOGY ON BONDED WAFERS Filling date: 6 Sep 2025 Issue date: 5 Aug 2021 |
Application | Utility: COMPOSITE OVERLAY METROLOGY TARGET Filling date: 6 Sep 2025 Issue date: 5 Aug 2021 |
Application | Utility: System and Method for Semiconductor Device Print Check Alignment Filling date: 6 Sep 2025 Issue date: 5 Aug 2021 |
Application | Utility: Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma Light Source Filling date: 6 Sep 2025 Issue date: 29 Jul 2021 |
Application | Utility: Characterization System and Method With Guided Defect Discovery Filling date: 6 Sep 2025 Issue date: 29 Jul 2021 |
Application | Utility: MULTI-LAYERED MOIRE TARGETS AND METHODS FOR USING THE SAME IN MEASURING MISREGISTRATION OF SEMICONDUCTOR DEVICES Filling date: 6 Sep 2025 Issue date: 29 Jul 2021 |
Application | Utility: Method for Measuring An Electric Property of a Test Sample Filling date: 6 Sep 2025 Issue date: 29 Jul 2021 |
Showing 50 to 72 of 72 patents.