| Utility: Method And Apparatus To Enhance Sheath Formation, Evolution And Pulse To Pulse Stability In RF Powered Plasma Applications Filling date: 8 Sep 2025 Issue date: 18 Feb 2021 | 6 Aug 2020 | 18 Feb 2021 |
| Utility: Method and apparatus for partial pressure detection Filling date: 8 Sep 2025 Issue date: 9 Feb 2021 | 9 May 2018 | 9 Feb 2021 |
| Utility: Apparatus and method for ignition of a plasma system and for monitoring health of the plasma system Filling date: 8 Sep 2025 Issue date: 2 Feb 2021 | 13 Nov 2019 | 2 Feb 2021 |
| Utility: Impedance matching network model based correction scheme and performance repeatability Filling date: 8 Sep 2025 Issue date: 2 Feb 2021 | 19 Oct 2018 | 2 Feb 2021 |
| Utility: Adaptive Periodic Waveform Controller Filling date: 8 Sep 2025 Issue date: 14 Jan 2021 | 18 Jun 2020 | 14 Jan 2021 |
| Utility: Robust ion source Filling date: 8 Sep 2025 Issue date: 12 Jan 2021 | 13 Dec 2019 | 12 Jan 2021 |
| Utility: MICROWAVE APPLICATOR WITH SOLID-STATE GENERATOR POWER SOURCE Filling date: 8 Sep 2025 Issue date: 7 Jan 2021 | 14 Aug 2020 | 7 Jan 2021 |
| Utility: Polymer composite vacuum components Filling date: 8 Sep 2025 Issue date: 29 Dec 2020 | 17 May 2019 | 29 Dec 2020 |
| Utility: Nano-Textured Attenuator for Use with Laser Beam Profiling and Laser Beam Characterization Systems and Method of Use Filling date: 8 Sep 2025 Issue date: 24 Dec 2020 | 19 Jun 2020 | 24 Dec 2020 |
| Utility: Systems and Methods for Generating a Conductive Liquid Comprising Deionized Water with Ammonia Gas Dissolved Therein Filling date: 8 Sep 2025 Issue date: 17 Dec 2020 | 28 Aug 2020 | 17 Dec 2020 |
| Utility: SYSTEM AND METHOD OF POWER GENERATION WITH PHASE LINKED SOLID-STATE GENERATOR MODULES Filling date: 8 Sep 2025 Issue date: 3 Dec 2020 | 22 May 2020 | 3 Dec 2020 |
| Utility: SYSTEM AND METHOD OF POWER GENERATION WITH PHASE LINKED SOLID-STATE GENERATOR MODULES Filling date: 8 Sep 2025 Issue date: 3 Dec 2020 | 22 May 2020 | 3 Dec 2020 |
| Utility: Thermal conductivity gauge Filling date: 8 Sep 2025 Issue date: 24 Nov 2020 | 17 Apr 2018 | 24 Nov 2020 |
| Utility: Pulse synchronization by monitoring power in another frequency band Filling date: 8 Sep 2025 Issue date: 3 Nov 2020 | 15 Mar 2013 | 3 Nov 2020 |
| Utility: Method and apparatus for self verification of pressured based mass flow controllers Filling date: 8 Sep 2025 Issue date: 13 Oct 2020 | 27 Jun 2018 | 13 Oct 2020 |
| Utility: Systems and Methods for Generating a Dissolved Ammonia Solution with Reduced Dissolved Carrier Gas and Oxygen Content Filling date: 8 Sep 2025 Issue date: 8 Oct 2020 | 7 Apr 2020 | 8 Oct 2020 |
| Utility: Method and Apparatus for Pulse Gas Delivery Filling date: 8 Sep 2025 Issue date: 8 Oct 2020 | 5 Apr 2019 | 8 Oct 2020 |
| Utility: Low Profile Heater Apparatus and Method of Manufacture Filling date: 8 Sep 2025 Issue date: 1 Oct 2020 | 19 Mar 2020 | 1 Oct 2020 |
| Utility: Microwave applicator with solid-state generator power source Filling date: 8 Sep 2025 Issue date: 29 Sep 2020 | 16 Mar 2017 | 29 Sep 2020 |
| Utility: Method and Apparatus for Pulse Gas Delivery Using an External Pressure Trigger Filling date: 8 Sep 2025 Issue date: 24 Sep 2020 | 10 Jun 2020 | 24 Sep 2020 |
| Utility: Apparatus and method for thermal insulation of high-temperature pressure sensors Filling date: 8 Sep 2025 Issue date: 22 Sep 2020 | 27 Jun 2018 | 22 Sep 2020 |
| Utility: Systems and methods for generating a conductive liquid comprising deionized water with ammonia gas dissolved therein Filling date: 8 Sep 2025 Issue date: 15 Sep 2020 | 9 Nov 2017 | 15 Sep 2020 |
| Utility: Extremum seeking control apparatus and method for automatic frequency tuning for RF impedance matching Filling date: 8 Sep 2025 Issue date: 11 Aug 2020 | 8 Oct 2019 | 11 Aug 2020 |
| Utility: Method and Apparatus for Pulse Gas Delivery Using an External Pressure Trigger Filling date: 8 Sep 2025 Issue date: 30 Jul 2020 | 7 Sep 2018 | 30 Jul 2020 |
| Utility: Adaptive periodic waveform controller Filling date: 8 Sep 2025 Issue date: 28 Jul 2020 | 12 Feb 2019 | 28 Jul 2020 |
| Utility: Method and apparatus for pulse gas delivery using an external pressure trigger Filling date: 8 Sep 2025 Issue date: 28 Jul 2020 | 7 Sep 2018 | 28 Jul 2020 |
| Utility: Methods and apparatus for multiple channel mass flow and ratio control systems Filling date: 8 Sep 2025 Issue date: 30 Jun 2020 | 7 May 2018 | 30 Jun 2020 |
| Utility: Feedback control by RF waveform tailoring for ion energy distribution Filling date: 8 Sep 2025 Issue date: 23 Jun 2020 | 11 Jul 2019 | 23 Jun 2020 |
| Utility: Supervisory control of radio frequency (RF) impedance tuning operation Filling date: 8 Sep 2025 Issue date: 26 May 2020 | 19 Dec 2017 | 26 May 2020 |
| Utility: Method and apparatus for pulse gas delivery with isolation valves Filling date: 8 Sep 2025 Issue date: 12 May 2020 | 2 Feb 2018 | 12 May 2020 |
| Utility: Pulsed, Bidirectional Radio Frequency Source/Load Filling date: 8 Sep 2025 Issue date: 7 May 2020 | 11 Dec 2019 | 7 May 2020 |
| Utility: PREDICTIVE DIAGNOSTICS SYSTEMS AND METHODS USING VACUUM PRESSURE CONTROL VALVES Filling date: 8 Sep 2025 Issue date: 23 Apr 2020 | 23 Dec 2019 | 23 Apr 2020 |
| Utility: Impedance Matching Network Model Based Correction Scheme and Performance Repeatability Filling date: 8 Sep 2025 Issue date: 23 Apr 2020 | 19 Oct 2018 | 23 Apr 2020 |
| Utility: Robust Ion Source Filling date: 8 Sep 2025 Issue date: 16 Apr 2020 | 13 Dec 2019 | 16 Apr 2020 |
| Utility: Sputtering system and method including an arc detection Filling date: 8 Sep 2025 Issue date: 31 Mar 2020 | 8 Mar 2017 | 31 Mar 2020 |
| Utility: System for and method of monitoring flow through mass flow controllers in real time Filling date: 8 Sep 2025 Issue date: 31 Mar 2020 | 30 Jan 2017 | 31 Mar 2020 |
| Utility: APPARATUS AND METHOD FOR IGNITION OF A PLASMA SYSTEM AND FOR MONITORING HEALTH OF THE PLASMA SYSTEM Filling date: 8 Sep 2025 Issue date: 26 Mar 2020 | 13 Nov 2019 | 26 Mar 2020 |
| Utility: Resonant transmission line to deliver precision RF voltage Filling date: 8 Sep 2025 Issue date: 24 Mar 2020 | 15 Nov 2018 | 24 Mar 2020 |
| Utility: Method and Apparatus for Pulse Gas Delivery Using an External Pressure Trigger Filling date: 8 Sep 2025 Issue date: 12 Mar 2020 | 7 Sep 2018 | 12 Mar 2020 |
| Utility: Method and Apparatus for Deposition Cleaning in a Pumping Line Filling date: 8 Sep 2025 Issue date: 5 Mar 2020 | 11 Nov 2019 | 5 Mar 2020 |
| Utility: Ozonated Water Delivery System and Method of Use Filling date: 8 Sep 2025 Issue date: 5 Mar 2020 | 27 Aug 2019 | 5 Mar 2020 |
| Utility: Predictive diagnostics systems and methods using vacuum pressure control valves Filling date: 8 Sep 2025 Issue date: 11 Feb 2020 | 28 Apr 2017 | 11 Feb 2020 |
| Utility: Polygonal toroidal plasma source Filling date: 8 Sep 2025 Issue date: 4 Feb 2020 | 8 May 2019 | 4 Feb 2020 |
| Utility: Power converter control apparatus and method for high stability and power factor improvement in the presence of high source impedances Filling date: 8 Sep 2025 Issue date: 28 Jan 2020 | 30 Jan 2019 | 28 Jan 2020 |
| Utility: Pulsed, bidirectional radio frequency source/load Filling date: 8 Sep 2025 Issue date: 28 Jan 2020 | 9 May 2018 | 28 Jan 2020 |
| Utility: Robust ion source Filling date: 8 Sep 2025 Issue date: 21 Jan 2020 | 13 Jun 2017 | 21 Jan 2020 |
| Utility: Plasma Source Having a Dielectric Plasma Chamber with Improved Plasma Resistance Filling date: 8 Sep 2025 Issue date: 16 Jan 2020 | 13 Jul 2018 | 16 Jan 2020 |
| Utility: Balancing RF circuit and control for a cross-coupled SIMO distribution network Filling date: 8 Sep 2025 Issue date: 14 Jan 2020 | 24 Aug 2018 | 14 Jan 2020 |
| Utility: Method and apparatus for deposition cleaning in a pumping line Filling date: 8 Sep 2025 Issue date: 14 Jan 2020 | 12 Jan 2017 | 14 Jan 2020 |
| Utility: Apparatus and Method for Thermal Insulation of High-Temperature Pressure Sensors Filling date: 8 Sep 2025 Issue date: 2 Jan 2020 | 27 Jun 2018 | 2 Jan 2020 |
