MKS Instruments
Patents, Design & Utilities
Last updated:
List of all MKS Instruments patents 118 in total
| Status | Patent |
|---|---|
Application | Utility: Adaptive Control For A Power Generator Filling date: 8 Sep 2025 Issue date: 26 Dec 2019 |
Grant | Utility: Method and apparatus for pressure-based flow measurement in non-critical flow conditions Filling date: 8 Sep 2025 Issue date: 24 Dec 2019 |
Application | Utility: Radical Output Monitor for a Remote Plasma Source and Method of Use Filling date: 8 Sep 2025 Issue date: 19 Dec 2019 |
Grant | Utility: Apparatus and method for ignition of a plasma system and for monitoring health of the plasma system Filling date: 8 Sep 2025 Issue date: 10 Dec 2019 |
Application | Utility: Gas Analysis with an Inverted Magnetron Source Filling date: 8 Sep 2025 Issue date: 5 Dec 2019 |
Application | Utility: Method and Apparatus for Partial Pressure Detection Filling date: 8 Sep 2025 Issue date: 14 Nov 2019 |
Application | Utility: Methods and Apparatus for Multiple Channel Mass Flow and Ratio Control Systems Filling date: 8 Sep 2025 Issue date: 7 Nov 2019 |
Application | Utility: Feedback Control By RF Waveform Tailoring For Ion Energy Distribution Filling date: 8 Sep 2025 Issue date: 31 Oct 2019 |
Application | Utility: PIECEWISE RF POWER SYSTEMS AND METHODS FOR SUPPLYING PRE-DISTORTED RF BIAS VOLTAGE SIGNALS TO AN ELECTRODE IN A PROCESSING CHAMBER Filling date: 8 Sep 2025 Issue date: 31 Oct 2019 |
Grant | Utility: Pressure sensor with real time health monitoring and compensation Filling date: 8 Sep 2025 Issue date: 29 Oct 2019 |
Application | Utility: Method for Ion Mass Separation and Ion Energy Control in Process Plasmas Filling date: 8 Sep 2025 Issue date: 17 Oct 2019 |
Application | Utility: Apparatus and Method for Controlling Ion Energy Distribution in Process Plasmas Filling date: 8 Sep 2025 Issue date: 17 Oct 2019 |
Application | Utility: Thermal Conductivity Gauge Filling date: 8 Sep 2025 Issue date: 17 Oct 2019 |
Application | Utility: Polymer Composite Vacuum Components Filling date: 8 Sep 2025 Issue date: 5 Sep 2019 |
Application | Utility: ACTIVELY COOLED VACUUM ISOLATION VALVE Filling date: 8 Sep 2025 Issue date: 5 Sep 2019 |
Grant | Utility: Piecewise RF power systems and methods for supplying pre-distorted RF bias voltage signals to an electrode in a processing chamber Filling date: 8 Sep 2025 Issue date: 27 Aug 2019 |
Grant | Utility: Feedback control by RF waveform tailoring for ion energy distribution Filling date: 8 Sep 2025 Issue date: 27 Aug 2019 |
Application | Utility: Method And Apparatus For Pulse Gas Delivery With Isolation Valves Filling date: 8 Sep 2025 Issue date: 8 Aug 2019 |
Showing 100 to 118 of 118 patents.