Veeco Instruments
Utility Patents

Last updated:

List of all Veeco Instruments patents 20 in total

Status Patent
Grant
Utility: Melt detection systems and methods of using the same External link
Filling date: 27 Sep 2025 Issue date: 16 Aug 2022
Grant
Utility: High-efficiency line-forming optical systems and methods using a serrated spatial filter External link
Filling date: 27 Sep 2025 Issue date: 16 Aug 2022
Grant
Utility: Semiconductor wafer processing chamber External link
Filling date: 27 Sep 2025 Issue date: 24 May 2022
Grant
Utility: Wafer carrier having retention pockets with compound radii for chemical vapor deposition systems External link
Filling date: 27 Sep 2025 Issue date: 15 Feb 2022
Grant
Utility: System and method for self-cleaning wet treatment process External link
Filling date: 27 Sep 2025 Issue date: 25 Jan 2022
Grant
Utility: Apparatus and method for the minimization of undercut during a UBM etch process External link
Filling date: 27 Sep 2025 Issue date: 20 Jul 2021
Grant
Utility: Apparatus and method for the minimization of undercut during a UBM etch process External link
Filling date: 27 Sep 2025 Issue date: 11 May 2021
Grant
Utility: Micro-LED transfer methods using light-based debonding External link
Filling date: 27 Sep 2025 Issue date: 20 Apr 2021
Grant
Utility: Laser annealing systems and methods with ultra-short dwell times External link
Filling date: 27 Sep 2025 Issue date: 24 Nov 2020
Grant
Utility: Chuck systems and methods having enhanced electrical isolation for substrate-biased ALD External link
Filling date: 27 Sep 2025 Issue date: 24 Nov 2020
Grant
Utility: Rotating disk reactor with ferrofluid seal for chemical vapor deposition External link
Filling date: 27 Sep 2025 Issue date: 21 Jul 2020
Grant
Utility: Collection chamber apparatus to separate multiple fluids during the semiconductor wafer processing cycle External link
Filling date: 27 Sep 2025 Issue date: 7 Jul 2020
Grant
Utility: Laser-assisted atomic layer deposition of 2D metal chalcogenide films External link
Filling date: 27 Sep 2025 Issue date: 9 Jun 2020
Grant
Utility: Laser-based systems and methods for melt-processing of metal layers in semiconductor manufacturing External link
Filling date: 27 Sep 2025 Issue date: 26 May 2020
Grant
Utility: Gas concentration sensors and systems External link
Filling date: 27 Sep 2025 Issue date: 25 Feb 2020
Grant
Utility: Periphery purge shutter and flow control systems and methods External link
Filling date: 27 Sep 2025 Issue date: 25 Feb 2020
Grant
Utility: Filter element for wafer processing assembly External link
Filling date: 27 Sep 2025 Issue date: 24 Dec 2019
Grant
Utility: Self-centering wafer carrier system for chemical vapor deposition External link
Filling date: 27 Sep 2025 Issue date: 8 Oct 2019
Grant
Utility: Ion beam etching External link
Filling date: 27 Sep 2025 Issue date: 13 Aug 2019
Grant
Utility: Alkyl push flow for vertical flow rotating disk reactors External link
Filling date: 27 Sep 2025 Issue date: 30 Jul 2019

Showing 1 to 20 of 20 patents.