Veeco Instruments
Utility Patent Applications

Last updated:

List of all Veeco Instruments patents 22 in total

Status Patent
Application
Utility: Rotating Disk Reactor with Split Substrate Carrier External link
Filling date: 27 Sep 2025 Issue date: 4 Aug 2022
Application
Utility: Automated Batch Production Thin Film Deposition Systems and Methods of Using the Same External link
Filling date: 27 Sep 2025 Issue date: 10 Mar 2022
Application
Utility: Reactor with Centering Pin for Epitaxial Deposition External link
Filling date: 27 Sep 2025 Issue date: 3 Mar 2022
Application
Utility: ION BEAM DEPOSITION OF A LOW RESISTIVITY METAL External link
Filling date: 27 Sep 2025 Issue date: 30 Dec 2021
Application
Utility: ION BEAM DEPOSITION OF A LOW RESISTIVITY METAL External link
Filling date: 27 Sep 2025 Issue date: 23 Sep 2021
Application
Utility: APPARATUS AND METHOD FOR DIE STACK FLUX REMOVAL External link
Filling date: 27 Sep 2025 Issue date: 1 Jul 2021
Application
Utility: ENHANCED CATHODIC ARC SOURCE FOR ARC PLASMA DEPOSITION External link
Filling date: 27 Sep 2025 Issue date: 10 Jun 2021
Application
Utility: MOLECULAR BEAM EPITAXY SYSTEMS WITH VARIABLE SUBSTRATE-TO-SOURCE ARRANGEMENTS External link
Filling date: 27 Sep 2025 Issue date: 22 Apr 2021
Application
Utility: CVD Reactor Single Substrate Carrier and Rotating Tube for Stable Rotation External link
Filling date: 27 Sep 2025 Issue date: 1 Apr 2021
Application
Utility: Melt Detection Systems and Methods of Using the Same External link
Filling date: 27 Sep 2025 Issue date: 14 Jan 2021
Application
Utility: DEPOSITION SYSTEM WITH INTEGRATED CARRIER CLEANING MODULES External link
Filling date: 27 Sep 2025 Issue date: 12 Nov 2020
Application
Utility: Rotating Disk Reactor with Self-Locking Carrier-to-Support Interface for Chemical Vapor Deposition External link
Filling date: 27 Sep 2025 Issue date: 6 Aug 2020
Application
Utility: SEMICONDUCTOR WAFER PROCESSING CHAMBER External link
Filling date: 27 Sep 2025 Issue date: 21 May 2020
Application
Utility: SYSTEM AND METHOD FOR METROLOGY USING MULTIPLE MEASUREMENT TECHNIQUES External link
Filling date: 27 Sep 2025 Issue date: 12 Mar 2020
Application
Utility: CHEMICAL VAPOR DEPOSITION WAFER CARRIERS External link
Filling date: 27 Sep 2025 Issue date: 27 Feb 2020
Application
Utility: Chemical vapor deposition wafer carriers External link
Filling date: 27 Sep 2025 Issue date: 20 Feb 2020
Application
Utility: Micro-LED Transfer Methods Using Light-Based Debonding External link
Filling date: 27 Sep 2025 Issue date: 26 Dec 2019
Application
Utility: Self-Centering Wafer Carrier System for Chemical Vapor Deposition External link
Filling date: 27 Sep 2025 Issue date: 28 Nov 2019
Application
Utility: CHEMICAL VAPOR DEPOSITION APPARATUS WITH MULTI-ZONE INJECTION BLOCK External link
Filling date: 27 Sep 2025 Issue date: 17 Oct 2019
Application
Utility: WAFER PROCESSING SYSTEM WITH FLOW EXTENDER External link
Filling date: 27 Sep 2025 Issue date: 3 Oct 2019
Application
Utility: CHEMICAL VAPOR DEPOSITION WAFER CARRIER WITH THERMAL COVER External link
Filling date: 27 Sep 2025 Issue date: 26 Sep 2019
Application
Utility: PLASMA BRIDGE NEUTRALIZER FOR ION BEAM ETCHING External link
Filling date: 27 Sep 2025 Issue date: 22 Aug 2019

Showing 1 to 22 of 22 patents.