| Utility: Systems And Methods For Filtering Radio Frequencies From A Signal Of A Thermocouple And Controlling A Temperature Of An Electrode In A Plasma Chamber Filling date: 8 Sep 2025 Issue date: 14 Nov 2019 | 24 Jul 2019 | 14 Nov 2019 |
| Utility: Common Terminal Heater for Ceramic Pedestals Used in Semiconductor for Fabrication Filling date: 8 Sep 2025 Issue date: 14 Nov 2019 | 9 Jul 2019 | 14 Nov 2019 |
| Utility: METHOD OF PROVIDING A PLASMA ATOMIC LAYER DEPOSITION Filling date: 8 Sep 2025 Issue date: 14 Nov 2019 | 8 May 2018 | 14 Nov 2019 |
| Utility: WAFER POSITIONING PEDESTAL FOR SEMICONDUCTOR PROCESSING Filling date: 8 Sep 2025 Issue date: 7 Nov 2019 | 15 Jul 2019 | 7 Nov 2019 |
| Utility: CHUCK FOR EDGE BEVEL REMOVAL AND METHOD FOR CENTERING A WAFER PRIOR TO EDGE BEVEL REMOVAL Filling date: 8 Sep 2025 Issue date: 7 Nov 2019 | 11 Jul 2019 | 7 Nov 2019 |
| Utility: WAFER CHUCK ASSEMBLY Filling date: 8 Sep 2025 Issue date: 7 Nov 2019 | 10 Dec 2018 | 7 Nov 2019 |
| Utility: EDGE RING FOCUSED DEPOSITION DURING A CLEANING PROCESS OF A PROCESSING CHAMBER Filling date: 8 Sep 2025 Issue date: 7 Nov 2019 | 7 May 2018 | 7 Nov 2019 |
| Utility: SELECTIVE DEPOSITION OF ETCH-STOP LAYER FOR ENHANCED PATTERNING Filling date: 8 Sep 2025 Issue date: 7 Nov 2019 | 7 May 2018 | 7 Nov 2019 |
| Utility: USE OF VOLTAGE AND CURRENT MEASUREMENTS TO CONTROL DUAL ZONE CERAMIC PEDESTALS Filling date: 8 Sep 2025 Issue date: 7 Nov 2019 | 7 May 2018 | 7 Nov 2019 |
| Utility: PREDICTING ETCH CHARACTERISTICS IN THERMAL ETCHING AND ATOMIC LAYER ETCHING Filling date: 8 Sep 2025 Issue date: 7 Nov 2019 | 3 May 2018 | 7 Nov 2019 |
| Utility: REMOVING BUBBLES FROM PLATING CELLS Filling date: 8 Sep 2025 Issue date: 7 Nov 2019 | 1 May 2018 | 7 Nov 2019 |
| Utility: APPARATUS FOR UV FLOWABLE DIELECTRIC Filling date: 8 Sep 2025 Issue date: 31 Oct 2019 | 11 Jul 2019 | 31 Oct 2019 |
| Utility: SYSTEMS AND METHODS FOR CALIBRATING SCALAR FIELD CONTRIBUTION VALUES FOR A LIMITED NUMBER OF SENSORS INCLUDING A TEMPERATURE VALUE OF AN ELECTROSTATIC CHUCK AND ESTIMATING TEMPERATURE DISTRIBUTION PROFILES BASED ON CALIBRATED VALUES Filling date: 8 Sep 2025 Issue date: 31 Oct 2019 | 9 Jul 2019 | 31 Oct 2019 |
| Utility: SUBSTRATE PROCESSING SYSTEMS INCLUDING GAS DELIVERY SYSTEM WITH REDUCED DEAD LEGS Filling date: 8 Sep 2025 Issue date: 24 Oct 2019 | 18 Apr 2018 | 24 Oct 2019 |
| Utility: CONTROL OF ETCH RATE USING MODELING, FEEDBACK AND IMPEDANCE MATCH Filling date: 8 Sep 2025 Issue date: 17 Oct 2019 | 26 Jun 2019 | 17 Oct 2019 |
| Utility: PERMANENT SECONDARY EROSION CONTAINMENT FOR ELECTROSTATIC CHUCK BONDS Filling date: 8 Sep 2025 Issue date: 10 Oct 2019 | 25 Jun 2019 | 10 Oct 2019 |
| Utility: DRY PLASMA ETCH METHOD TO PATTERN MRAM STACK Filling date: 8 Sep 2025 Issue date: 10 Oct 2019 | 21 Jun 2019 | 10 Oct 2019 |
| Utility: GAPFILL OF VARIABLE ASPECT RATIO FEATURES WITH A COMPOSITE PEALD AND PECVD METHOD Filling date: 8 Sep 2025 Issue date: 10 Oct 2019 | 31 May 2019 | 10 Oct 2019 |
| Utility: MANUFACTURE OF AN ORIFICE PLATE FOR USE IN GAS CALIBRATION Filling date: 8 Sep 2025 Issue date: 10 Oct 2019 | 9 Apr 2018 | 10 Oct 2019 |
| Utility: METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY Filling date: 8 Sep 2025 Issue date: 10 Oct 2019 | 6 Apr 2018 | 10 Oct 2019 |
| Utility: DYNAMIC MODULATION OF CROSS FLOW MANIFOLD DURING ELECROPLATING Filling date: 8 Sep 2025 Issue date: 3 Oct 2019 | 5 Jun 2019 | 3 Oct 2019 |
| Utility: COPPER ELECTRODEPOSITION SEQUENCE FOR THE FILLING OF COBALT LINED FEATURES Filling date: 8 Sep 2025 Issue date: 3 Oct 2019 | 30 Mar 2018 | 3 Oct 2019 |
| Utility: COPPER ELECTRODEPOSITION ON COBALT LINED FEATURES Filling date: 8 Sep 2025 Issue date: 3 Oct 2019 | 30 Mar 2018 | 3 Oct 2019 |
| Utility: CONNECTOR FOR SUBSTRATE SUPPORT WITH EMBEDDED TEMPERATURE SENSORS Filling date: 8 Sep 2025 Issue date: 3 Oct 2019 | 27 Mar 2018 | 3 Oct 2019 |
| Utility: MULTI-LEVEL PULSING OF DC AND RF SIGNALS Filling date: 8 Sep 2025 Issue date: 26 Sep 2019 | 1 May 2019 | 26 Sep 2019 |
| Utility: MULTI-LEVEL PARAMETER AND FREQUENCY PULSING WITH A LOW ANGULAR SPREAD Filling date: 8 Sep 2025 Issue date: 26 Sep 2019 | 13 Feb 2019 | 26 Sep 2019 |
| Utility: PROTECTIVE COATING FOR ELECTROSTATIC CHUCKS Filling date: 8 Sep 2025 Issue date: 26 Sep 2019 | 20 Mar 2018 | 26 Sep 2019 |
| Utility: RF METROLOGY SYSTEM FOR A SUBSTRATE PROCESSING APPARATUS INCORPORATING RF SENSORS WITH CORRESPONDING LOCK-IN AMPLIFIERS Filling date: 8 Sep 2025 Issue date: 19 Sep 2019 | 15 Mar 2018 | 19 Sep 2019 |
| Utility: TURBOMOLECULAR PUMP DEPOSITION CONTROL AND PARTICLE MANAGEMENT Filling date: 8 Sep 2025 Issue date: 19 Sep 2019 | 15 Mar 2018 | 19 Sep 2019 |
| Utility: Frequency Tuning for a Matchless Plasma Source Filling date: 8 Sep 2025 Issue date: 19 Sep 2019 | 14 Mar 2018 | 19 Sep 2019 |
| Utility: Mass Flow Controller for Substrate Processing Filling date: 8 Sep 2025 Issue date: 12 Sep 2019 | 9 Mar 2018 | 12 Sep 2019 |
| Utility: PROCESS FOR OPTIMIZING COBALT ELECTROFILL USING SACRIFICIAL OXIDANTS Filling date: 8 Sep 2025 Issue date: 5 Sep 2019 | 13 May 2019 | 5 Sep 2019 |
| Utility: SUPPRESSION OF PARASITIC DEPOSITION IN A SUBSTRATE PROCESSING SYSTEM BY SUPPRESSING PRECURSOR FLOW AND PLASMA OUTSIDE OF SUBSTRATE REGION Filling date: 8 Sep 2025 Issue date: 5 Sep 2019 | 13 May 2019 | 5 Sep 2019 |
| Utility: SYSTEMS AND METHODS FOR TUNING AN IMPEDANCE MATCHING NETWORK IN A STEP-WISE FASHION Filling date: 8 Sep 2025 Issue date: 5 Sep 2019 | 9 May 2019 | 5 Sep 2019 |
| Utility: QUARTZ COMPONENT WITH PROTECTIVE COATING Filling date: 8 Sep 2025 Issue date: 5 Sep 2019 | 2 Mar 2018 | 5 Sep 2019 |
| Utility: Flow Assisted Dynamic Seal for High-Convection, Continuous-Rotation Plating Filling date: 8 Sep 2025 Issue date: 29 Aug 2019 | 24 Jul 2018 | 29 Aug 2019 |
| Utility: METHOD MONITORING CHAMBER DRIFT Filling date: 8 Sep 2025 Issue date: 29 Aug 2019 | 27 Feb 2018 | 29 Aug 2019 |
| Utility: MULTI-PLATE ELECTROSTATIC CHUCKS WITH CERAMIC BASEPLATES Filling date: 8 Sep 2025 Issue date: 29 Aug 2019 | 23 Feb 2018 | 29 Aug 2019 |
| Utility: Feedback Control System for Iterative Etch Process Filling date: 8 Sep 2025 Issue date: 22 Aug 2019 | 22 Feb 2018 | 22 Aug 2019 |
| Utility: Automated Replacement of Consumable Parts Using Interfacing Chambers Filling date: 8 Sep 2025 Issue date: 15 Aug 2019 | 29 Apr 2019 | 15 Aug 2019 |
| Utility: Plasma Processing System having an inspection tool and Controller that Interfaces with a Tool Model Filling date: 8 Sep 2025 Issue date: 15 Aug 2019 | 23 Apr 2019 | 15 Aug 2019 |
| Utility: AMMONIA PRE-TREATMENT TO PROMOTE AMORPHOUS SILICON ADHESION TO ALUMINUM NITRIDE Filling date: 8 Sep 2025 Issue date: 15 Aug 2019 | 4 Feb 2019 | 15 Aug 2019 |
| Utility: PHOTORESIST DESIGN LAYOUT PATTERN PROXIMITY CORRECTION THROUGH FAST EDGE PLACEMENT ERROR PREDICTION VIA A PHYSICS-BASED ETCH PROFILE MODELING FRAMEWORK Filling date: 8 Sep 2025 Issue date: 15 Aug 2019 | 18 Dec 2018 | 15 Aug 2019 |
| Utility: Method of Feature Exaction from Time-series of Spectra to Control Endpoint of Process Filling date: 8 Sep 2025 Issue date: 8 Aug 2019 | 16 Apr 2019 | 8 Aug 2019 |
| Utility: SYSTEMS AND METHODS FOR ACHIEVING A PRE-DETERMINED FACTOR ASSOCIATED WITH AN EDGE REGION WITHIN A PLASMA CHAMBER BY SYNCHRONIZING MAIN AND EDGE RF GENERATORS Filling date: 8 Sep 2025 Issue date: 8 Aug 2019 | 15 Apr 2019 | 8 Aug 2019 |
| Utility: ETCHING SUBSTRATES USING ALE AND SELECTIVE DEPOSITION Filling date: 8 Sep 2025 Issue date: 8 Aug 2019 | 21 Mar 2019 | 8 Aug 2019 |
| Utility: TAPERED UPPER ELECTRODE FOR UNIFORMITY CONTROL IN PLASMA PROCESSING Filling date: 8 Sep 2025 Issue date: 8 Aug 2019 | 5 Feb 2018 | 8 Aug 2019 |
| Utility: ION BEAM ETCH WITHOUT NEED FOR WAFER TILT OR ROTATION Filling date: 8 Sep 2025 Issue date: 1 Aug 2019 | 15 Apr 2019 | 1 Aug 2019 |
| Utility: TIN OXIDE MANDRELS IN PATTERNING Filling date: 8 Sep 2025 Issue date: 1 Aug 2019 | 29 Jan 2019 | 1 Aug 2019 |
| Utility: ELECTROSTATIC CHUCKING PEDESTAL WITH SUBSTRATE BACKSIDE PURGING AND THERMAL SINKING Filling date: 8 Sep 2025 Issue date: 1 Aug 2019 | 1 Feb 2018 | 1 Aug 2019 |
