| Utility: Plasma etching systems and methods using empirical mode decomposition Filling date: 7 Sep 2025 Issue date: 10 Dec 2019 | 30 Nov 2016 | 10 Dec 2019 |
| Utility: Anti-transient showerhead Filling date: 7 Sep 2025 Issue date: 3 Dec 2019 | 13 Jul 2018 | 3 Dec 2019 |
| Utility: Atomic layer clean for removal of photoresist patterning scum Filling date: 7 Sep 2025 Issue date: 3 Dec 2019 | 19 Jul 2017 | 3 Dec 2019 |
| Utility: Methods and apparatuses for estimating on-wafer oxide layer reduction effectiveness via color sensing Filling date: 7 Sep 2025 Issue date: 3 Dec 2019 | 30 Jun 2017 | 3 Dec 2019 |
| Utility: Component of a plasma processing apparatus having a protective in situ formed layer on a plasma exposed surface Filling date: 7 Sep 2025 Issue date: 3 Dec 2019 | 24 Aug 2016 | 3 Dec 2019 |
| Utility: Selective growth of silicon nitride Filling date: 7 Sep 2025 Issue date: 26 Nov 2019 | 23 Jan 2018 | 26 Nov 2019 |
| Utility: Self-forming barrier process Filling date: 7 Sep 2025 Issue date: 19 Nov 2019 | 11 Dec 2018 | 19 Nov 2019 |
| Utility: Vacuum robot positioning system with reduced sensitivity to chamber pressure Filling date: 7 Sep 2025 Issue date: 19 Nov 2019 | 14 Sep 2018 | 19 Nov 2019 |
| Utility: Use of ion beam etching to generate gate-all-around structure Filling date: 7 Sep 2025 Issue date: 19 Nov 2019 | 15 Nov 2016 | 19 Nov 2019 |
| Utility: Baffle plate and showerhead assemblies and corresponding manufacturing method Filling date: 7 Sep 2025 Issue date: 19 Nov 2019 | 13 Apr 2016 | 19 Nov 2019 |
| Utility: Showerhead with air-gapped plenums and overhead isolation gas distributor Filling date: 7 Sep 2025 Issue date: 12 Nov 2019 | 17 May 2018 | 12 Nov 2019 |
| Utility: Segmenting a model within a plasma system Filling date: 7 Sep 2025 Issue date: 12 Nov 2019 | 28 Sep 2017 | 12 Nov 2019 |
| Utility: Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods Filling date: 7 Sep 2025 Issue date: 12 Nov 2019 | 20 Jun 2017 | 12 Nov 2019 |
| Utility: Carrier ring wall for reduction of back-diffusion of reactive species and suppression of local parasitic plasma ignition Filling date: 7 Sep 2025 Issue date: 12 Nov 2019 | 25 Mar 2016 | 12 Nov 2019 |
| Utility: Systems and methods for using computer-generated models to reduce reflected power towards a high frequency RF generator during a cycle of operations of a low frequency RF generator Filling date: 7 Sep 2025 Issue date: 5 Nov 2019 | 14 Apr 2016 | 5 Nov 2019 |
| Utility: Gas reaction trajectory control through tunable plasma dissociation for wafer by-product distribution and etch feature profile uniformity Filling date: 7 Sep 2025 Issue date: 29 Oct 2019 | 20 Apr 2018 | 29 Oct 2019 |
| Utility: Ferrite cage RF isolator for power circuitry Filling date: 7 Sep 2025 Issue date: 29 Oct 2019 | 30 Nov 2017 | 29 Oct 2019 |
| Utility: Selective growth of SiO2 on dielectric surfaces in the presence of copper Filling date: 7 Sep 2025 Issue date: 29 Oct 2019 | 22 Nov 2017 | 29 Oct 2019 |
| Utility: Boltless substrate support assembly Filling date: 7 Sep 2025 Issue date: 29 Oct 2019 | 8 Mar 2017 | 29 Oct 2019 |
| Utility: Lift pin holder with spring retention for substrate processing systems Filling date: 7 Sep 2025 Issue date: 29 Oct 2019 | 29 Sep 2016 | 29 Oct 2019 |
| Utility: Methods and systems for determining a fault in a gas heater channel Filling date: 7 Sep 2025 Issue date: 22 Oct 2019 | 27 Apr 2018 | 22 Oct 2019 |
| Utility: Method for reducing the wet etch rate of a sin film without damaging the underlying substrate Filling date: 7 Sep 2025 Issue date: 22 Oct 2019 | 11 Nov 2016 | 22 Oct 2019 |
| Utility: Spacer profile control using atomic layer deposition in a multiple patterning process Filling date: 7 Sep 2025 Issue date: 15 Oct 2019 | 26 Jan 2018 | 15 Oct 2019 |
| Utility: Monitoring surface oxide on seed layers during electroplating Filling date: 7 Sep 2025 Issue date: 15 Oct 2019 | 30 Mar 2017 | 15 Oct 2019 |
| Utility: Method of tungsten etching Filling date: 7 Sep 2025 Issue date: 15 Oct 2019 | 10 Mar 2017 | 15 Oct 2019 |
| Utility: Low roughness EUV lithography Filling date: 7 Sep 2025 Issue date: 8 Oct 2019 | 1 Mar 2018 | 8 Oct 2019 |
| Utility: Method of determining thermal stability of a substrate support assembly Filling date: 7 Sep 2025 Issue date: 8 Oct 2019 | 24 Jul 2017 | 8 Oct 2019 |
| Utility: Manganese barrier and adhesion layers for cobalt Filling date: 7 Sep 2025 Issue date: 8 Oct 2019 | 10 May 2017 | 8 Oct 2019 |
| Utility: Apparatus for measuring condition of electroplating cell components and associated methods Filling date: 7 Sep 2025 Issue date: 8 Oct 2019 | 18 Apr 2017 | 8 Oct 2019 |
| Utility: Wafer lift ring system for wafer transfer Filling date: 7 Sep 2025 Issue date: 8 Oct 2019 | 8 Feb 2017 | 8 Oct 2019 |
| Utility: Methods for automatically determining capacitor values and systems thereof Filling date: 7 Sep 2025 Issue date: 8 Oct 2019 | 29 Aug 2014 | 8 Oct 2019 |
| Utility: Module including metallized ceramic tubes for RF and gas delivery Filling date: 7 Sep 2025 Issue date: 1 Oct 2019 | 20 Nov 2018 | 1 Oct 2019 |
| Utility: Powered grid for plasma chamber Filling date: 7 Sep 2025 Issue date: 1 Oct 2019 | 6 Apr 2018 | 1 Oct 2019 |
| Utility: RF metrology system for a substrate processing apparatus incorporating RF sensors with corresponding lock-in amplifiers Filling date: 7 Sep 2025 Issue date: 1 Oct 2019 | 15 Mar 2018 | 1 Oct 2019 |
| Utility: Plasma assisted doping on germanium Filling date: 7 Sep 2025 Issue date: 1 Oct 2019 | 6 Feb 2018 | 1 Oct 2019 |
| Utility: Methods and apparatuses for increasing reactor processing batch size Filling date: 7 Sep 2025 Issue date: 1 Oct 2019 | 31 Oct 2017 | 1 Oct 2019 |
| Utility: Automated replacement of consumable parts using end effectors interfacing with plasma processing system Filling date: 7 Sep 2025 Issue date: 1 Oct 2019 | 2 Aug 2017 | 1 Oct 2019 |
| Utility: Mask shrink layer for high aspect ratio dielectric etch Filling date: 7 Sep 2025 Issue date: 1 Oct 2019 | 22 Nov 2016 | 1 Oct 2019 |
| Utility: Gas plenum arrangement for improving etch non-uniformity in transformer-coupled plasma systems Filling date: 7 Sep 2025 Issue date: 1 Oct 2019 | 12 Oct 2016 | 1 Oct 2019 |
| Utility: Gas supply delivery arrangement including a gas splitter for tunable gas flow control Filling date: 7 Sep 2025 Issue date: 1 Oct 2019 | 19 Oct 2015 | 1 Oct 2019 |
| Utility: Controlling ion energy within a plasma chamber Filling date: 7 Sep 2025 Issue date: 24 Sep 2019 | 13 Nov 2018 | 24 Sep 2019 |
| Utility: Systems, methods and apparatus for choked flow element extraction Filling date: 7 Sep 2025 Issue date: 24 Sep 2019 | 22 Aug 2016 | 24 Sep 2019 |
| Utility: Surface coating treatment Filling date: 7 Sep 2025 Issue date: 24 Sep 2019 | 7 Dec 2015 | 24 Sep 2019 |
| Utility: Composite dielectric interface layers for interconnect structures Filling date: 7 Sep 2025 Issue date: 17 Sep 2019 | 17 Jul 2018 | 17 Sep 2019 |
| Utility: Remote detection of plating on wafer holding apparatus Filling date: 7 Sep 2025 Issue date: 17 Sep 2019 | 29 Jun 2017 | 17 Sep 2019 |
| Utility: Storing and organizing minimum contact area features and wafer transfer pins during system maintenance Filling date: 7 Sep 2025 Issue date: 17 Sep 2019 | 20 Jul 2016 | 17 Sep 2019 |
| Utility: Methods and apparatuses for electroplating and seed layer detection Filling date: 7 Sep 2025 Issue date: 10 Sep 2019 | 20 Dec 2018 | 10 Sep 2019 |
| Utility: Systems and methods for tuning to reduce reflected power in multiple states Filling date: 7 Sep 2025 Issue date: 10 Sep 2019 | 23 Jan 2018 | 10 Sep 2019 |
| Utility: Methods and apparatuses for showerhead backside parasitic plasma suppression in a secondary purge enabled ALD system Filling date: 7 Sep 2025 Issue date: 10 Sep 2019 | 28 Feb 2017 | 10 Sep 2019 |
| Utility: Control of on-wafer CD uniformity with movable edge ring and gas injection adjustment Filling date: 7 Sep 2025 Issue date: 10 Sep 2019 | 19 Aug 2016 | 10 Sep 2019 |
