Entegris
Utility Patent Applications

Last updated:

List of all Entegris patents 188 in total

Status Patent
Application
Utility: GROUP VI METAL DEPOSITION PROCESS External link
Filling date: 8 Sep 2025 Issue date: 4 Mar 2021
Application
Utility: RETICLE POD HAVING SIDE CONTAINMENT OF RETICLE External link
Filling date: 8 Sep 2025 Issue date: 25 Feb 2021
Application
Utility: FORMULATIONS FOR HIGH SELECTIVE SILICON NITRIDE ETCH External link
Filling date: 8 Sep 2025 Issue date: 25 Feb 2021
Application
Utility: INTEGRATED ELECTRONIC WASTE RECYCLING AND RECOVERY SYSTEM AND PROCESS OF USING SAME External link
Filling date: 8 Sep 2025 Issue date: 11 Feb 2021
Application
Utility: SYSTEM AND METHOD FOR REMOVING AIRBORNE MOLECULAR CONTAMINANTS FROM GAS STREAMS External link
Filling date: 8 Sep 2025 Issue date: 4 Feb 2021
Application
Utility: GROUNDING MECHANISM FOR MULTI-LAYER FOR ELECTROSTATIC CHUCK, AND RELATED METHODS External link
Filling date: 8 Sep 2025 Issue date: 28 Jan 2021
Application
Utility: WAFER CUSHION External link
Filling date: 8 Sep 2025 Issue date: 21 Jan 2021
Application
Utility: POROUS SINTERED MEMBRANES AND METHODS OF PREPARING POROUS SINTERED MEMBRANES External link
Filling date: 8 Sep 2025 Issue date: 21 Jan 2021
Application
Utility: ION IMPLANTATION SYSTEM WITH MIXTURE OF ARC CHAMBER MATERIALS External link
Filling date: 8 Sep 2025 Issue date: 21 Jan 2021
Application
Utility: POROUS CARBONACEOUS VACUUM CHAMBER LINERS External link
Filling date: 8 Sep 2025 Issue date: 14 Jan 2021
Application
Utility: OXYHALIDE PRECURSORS External link
Filling date: 8 Sep 2025 Issue date: 14 Jan 2021
Application
Utility: METHODS OF USING LASER ENERGY TO REMOVE PARTICLES FROM A SURFACE External link
Filling date: 8 Sep 2025 Issue date: 7 Jan 2021
Application
Utility: HYDROPHOBIC POLYETHYLENE MEMBRANE FOR USE IN VENTING, DEGASSING, AND MEMBRANE DISTILLATION PROCESSES External link
Filling date: 8 Sep 2025 Issue date: 31 Dec 2020
Application
Utility: COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE ARTICLES AND APPARATUS External link
Filling date: 8 Sep 2025 Issue date: 3 Dec 2020
Application
Utility: MANIFOLD WITH MOVABLE CONNECTOLOGY External link
Filling date: 8 Sep 2025 Issue date: 3 Dec 2020
Application
Utility: METHODS AND SYSTEMS FOR ADSORBING ORGANOMETALLIC VAPOR External link
Filling date: 8 Sep 2025 Issue date: 26 Nov 2020
Application
Utility: METHODS AND SYSTEMS FOR REMOVING AMMONIA FROM A GAS MIXTURE External link
Filling date: 8 Sep 2025 Issue date: 26 Nov 2020
Application
Utility: SUBSTRATE CONTAINER VALVE ASSEMBLIES External link
Filling date: 8 Sep 2025 Issue date: 19 Nov 2020
Application
Utility: METHOD FOR FORMING CARBON RICH SILICON-CONTAINING FILMS External link
Filling date: 8 Sep 2025 Issue date: 12 Nov 2020
Application
Utility: FILTER WITH ELECTROSTATIC DISCHARGE MITIGATION SLEEVE External link
Filling date: 8 Sep 2025 Issue date: 5 Nov 2020
Application
Utility: VAPORIZATION VESSEL AND METHOD External link
Filling date: 8 Sep 2025 Issue date: 29 Oct 2020
Application
Utility: PURGE CONNECTORS AND MODULES FOR A SUBSTRATE CONTAINER External link
Filling date: 8 Sep 2025 Issue date: 29 Oct 2020
Application
Utility: SEGMENT DESIGNS FOR DISCS External link
Filling date: 8 Sep 2025 Issue date: 15 Oct 2020
Application
Utility: COMPOSITE HOLLOW FIBER AND RELATED METHODS AND PRODUCTS External link
Filling date: 8 Sep 2025 Issue date: 17 Sep 2020
Application
Utility: GROUP VI PRECURSOR COMPOUNDS External link
Filling date: 8 Sep 2025 Issue date: 27 Aug 2020
Application
Utility: POLYIMIDE-CONTAINING FILTRATION MEMBRANE, FILTERS, AND METHODS External link
Filling date: 8 Sep 2025 Issue date: 27 Aug 2020
Application
Utility: SELECTIVE DEPOSITION OF SILICON NITRIDE External link
Filling date: 8 Sep 2025 Issue date: 20 Aug 2020
Application
Utility: CERIA REMOVAL COMPOSITIONS External link
Filling date: 8 Sep 2025 Issue date: 13 Aug 2020
Application
Utility: LIGAND-MODIFIED FILTER AND METHODS FOR REDUCING METALS FROM LIQUID COMPOSITIONS External link
Filling date: 8 Sep 2025 Issue date: 13 Aug 2020
Application
Utility: VALVE ASSEMBLIES AND FLUID STORAGE AND DISPENSING PACKAGES COMPRISING SAME External link
Filling date: 8 Sep 2025 Issue date: 6 Aug 2020
Application
Utility: AMINOIODOSILANES AND METHODS OF SYNTHESIZING THESE AMINOIODOSILANES External link
Filling date: 8 Sep 2025 Issue date: 23 Jul 2020
Application
Utility: POROUS POLYMERIC HOLLOW FILTER MEMBRANE External link
Filling date: 8 Sep 2025 Issue date: 16 Jul 2020
Application
Utility: LINER FOR AN OVERPACK ASSEMBLY External link
Filling date: 8 Sep 2025 Issue date: 2 Jul 2020
Application
Utility: RETICLE POD HAVING SIDE CONTAINMENT OF RETICLE External link
Filling date: 8 Sep 2025 Issue date: 2 Jul 2020
Application
Utility: LATCHING MECHANISM FOR A SUBSTRATE CONTAINER External link
Filling date: 8 Sep 2025 Issue date: 2 Jul 2020
Application
Utility: COATED POROUS POLYMERIC MEMBRANES External link
Filling date: 8 Sep 2025 Issue date: 2 Jul 2020
Application
Utility: ADSORBENTS AND FLUID SUPPLY PACKAGES AND APPARATUS COMPRISING SAME External link
Filling date: 8 Sep 2025 Issue date: 2 Jul 2020
Application
Utility: METHODS FOR DEPOSITING A TUNGSTEN OR MOLYBDENUM LAYER IN THE PRESENCE OF A REDUCING CO-REACTANT External link
Filling date: 8 Sep 2025 Issue date: 25 Jun 2020
Application
Utility: COMPOSITIONS AND METHODS FOR POST-CMP CLEANING OF COBALT SUBSTRATES External link
Filling date: 8 Sep 2025 Issue date: 25 Jun 2020
Application
Utility: ACTIVE WET SCRUBBING FILTRATION SYSTEM External link
Filling date: 8 Sep 2025 Issue date: 25 Jun 2020
Application
Utility: Bulk Process Gas Purification Systems and Related Methods External link
Filling date: 8 Sep 2025 Issue date: 25 Jun 2020
Application
Utility: FLUORINE ION IMPLANTATION SYSTEM WITH NON-TUNGSTEN MATERIALS AND METHODS OF USING External link
Filling date: 8 Sep 2025 Issue date: 18 Jun 2020
Application
Utility: FLUORINE ION IMPLANTATION METHOD AND SYSTEM External link
Filling date: 8 Sep 2025 Issue date: 18 Jun 2020
Application
Utility: VALVE AND VALVE MEMBER FOR CONTROLLING FLUID FLOW External link
Filling date: 8 Sep 2025 Issue date: 18 Jun 2020
Application
Utility: RUTHENIUM ETCHING COMPOSITION AND METHOD External link
Filling date: 8 Sep 2025 Issue date: 18 Jun 2020
Application
Utility: Composite Nanoporous Metal Membrane External link
Filling date: 8 Sep 2025 Issue date: 18 Jun 2020
Application
Utility: PREPARATION OF TRIIODOSILANES External link
Filling date: 8 Sep 2025 Issue date: 11 Jun 2020
Application
Utility: POST CHEMICAL MECHANICAL POLISHING CLEANING COMPOSITIONS External link
Filling date: 8 Sep 2025 Issue date: 11 Jun 2020
Application
Utility: HYDROPHILIC FILTER MEMBRANE WITH PENDANT HYDROPHILIC GROUPS, AND RELATED METHODS OF PREPARATION AND USE External link
Filling date: 8 Sep 2025 Issue date: 4 Jun 2020
Application
Utility: Substrate Cushion Brace Retainer External link
Filling date: 8 Sep 2025 Issue date: 28 May 2020

Showing 100 to 150 of 188 patents.