Onto Innovation
Utility Patent Applications
Last updated:
List of all Onto Innovation patents 19 in total
| Status | Patent |
|---|---|
Application | Utility: NON-DESTRUCTIVE INSPECTION AND MANUFACTURING METROLOGY SYSTEMS AND METHODS Filling date: 6 Sep 2025 Issue date: 21 Jul 2022 |
Application | Utility: FOCUS SYSTEM FOR OBLIQUE OPTICAL METROLOGY DEVICE Filling date: 6 Sep 2025 Issue date: 2 Jun 2022 |
Application | Utility: VORTEX POLARIMETER Filling date: 6 Sep 2025 Issue date: 2 Jun 2022 |
Application | Utility: SYSTEM AND METHOD FOR OPTIMIZING A LITHOGRAPHY EXPOSURE PROCESS Filling date: 6 Sep 2025 Issue date: 10 Mar 2022 |
Application | Utility: TARGET FOR OPTICAL MEASUREMENT OF TRENCHES Filling date: 6 Sep 2025 Issue date: 21 Oct 2021 |
Application | Utility: CHARACTERIZATION OF PATTERNED STRUCTURES USING ACOUSTIC METROLOGY Filling date: 6 Sep 2025 Issue date: 14 Oct 2021 |
Application | Utility: ENHANCED HEAT TRANSFER IN LIQUEFIED GAS COOLED DETECTOR Filling date: 6 Sep 2025 Issue date: 7 Oct 2021 |
Application | Utility: SYSTEM AND METHOD FOR CORRECTING OVERLAY ERRORS IN A LITHOGRAPHIC PROCESS Filling date: 6 Sep 2025 Issue date: 26 Aug 2021 |
Application | Utility: FAST GENERALIZED MULTI-WAVELENGTH ELLIPSOMETER Filling date: 6 Sep 2025 Issue date: 26 Aug 2021 |
Application | Utility: BEAMSPLITTER BASED ELLIPSOMETER FOCUSING SYSTEM Filling date: 6 Sep 2025 Issue date: 1 Apr 2021 |
Application | Utility: SAMPLE SURFACE POLARIZATION MODIFICATION IN INTERFEROMETRIC DEFECT INSPECTION Filling date: 6 Sep 2025 Issue date: 25 Mar 2021 |
Application | Utility: CONFORMAL STAGE Filling date: 6 Sep 2025 Issue date: 24 Dec 2020 |
Application | Utility: ACTIVE DAMPER FOR SEMICONDUCTOR METROLOGY AND INSPECTION SYSTEMS Filling date: 6 Sep 2025 Issue date: 26 Nov 2020 |
Application | Utility: OPTICAL METROLOGY DEVICE USING NUMERICAL APERTURE REDUCTION Filling date: 6 Sep 2025 Issue date: 19 Nov 2020 |
Application | Utility: LASER TRIANGULATION SENSOR SYSTEM AND METHOD FOR WAFER INSPECTION Filling date: 6 Sep 2025 Issue date: 12 Nov 2020 |
Application | Utility: SEPARATED AXIS LITHOGRAPHIC TOOL Filling date: 6 Sep 2025 Issue date: 22 Oct 2020 |
Application | Utility: HIGH RESOLUTION STAGE POSITIONER Filling date: 6 Sep 2025 Issue date: 10 Sep 2020 |
Application | Utility: SYSTEM AND METHOD FOR OPTIMIZING A LITHOGRAPHY EXPOSURE PROCESS Filling date: 6 Sep 2025 Issue date: 23 Jul 2020 |
Application | Utility: OPTICAL METROLOGY DEVICE FOR MEASURING SAMPLES HAVING THIN OR THICK FILMS Filling date: 6 Sep 2025 Issue date: 11 Jun 2020 |
Showing 1 to 19 of 19 patents.