Onto Innovation
Utility Patents
Last updated:
List of all Onto Innovation patents 20 in total
| Status | Patent |
|---|---|
Grant | Utility: Interferometry with pixelated color discriminating elements combined with pixelated polarization masks Filling date: 6 Sep 2025 Issue date: 7 Jun 2022 |
Grant | Utility: Conformal stage Filling date: 6 Sep 2025 Issue date: 7 Jun 2022 |
Grant | Utility: Focus system for oblique optical metrology device Filling date: 6 Sep 2025 Issue date: 31 May 2022 |
Grant | Utility: Vortex polarimeter Filling date: 6 Sep 2025 Issue date: 31 May 2022 |
Grant | Utility: Fast generalized multi-wavelength ellipsometer Filling date: 6 Sep 2025 Issue date: 31 May 2022 |
Grant | Utility: Active damper for semiconductor metrology and inspection systems Filling date: 6 Sep 2025 Issue date: 22 Mar 2022 |
Grant | Utility: On-axis dynamic interferometer and optical imaging systems employing the same Filling date: 6 Sep 2025 Issue date: 1 Mar 2022 |
Grant | Utility: Optical metrology device using numerical aperture reduction Filling date: 6 Sep 2025 Issue date: 2 Nov 2021 |
Grant | Utility: Sample surface polarization modification in interferometric defect inspection Filling date: 6 Sep 2025 Issue date: 19 Oct 2021 |
Grant | Utility: System and method for optimizing a lithography exposure process Filling date: 6 Sep 2025 Issue date: 21 Sep 2021 |
Grant | Utility: Calibration of azimuth angle for optical metrology stage using grating-coupled surface plasmon resonance Filling date: 6 Sep 2025 Issue date: 3 Aug 2021 |
Grant | Utility: Sample inspection using topography Filling date: 6 Sep 2025 Issue date: 2 Mar 2021 |
Grant | Utility: Sub-resolution defect detection Filling date: 6 Sep 2025 Issue date: 2 Mar 2021 |
Grant | Utility: Non-adhesive mounting assembly for a tall Rochon polarizer Filling date: 6 Sep 2025 Issue date: 9 Feb 2021 |
Grant | Utility: Optical metrology system using infrared wavelengths Filling date: 6 Sep 2025 Issue date: 26 Jan 2021 |
Grant | Utility: Interferometer with pixelated phase shift mask Filling date: 6 Sep 2025 Issue date: 10 Nov 2020 |
Grant | Utility: FOUP purge shield Filling date: 6 Sep 2025 Issue date: 22 Sep 2020 |
Grant | Utility: Light source failure identification in an optical metrology device Filling date: 6 Sep 2025 Issue date: 15 Sep 2020 |
Grant | Utility: Optical metrology device for measuring samples having thin or thick films Filling date: 6 Sep 2025 Issue date: 18 Aug 2020 |
Grant | Utility: Correction of angular error of plane-of-incidence azimuth of optical metrology device Filling date: 6 Sep 2025 Issue date: 14 Apr 2020 |
Showing 1 to 20 of 20 patents.