KLA
Utility Patent Applications
Last updated:
List of all KLA patents 231 in total
| Status | Patent |
|---|---|
Application | Utility: Process Monitoring Of Deep Structures With X-Ray Scatterometry Filling date: 7 Sep 2025 Issue date: 30 Dec 2021 |
Application | Utility: ENABLING SCANNING ELECTRON MICROSCOPE IMAGING WHILE PREVENTING SAMPLE DAMAGE ON SENSITIVE LAYERS USED IN SEMICONDUCTOR MANUFACTURING PROCESSES Filling date: 7 Sep 2025 Issue date: 30 Dec 2021 |
Application | Utility: Semiconductor Overlay Measurements using Machine Learning Filling date: 7 Sep 2025 Issue date: 30 Dec 2021 |
Application | Utility: Performance Optimized Scanning Sequence for eBeam Metrology and Inspection Filling date: 7 Sep 2025 Issue date: 30 Dec 2021 |
Application | Utility: Frequency Conversion Using Stacked Strontium Tetraborate Plates Filling date: 7 Sep 2025 Issue date: 16 Dec 2021 |
Application | Utility: Metrology System and Method for Measuring Diagonal Diffraction-Based Overlay Targets Filling date: 7 Sep 2025 Issue date: 16 Dec 2021 |
Application | Utility: METROLOGY TARGET FOR ONE-DIMENSIONAL MEASUREMENT OF PERIODIC MISREGISTRATION Filling date: 7 Sep 2025 Issue date: 9 Dec 2021 |
Application | Utility: Fleet Matching Of Semiconductor Metrology Tools Without Dedicated Quality Control Wafers Filling date: 7 Sep 2025 Issue date: 2 Dec 2021 |
Application | Utility: IMAGING SYSTEM FOR BURIED METROLOGY TARGETS Filling date: 7 Sep 2025 Issue date: 2 Dec 2021 |
Application | Utility: MODE SELECTION AND DEFECT DETECTION TRAINING Filling date: 7 Sep 2025 Issue date: 25 Nov 2021 |
Application | Utility: Measurement Modes for Overlay Filling date: 7 Sep 2025 Issue date: 25 Nov 2021 |
Application | Utility: MULTIPLE-TOOL PARAMETER SET CALIBRATION AND MISREGISTRATION MEASUREMENT SYSTEM AND METHOD Filling date: 7 Sep 2025 Issue date: 25 Nov 2021 |
Application | Utility: DEFECT SIZE MEASUREMENT USING DEEP LEARNING METHODS Filling date: 7 Sep 2025 Issue date: 25 Nov 2021 |
Application | Utility: SELECTION OF REGIONS OF INTEREST FOR MEASUREMENT OF MISREGISTRATION AND AMELIORATION THEREOF Filling date: 7 Sep 2025 Issue date: 25 Nov 2021 |
Application | Utility: APPARATUS AND METHOD FOR ROTATING AN OPTICAL OBJECTIVE Filling date: 7 Sep 2025 Issue date: 18 Nov 2021 |
Application | Utility: SYSTEM, METHOD, AND TARGET FOR WAFER ALIGNMENT Filling date: 7 Sep 2025 Issue date: 18 Nov 2021 |
Application | Utility: MULTI-CONTROLLER INSPECTION SYSTEM Filling date: 7 Sep 2025 Issue date: 11 Nov 2021 |
Application | Utility: PRINT CHECK REPEATER DEFECT DETECTION Filling date: 7 Sep 2025 Issue date: 4 Nov 2021 |
Application | Utility: TRAINING A MACHINE LEARNING MODEL TO GENERATE HIGHER RESOLUTION IMAGES FROM INSPECTION IMAGES Filling date: 7 Sep 2025 Issue date: 4 Nov 2021 |
Application | Utility: Measuring Temperature-Modulated Properties of a Test Sample Filling date: 7 Sep 2025 Issue date: 28 Oct 2021 |
Application | Utility: METROLOGY METHODS AND OPTICAL SCHEMES FOR MEASUREMENT OF MISREGISTRATION BY USING HATCHED TARGET DESIGNS Filling date: 7 Sep 2025 Issue date: 28 Oct 2021 |
Application | Utility: IMAGE ALIGNMENT FOR NOISY IMAGES Filling date: 7 Sep 2025 Issue date: 28 Oct 2021 |
Application | Utility: Micro-Four-Point Metrology of Joule-Heating-Induced Modulation of Test Sample Properties Filling date: 7 Sep 2025 Issue date: 28 Oct 2021 |
Application | Utility: TARGET DESIGN PROCESS FOR OVERLAY TARGETS INTENDED FOR MULTI-SIGNAL MEASUREMENTS Filling date: 7 Sep 2025 Issue date: 28 Oct 2021 |
Application | Utility: Cantilever-Type Probe with Multiple Metallic Coatings Filling date: 7 Sep 2025 Issue date: 28 Oct 2021 |
Application | Utility: FAB MANAGEMENT WITH DYNAMIC SAMPLING PLANS, OPTIMIZED WAFER MEASUREMENT PATHS AND OPTIMIZED WAFER TRANSPORT, USING QUANTUM COMPUTING Filling date: 7 Sep 2025 Issue date: 28 Oct 2021 |
Application | Utility: ELECTRON BEAM SYSTEM FOR INSPECTION AND REVIEW OF 3D DEVICES Filling date: 7 Sep 2025 Issue date: 21 Oct 2021 |
Application | Utility: MINI-ENVIRONMENT SYSTEM FOR CONTROLLING OXYGEN AND HUMIDITY LEVELS WITHIN A SAMPLE TRANSPORT DEVICE Filling date: 7 Sep 2025 Issue date: 21 Oct 2021 |
Application | Utility: Thin Pellicle Material for Protection of Solid-State Electron Detectors Filling date: 7 Sep 2025 Issue date: 21 Oct 2021 |
Application | Utility: LASER-SUSTAINED PLASMA LIGHT SOURCE WITH GAS VORTEX FLOW Filling date: 7 Sep 2025 Issue date: 14 Oct 2021 |
Application | Utility: BACK-ILLUMINATED SENSOR AND A METHOD OF MANUFACTURING A SENSOR USING A SILICON ON INSULATOR WAFER Filling date: 7 Sep 2025 Issue date: 14 Oct 2021 |
Application | Utility: BROADBAND ULTRAVIOLET ILLUMINATION SOURCES Filling date: 7 Sep 2025 Issue date: 2 Sep 2021 |
Application | Utility: SYSTEM AND METHOD FOR ENHANCING DATA PROCESSING THROUGHPUT USING LESS EFFECTIVE PIXEL WHILE MAINTAINING WAFER WARP COVERAGE Filling date: 7 Sep 2025 Issue date: 2 Sep 2021 |
Application | Utility: GENERATIVE ADVERSARIAL NETWORKS (GANs) FOR SIMULATING SPECIMEN IMAGES Filling date: 7 Sep 2025 Issue date: 2 Sep 2021 |
Application | Utility: OPTICAL METROLOGY TOOL EQUIPPED WITH MODULATED ILLUMINATION SOURCES Filling date: 7 Sep 2025 Issue date: 22 Jul 2021 |
Application | Utility: System and Method for Analyzing a Sample with a Dynamic Recipe Based on Iterative Experimentation and Feedback Filling date: 7 Sep 2025 Issue date: 22 Jul 2021 |
Application | Utility: PROJECTION AND DISTANCE SEGMENTATION ALGORITHM FOR WAFER DEFECT DETECTION Filling date: 7 Sep 2025 Issue date: 15 Jul 2021 |
Application | Utility: ADVANCED IN-LINE PART AVERAGE TESTING Filling date: 7 Sep 2025 Issue date: 15 Jul 2021 |
Application | Utility: System and Method for Wafer-By-Wafer Overlay Feedforward and Lot-To-Lot Feedback Control Filling date: 7 Sep 2025 Issue date: 15 Jul 2021 |
Application | Utility: Methods And Systems For Overlay Measurement Based On Soft X-Ray Scatterometry Filling date: 7 Sep 2025 Issue date: 8 Jul 2021 |
Application | Utility: FIELD-TO-FIELD CORRECTIONS USING OVERLAY TARGETS Filling date: 7 Sep 2025 Issue date: 1 Jul 2021 |
Application | Utility: THICK PHOTO RESIST LAYER METROLOGY TARGET Filling date: 7 Sep 2025 Issue date: 1 Jul 2021 |
Application | Utility: IMPROVED SELF-MOIRE GRATING DESIGN FOR USE IN METROLOGY Filling date: 7 Sep 2025 Issue date: 1 Jul 2021 |
Application | Utility: METHOD OF MEASURING MISREGISTRATION IN THE MANUFACTURE OF TOPOGRAPHIC SEMICONDUCTOR DEVICE WAFERS Filling date: 7 Sep 2025 Issue date: 1 Jul 2021 |
Application | Utility: SYSTEM AND METHOD FOR MEASURING MISREGISTRATION OF SEMICONDUCTOR DEVICE WAFERS UTILIZING INDUCED TOPOGRAPHY Filling date: 7 Sep 2025 Issue date: 24 Jun 2021 |
Application | Utility: SYSTEM, METHOD AND APPARATUS FOR POLARIZATION CONTROL Filling date: 7 Sep 2025 Issue date: 10 Jun 2021 |
Application | Utility: System and Method for Defining Flexible Regions on a Sample During Inspection Filling date: 7 Sep 2025 Issue date: 10 Jun 2021 |
Application | Utility: SENSITIVE PARTICLE DETECTION WITH SPATIALLY-VARYING POLARIZATION ROTATOR AND POLARIZER Filling date: 7 Sep 2025 Issue date: 3 Jun 2021 |
Application | Utility: LOW-REFLECTIVITY BACK-ILLUMINATED IMAGE SENSOR Filling date: 7 Sep 2025 Issue date: 3 Jun 2021 |
Application | Utility: APPARATUS AND METHOD FOR GRAY FIELD IMAGING Filling date: 7 Sep 2025 Issue date: 3 Jun 2021 |
Showing 50 to 100 of 231 patents.