| Utility: Combiner and distributor for adjusting impedances or power across multiple plasma processing stations Filling date: 6 Sep 2025 Issue date: 22 Feb 2022 | 21 Feb 2020 | 22 Feb 2022 |
| Utility: Systems and methods for flow monitoring in a precursor vapor supply system of a substrate processing system Filling date: 6 Sep 2025 Issue date: 22 Feb 2022 | 28 Jun 2019 | 22 Feb 2022 |
| Utility: Auto-calibration to a station of a process module that spins a wafer Filling date: 6 Sep 2025 Issue date: 1 Feb 2022 | 8 May 2020 | 1 Feb 2022 |
| Utility: Conformal damage-free encapsulation of chalcogenide materials Filling date: 6 Sep 2025 Issue date: 1 Feb 2022 | 24 Aug 2018 | 1 Feb 2022 |
| Utility: Actuator to adjust dynamically showerhead tilt in a semiconductor-processing apparatus Filling date: 6 Sep 2025 Issue date: 25 Jan 2022 | 12 Dec 2019 | 25 Jan 2022 |
| Utility: Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamber Filling date: 6 Sep 2025 Issue date: 30 Nov 2021 | 24 Jul 2019 | 30 Nov 2021 |
| Utility: Magnetic shielding for plasma sources Filling date: 6 Sep 2025 Issue date: 16 Nov 2021 | 25 Jul 2018 | 16 Nov 2021 |
| Utility: Systems and methods for UV-based suppression of plasma instability Filling date: 6 Sep 2025 Issue date: 14 Sep 2021 | 5 Dec 2019 | 14 Sep 2021 |
| Utility: Selective growth of metal-containing hardmask thin films Filling date: 6 Sep 2025 Issue date: 31 Aug 2021 | 30 Mar 2020 | 31 Aug 2021 |
| Utility: Selective deposition of etch-stop layer for enhanced patterning Filling date: 6 Sep 2025 Issue date: 17 Aug 2021 | 15 Jan 2020 | 17 Aug 2021 |
| Utility: Atomic layer etch of tungsten for enhanced tungsten deposition fill Filling date: 6 Sep 2025 Issue date: 20 Jul 2021 | 26 May 2020 | 20 Jul 2021 |
| Utility: In situ vapor deposition polymerization to form polymers as precursors to viscoelastic fluids for particle removal from substrates Filling date: 6 Sep 2025 Issue date: 20 Jul 2021 | 25 Jun 2018 | 20 Jul 2021 |
| Utility: Electrostatic chuck with features for preventing electrical arcing and light-up and improving process uniformity Filling date: 6 Sep 2025 Issue date: 20 Jul 2021 | 27 Jun 2017 | 20 Jul 2021 |
| Utility: Ion injector and lens system for ion beam milling Filling date: 6 Sep 2025 Issue date: 13 Jul 2021 | 25 Jan 2018 | 13 Jul 2021 |
| Utility: Metal doped carbon based hard mask removal in semiconductor fabrication Filling date: 6 Sep 2025 Issue date: 13 Jul 2021 | 30 Jun 2017 | 13 Jul 2021 |
| Utility: Wafer positioning pedestal for semiconductor processing Filling date: 6 Sep 2025 Issue date: 6 Jul 2021 | 16 Jun 2020 | 6 Jul 2021 |
| Utility: Metal contamination reduction in substrate processing systems with transformer coupled plasma Filling date: 6 Sep 2025 Issue date: 6 Jul 2021 | 3 Jan 2019 | 6 Jul 2021 |
| Utility: Methods and systems for controlling wafer fabrication process Filling date: 6 Sep 2025 Issue date: 6 Jul 2021 | 14 Sep 2018 | 6 Jul 2021 |
| Utility: Method and apparatus for determining process rate Filling date: 6 Sep 2025 Issue date: 6 Jul 2021 | 3 Aug 2017 | 6 Jul 2021 |
| Utility: Systems and methods for achieving peak ion energy enhancement with a low angular spread Filling date: 6 Sep 2025 Issue date: 29 Jun 2021 | 6 Aug 2019 | 29 Jun 2021 |
| Utility: Dynamic modulation of cross flow manifold during elecroplating Filling date: 6 Sep 2025 Issue date: 29 Jun 2021 | 5 Jun 2019 | 29 Jun 2021 |
| Utility: Gap fill using carbon-based films Filling date: 6 Sep 2025 Issue date: 29 Jun 2021 | 16 Nov 2018 | 29 Jun 2021 |
| Utility: Methods and systems for advanced ion control for etching processes Filling date: 6 Sep 2025 Issue date: 29 Jun 2021 | 20 Nov 2017 | 29 Jun 2021 |
| Utility: Method of controlling a patterning process, lithographic apparatus, metrology apparatus lithographic cell and associated computer program Filling date: 6 Sep 2025 Issue date: 29 Jun 2021 | 16 Feb 2017 | 29 Jun 2021 |
| Utility: Multiple-output radiofrequency matching module and associated methods Filling date: 6 Sep 2025 Issue date: 15 Jun 2021 | 13 Apr 2020 | 15 Jun 2021 |
| Utility: Amorphous carbon layer opening process Filling date: 6 Sep 2025 Issue date: 15 Jun 2021 | 28 Jan 2019 | 15 Jun 2021 |
| Utility: Real-time health monitoring of semiconductor manufacturing equipment Filling date: 6 Sep 2025 Issue date: 15 Jun 2021 | 13 Dec 2018 | 15 Jun 2021 |
| Utility: Use of voltage and current measurements to control dual zone ceramic pedestals Filling date: 6 Sep 2025 Issue date: 8 Jun 2021 | 27 Apr 2020 | 8 Jun 2021 |
| Utility: Vacuum pump protection against deposition byproduct buildup Filling date: 6 Sep 2025 Issue date: 8 Jun 2021 | 26 Sep 2019 | 8 Jun 2021 |
| Utility: Systems and methods for calibrating scalar field contribution values for a limited number of sensors including a temperature value of an electrostatic chuck and estimating temperature distribution profiles based on calibrated values Filling date: 6 Sep 2025 Issue date: 8 Jun 2021 | 9 Jul 2019 | 8 Jun 2021 |
| Utility: Modification of SNO.sub.2 surface for EUV lithography Filling date: 6 Sep 2025 Issue date: 8 Jun 2021 | 14 Aug 2018 | 8 Jun 2021 |
| Utility: Tin oxide thin film spacers in semiconductor device manufacturing Filling date: 6 Sep 2025 Issue date: 8 Jun 2021 | 22 Sep 2017 | 8 Jun 2021 |
| Utility: Symmetric precursor delivery Filling date: 6 Sep 2025 Issue date: 1 Jun 2021 | 17 Aug 2018 | 1 Jun 2021 |
| Utility: Electrostatic chuck design for cooling-gas light-up prevention Filling date: 6 Sep 2025 Issue date: 1 Jun 2021 | 10 Aug 2018 | 1 Jun 2021 |
| Utility: Optimized low energy / high productivity deposition system Filling date: 6 Sep 2025 Issue date: 1 Jun 2021 | 11 Jan 2018 | 1 Jun 2021 |
| Utility: Integrated showerhead with improved hole pattern for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition Filling date: 6 Sep 2025 Issue date: 25 May 2021 | 7 Dec 2018 | 25 May 2021 |
| Utility: Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 29 Aug 2019 | 18 May 2021 |
| Utility: Plasma apparatus for high aspect ratio selective lateral etch using cyclic passivation and etching Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 7 Mar 2019 | 18 May 2021 |
| Utility: Monoenergetic ion generation for controlled etch Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 13 Jul 2018 | 18 May 2021 |
| Utility: Temperature-tuned substrate support for substrate processing systems Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 12 May 2017 | 18 May 2021 |
| Utility: Components such as edge rings including chemical vapor deposition (CVD) diamond coating with high purity SP3 bonds for plasma processing systems Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 9 Feb 2017 | 18 May 2021 |
| Utility: Systems and methods for performing edge ring characterization Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 11 Jan 2017 | 18 May 2021 |
| Utility: Methods and apparatus for flow isolation and focusing during electroplating Filling date: 6 Sep 2025 Issue date: 11 May 2021 | 10 Aug 2018 | 11 May 2021 |
| Utility: Temperature controlled spacer for use in a substrate processing chamber Filling date: 6 Sep 2025 Issue date: 11 May 2021 | 14 Feb 2017 | 11 May 2021 |
| Utility: Method of etch model calibration using optical scatterometry Filling date: 6 Sep 2025 Issue date: 4 May 2021 | 13 Jan 2020 | 4 May 2021 |
| Utility: Selective deposition with atomic layer etch reset Filling date: 6 Sep 2025 Issue date: 4 May 2021 | 13 Dec 2019 | 4 May 2021 |
| Utility: Ion beam etch without need for wafer tilt or rotation Filling date: 6 Sep 2025 Issue date: 4 May 2021 | 15 Apr 2019 | 4 May 2021 |
| Utility: Apparatus for measuring condition of electroplating cell components and associated methods Filling date: 6 Sep 2025 Issue date: 27 Apr 2021 | 17 Sep 2019 | 27 Apr 2021 |
| Utility: Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system Filling date: 6 Sep 2025 Issue date: 27 Apr 2021 | 4 Sep 2018 | 27 Apr 2021 |
| Utility: Systems and methods for combining optical metrology with mass metrology Filling date: 6 Sep 2025 Issue date: 27 Apr 2021 | 6 Sep 2017 | 27 Apr 2021 |
