Lam Research
Utility Patent Applications
Last updated:
List of all Lam Research patents 402 in total
| Status | Patent |
|---|---|
Application | Utility: SURFACE MODIFIED DEPTH CONTROLLED DEPOSITION FOR PLASMA BASED DEPOSITION Filling date: 8 Sep 2025 Issue date: 12 Nov 2020 |
Application | Utility: EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING Filling date: 8 Sep 2025 Issue date: 5 Nov 2020 |
Application | Utility: Controller for Controlling Core Critical Dimension Variation Using Flash Trim Sequence Filling date: 8 Sep 2025 Issue date: 5 Nov 2020 |
Application | Utility: MATCHED TCR JOULE HEATER DESIGNS FOR ELECTROSTATIC CHUCKS Filling date: 8 Sep 2025 Issue date: 22 Oct 2020 |
Application | Utility: DC BIAS CIRCUIT AND GAS DELIVERY SYSTEM FOR SUBSTRATE PROCESSING SYSTEMS Filling date: 8 Sep 2025 Issue date: 22 Oct 2020 |
Application | Utility: SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING WITHIN-WAFER NON-UNIFORMITY Filling date: 8 Sep 2025 Issue date: 22 Oct 2020 |
Application | Utility: RF PULSING WITHIN PULSING FOR SEMICONDUCTOR RF PLASMA PROCESSING Filling date: 8 Sep 2025 Issue date: 22 Oct 2020 |
Application | Utility: ATOMIC LAYER DEPOSITION AND ETCH IN A SINGLE PLASMA CHAMBER FOR CRITICAL DIMENSION CONTROL Filling date: 8 Sep 2025 Issue date: 15 Oct 2020 |
Application | Utility: SUBSTRATE PEDESTAL INCLUDING BACKSIDE GAS-DELIVERY TUBE Filling date: 8 Sep 2025 Issue date: 15 Oct 2020 |
Application | Utility: Air Cooled Faraday Shield and Methods for Using the Same Filling date: 8 Sep 2025 Issue date: 8 Oct 2020 |
Application | Utility: ELECTROSTATIC CHUCK FILTER BOX AND MOUNTING BRACKET Filling date: 8 Sep 2025 Issue date: 8 Oct 2020 |
Application | Utility: WAFER POSITIONING PEDESTAL FOR SEMICONDUCTOR PROCESSING Filling date: 8 Sep 2025 Issue date: 1 Oct 2020 |
Application | Utility: ATOMIC LAYER ETCHING METHODS AND APPARATUS Filling date: 8 Sep 2025 Issue date: 1 Oct 2020 |
Application | Utility: REMOVAL OF ELECTROPLATING BATH ADDITIVES Filling date: 8 Sep 2025 Issue date: 1 Oct 2020 |
Application | Utility: BOTTOM AND MIDDLE EDGE RINGS Filling date: 8 Sep 2025 Issue date: 1 Oct 2020 |
Application | Utility: Confinement Ring for Use in a Plasma Processing System Filling date: 8 Sep 2025 Issue date: 24 Sep 2020 |
Application | Utility: THICKNESS COMPENSATION BY MODULATION OF NUMBER OF DEPOSITION CYCLES AS A FUNCTION OF CHAMBER ACCUMULATION FOR WAFER TO WAFER FILM THICKNESS MATCHING Filling date: 8 Sep 2025 Issue date: 24 Sep 2020 |
Application | Utility: Frequency Tuning for a Matchless Plasma Source Filling date: 8 Sep 2025 Issue date: 10 Sep 2020 |
Application | Utility: ATOMIC LAYER ETCH OF TUNGSTEN FOR ENHANCED TUNGSTEN DEPOSITION FILL Filling date: 8 Sep 2025 Issue date: 10 Sep 2020 |
Application | Utility: CONTROL OF CURRENT DENSITY IN AN ELECTROPLATING APPARATUS Filling date: 8 Sep 2025 Issue date: 3 Sep 2020 |
Application | Utility: ELECTRO-OXIDATIVE METAL REMOVAL IN THROUGH MASK INTERCONNECT FABRICATION Filling date: 8 Sep 2025 Issue date: 3 Sep 2020 |
Application | Utility: VARIABLE DEPTH EDGE RING FOR ETCH UNIFORMITY CONTROL Filling date: 8 Sep 2025 Issue date: 27 Aug 2020 |
Application | Utility: AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER Filling date: 8 Sep 2025 Issue date: 27 Aug 2020 |
Application | Utility: REMOVING BUBBLES FROM PLATING CELL Filling date: 8 Sep 2025 Issue date: 27 Aug 2020 |
Application | Utility: SYSTEMS AND METHODS FOR PULSE WIDTH MODULATED DOSE CONTROL Filling date: 8 Sep 2025 Issue date: 27 Aug 2020 |
Application | Utility: USE OF VOLTAGE AND CURRENT MEASUREMENTS TO CONTROL DUAL ZONE CERAMIC PEDESTALS Filling date: 8 Sep 2025 Issue date: 13 Aug 2020 |
Application | Utility: COPPER ELECTRODEPOSITION ON COBALT LINED FEATURES Filling date: 8 Sep 2025 Issue date: 13 Aug 2020 |
Application | Utility: APPARATUSES AND METHODS FOR AVOIDING ELECTRICAL BREAKDOWN FROM RF TERMINAL TO ADJACENT NON-RF TERMINAL Filling date: 8 Sep 2025 Issue date: 6 Aug 2020 |
Application | Utility: MATCHLESS PLASMA SOURCE FOR SEMICONDUCTOR WAFER FABRICATION Filling date: 8 Sep 2025 Issue date: 6 Aug 2020 |
Application | Utility: DEPOSITION OF ALUMINUM OXIDE ETCH STOP LAYERS Filling date: 8 Sep 2025 Issue date: 6 Aug 2020 |
Application | Utility: APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBSTRATE Filling date: 8 Sep 2025 Issue date: 6 Aug 2020 |
Application | Utility: MUTUALLY INDUCED FILTERS Filling date: 8 Sep 2025 Issue date: 6 Aug 2020 |
Application | Utility: Multiple-Output Radiofrequency Matching Module and Associated Methods Filling date: 8 Sep 2025 Issue date: 30 Jul 2020 |
Application | Utility: ADJUSTMENT OF POWER AND FREQUENCY BASED ON THREE OR MORE STATES Filling date: 8 Sep 2025 Issue date: 30 Jul 2020 |
Application | Utility: ATOMIC LAYER DEPOSITION AND ETCH FOR REDUCING ROUGHNESS Filling date: 8 Sep 2025 Issue date: 30 Jul 2020 |
Application | Utility: MULTI ZONE GAS INJECTION UPPER ELECTRODE SYSTEM Filling date: 8 Sep 2025 Issue date: 30 Jul 2020 |
Application | Utility: FILL PROCESS OPTIMIZATION USING FEATURE SCALE MODELING Filling date: 8 Sep 2025 Issue date: 30 Jul 2020 |
Application | Utility: ELECTROMAGNETIC CASTING SYSTEMS INCLUDING FURNACES AND MOLDS FOR PRODUCING SILICON TUBES Filling date: 8 Sep 2025 Issue date: 30 Jul 2020 |
Application | Utility: Flow Assisted Dynamic Seal for High-Convection, Continuous-Rotation Plating Filling date: 8 Sep 2025 Issue date: 23 Jul 2020 |
Application | Utility: COIL AND WINDOW FOR PLASMA PROCESSING SYSTEM Filling date: 8 Sep 2025 Issue date: 23 Jul 2020 |
Application | Utility: METHOD OF CONTROLLING A PATTERNING PROCESS, LITHOGRAPHIC APPARATUS, METROLOGY APPARATUS LITHOGRAPHIC CELL AND ASSOCIATED COMPUTER PROGRAM Filling date: 8 Sep 2025 Issue date: 23 Jul 2020 |
Application | Utility: PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAYS AND SIDE CONTAINMENT Filling date: 8 Sep 2025 Issue date: 16 Jul 2020 |
Application | Utility: SELECTIVE GROWTH OF METAL-CONTAINING HARDMASK THIN FILMS Filling date: 8 Sep 2025 Issue date: 16 Jul 2020 |
Application | Utility: PULSED PLASMA CHAMBER IN DUAL CHAMBER CONFIGURATION Filling date: 8 Sep 2025 Issue date: 16 Jul 2020 |
Application | Utility: Systems And Methods For Controlling Directionality Of Ions In An Edge Region By Using An Electrode Within A Coupling Ring Filling date: 8 Sep 2025 Issue date: 16 Jul 2020 |
Application | Utility: DEFECT CLASSIFICATION AND SOURCE ANALYSIS FOR SEMICONDUCTOR EQUIPMENT Filling date: 8 Sep 2025 Issue date: 16 Jul 2020 |
Application | Utility: SYSTEMS AND METHODS FOR TUNING AN IMPEDANCE MATCHING NETWORK IN A STEP-WISE FASHION Filling date: 8 Sep 2025 Issue date: 9 Jul 2020 |
Application | Utility: METHOD TO CREATE AIR GAPS Filling date: 8 Sep 2025 Issue date: 9 Jul 2020 |
Application | Utility: TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING Filling date: 8 Sep 2025 Issue date: 9 Jul 2020 |
Application | Utility: INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL AND PRECURSOR GAS TO A DOWNSTREAM CHAMBER TO ENABLE REMOTE PLASMA FILM DEPOSITION Filling date: 8 Sep 2025 Issue date: 9 Jul 2020 |
Showing 150 to 200 of 402 patents.