| Utility: ASYMMETRIC WAFER BOW COMPENSATION BY CHEMICAL VAPOR DEPOSITION Filling date: 8 Sep 2025 Issue date: 2 Apr 2020 | 28 Sep 2018 | 2 Apr 2020 |
| Utility: Methods and Systems for Managing Byproduct Material Accumulation During Plasma-Based Semiconductor Wafer Fabrication Process Filling date: 8 Sep 2025 Issue date: 2 Apr 2020 | 28 Sep 2018 | 2 Apr 2020 |
| Utility: Systems and Methods for Controlling Plasma Instability in Semiconductor Fabrication Filling date: 8 Sep 2025 Issue date: 26 Mar 2020 | 27 Nov 2019 | 26 Mar 2020 |
| Utility: Methods And Systems For Determining A Fault In A Gas Heater Channel Filling date: 8 Sep 2025 Issue date: 26 Mar 2020 | 7 Oct 2019 | 26 Mar 2020 |
| Utility: DUAL FREQUENCY SILANE-BASED SILICON DIOXIDE DEPOSITION TO MINIMIZE FILM INSTABILITY Filling date: 8 Sep 2025 Issue date: 26 Mar 2020 | 26 Sep 2018 | 26 Mar 2020 |
| Utility: LONG-LIFE HIGH-POWER TERMINALS FOR SUBSTRATE SUPPORT WITH EMBEDDED HEATING ELEMENTS Filling date: 8 Sep 2025 Issue date: 26 Mar 2020 | 20 Sep 2018 | 26 Mar 2020 |
| Utility: THREE OR MORE STATES FOR ACHIEVING HIGH ASPECT RATIO DIELECTRIC ETCH Filling date: 8 Sep 2025 Issue date: 19 Mar 2020 | 21 Nov 2019 | 19 Mar 2020 |
| Utility: VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS Filling date: 8 Sep 2025 Issue date: 19 Mar 2020 | 21 Nov 2019 | 19 Mar 2020 |
| Utility: MULTI-CYCLE ALD PROCESS FOR FILM UNIFORMITY AND THICKNESS PROFILE MODULATION Filling date: 8 Sep 2025 Issue date: 19 Mar 2020 | 21 Nov 2019 | 19 Mar 2020 |
| Utility: METHOD OF ACHIEVING HIGH SELECTIVITY FOR HIGH ASPECT RATIO DIELECTRIC ETCH Filling date: 8 Sep 2025 Issue date: 19 Mar 2020 | 19 Nov 2019 | 19 Mar 2020 |
| Utility: Fiducial-Filtering Automatic Wafer Centering Process and Associated System Filling date: 8 Sep 2025 Issue date: 19 Mar 2020 | 14 Sep 2018 | 19 Mar 2020 |
| Utility: Methods and Systems for Controlling Wafer Fabrication Process Filling date: 8 Sep 2025 Issue date: 19 Mar 2020 | 14 Sep 2018 | 19 Mar 2020 |
| Utility: AUTO-CALIBRATED PROCESS INDEPENDENT FEEDFORWARD CONTROL Filling date: 8 Sep 2025 Issue date: 19 Mar 2020 | 13 Sep 2018 | 19 Mar 2020 |
| Utility: TIN OXIDE FILMS IN SEMICONDUCTOR DEVICE MANUFACTURING Filling date: 8 Sep 2025 Issue date: 12 Mar 2020 | 18 Nov 2019 | 12 Mar 2020 |
| Utility: REDUCED FOOTPRINT PLATFORM ARCHITECTURE WITH LINEAR VACUUM TRANSFER MODULE Filling date: 8 Sep 2025 Issue date: 12 Mar 2020 | 14 Mar 2018 | 12 Mar 2020 |
| Utility: LOW RESISTIVITY FILMS CONTAINING MOLYBDENUM Filling date: 8 Sep 2025 Issue date: 5 Mar 2020 | 6 Nov 2019 | 5 Mar 2020 |
| Utility: SEGMENTING A MODEL WITHIN A PLASMA SYSTEM Filling date: 8 Sep 2025 Issue date: 5 Mar 2020 | 6 Nov 2019 | 5 Mar 2020 |
| Utility: TWO-STAGE PIN LIFTER FOR DE-CHUCK OPERATIONS Filling date: 8 Sep 2025 Issue date: 5 Mar 2020 | 4 Sep 2018 | 5 Mar 2020 |
| Utility: Modular Recipe Controlled Calibration (MRCC) Apparatus Used to Balance Plasma in Multiple Station System Filling date: 8 Sep 2025 Issue date: 5 Mar 2020 | 4 Sep 2018 | 5 Mar 2020 |
| Utility: SOFTWARE EMULATOR FOR HARDWARE COMPONENTS IN A GAS DELIVERY SYSTEM OF SUBSTRATE PROCESSING SYSTEM Filling date: 8 Sep 2025 Issue date: 5 Mar 2020 | 4 Sep 2018 | 5 Mar 2020 |
| Utility: USING IDENTIFIERS TO MAP EDGE RING PART NUMBERS ONTO SLOT NUMBERS Filling date: 8 Sep 2025 Issue date: 5 Mar 2020 | 30 Aug 2018 | 5 Mar 2020 |
| Utility: METHOD AND APPARATUS FOR PROVIDING STATION TO STATION UNIFORMITY Filling date: 8 Sep 2025 Issue date: 5 Mar 2020 | 29 Aug 2018 | 5 Mar 2020 |
| Utility: CONFINEMENT RING WITH EXTENDED LIFE Filling date: 8 Sep 2025 Issue date: 5 Mar 2020 | 28 Aug 2018 | 5 Mar 2020 |
| Utility: SHOWERHEAD WITH AIR-GAPPED PLENUMS AND OVERHEAD ISOLATION GAS DISTRIBUTOR Filling date: 8 Sep 2025 Issue date: 27 Feb 2020 | 1 Nov 2019 | 27 Feb 2020 |
| Utility: SYSTEMS AND METHODS FOR REDUCING POWER REFLECTED TOWARDS A HIGHER FREQUENCY RF GENERATOR DURING A PERIOD OF A LOWER RF GENERATOR AND FOR USING A RELATIONSHIP TO REDUCE REFLECTED POWER Filling date: 8 Sep 2025 Issue date: 27 Feb 2020 | 31 Oct 2019 | 27 Feb 2020 |
| Utility: ELECTROCHEMICAL DOPING OF THIN METAL LAYERS EMPLOYING UNDERPOTENTIAL DEPOSITION AND THERMAL TREATMENT Filling date: 8 Sep 2025 Issue date: 27 Feb 2020 | 31 Oct 2019 | 27 Feb 2020 |
| Utility: SUPPRESSING INTERFACIAL REACTIONS BY VARYING THE WAFER TEMPERATURE THROUGHOUT DEPOSITION Filling date: 8 Sep 2025 Issue date: 27 Feb 2020 | 3 Jul 2019 | 27 Feb 2020 |
| Utility: CONFORMAL DAMAGE-FREE ENCAPSULATION OF CHALCOGENIDE MATERIALS Filling date: 8 Sep 2025 Issue date: 27 Feb 2020 | 24 Aug 2018 | 27 Feb 2020 |
| Utility: EXTRACTING REAL-TIME DATA FROM ETHERCAT SENSOR BUS IN A SUBSTRATE PROCESSING SYSTEM Filling date: 8 Sep 2025 Issue date: 27 Feb 2020 | 23 Aug 2018 | 27 Feb 2020 |
| Utility: CERAMIC BASEPLATE WITH CHANNELS HAVING NON-SQUARE CORNERS Filling date: 8 Sep 2025 Issue date: 27 Feb 2020 | 22 Aug 2018 | 27 Feb 2020 |
| Utility: METHOD AND APPARATUS FOR MODULATING FILM UNIFORMITY Filling date: 8 Sep 2025 Issue date: 27 Feb 2020 | 22 Aug 2018 | 27 Feb 2020 |
| Utility: METHOD FOR ETCHING AN ETCH LAYER Filling date: 8 Sep 2025 Issue date: 27 Feb 2020 | 21 Aug 2018 | 27 Feb 2020 |
| Utility: SYMMETRIC PRECURSOR DELIVERY Filling date: 8 Sep 2025 Issue date: 20 Feb 2020 | 17 Aug 2018 | 20 Feb 2020 |
| Utility: MODIFICATION OF SNO2 SURFACE FOR EUV LITHOGRAPHY Filling date: 8 Sep 2025 Issue date: 20 Feb 2020 | 14 Aug 2018 | 20 Feb 2020 |
| Utility: MODULE INCLUDING METALLIZED CERAMIC TUBES FOR RF AND GAS DELIVERY Filling date: 8 Sep 2025 Issue date: 13 Feb 2020 | 20 Aug 2019 | 13 Feb 2020 |
| Utility: METHOD TO CLEAN SNO2 FILM FROM CHAMBER Filling date: 8 Sep 2025 Issue date: 13 Feb 2020 | 9 Aug 2018 | 13 Feb 2020 |
| Utility: PROGRESSIVE HEATING OF COMPONENTS OF SUBSTRATE PROCESSING SYSTEMS USING TCR ELEMENT-BASED HEATERS Filling date: 8 Sep 2025 Issue date: 13 Feb 2020 | 8 Aug 2018 | 13 Feb 2020 |
| Utility: CONTROLLING SHOWERHEAD HEATING VIA RESISTIVE THERMAL MEASUREMENTS Filling date: 8 Sep 2025 Issue date: 13 Feb 2020 | 8 Aug 2018 | 13 Feb 2020 |
| Utility: HYBRID FLOW METROLOGY FOR IMPROVED CHAMBER MATCHING Filling date: 8 Sep 2025 Issue date: 13 Feb 2020 | 7 Aug 2018 | 13 Feb 2020 |
| Utility: CHEMICAL VAPOR DEPOSITION TOOL FOR PREVENTING OR SUPPRESSING ARCING Filling date: 8 Sep 2025 Issue date: 13 Feb 2020 | 7 Aug 2018 | 13 Feb 2020 |
| Utility: DETERMINING TILT ANGLE IN PATTERNED ARRAYS OF HIGH ASPECT RATIO STRUCTURES Filling date: 8 Sep 2025 Issue date: 6 Feb 2020 | 30 Jul 2019 | 6 Feb 2020 |
| Utility: PRE-TREATMENT METHOD TO IMPROVE SELECTIVITY IN A SELECTIVE DEPOSITION PROCESS Filling date: 8 Sep 2025 Issue date: 6 Feb 2020 | 6 Aug 2018 | 6 Feb 2020 |
| Utility: METHOD TO INCREASE DEPOSITION RATE OF ALD PROCESS Filling date: 8 Sep 2025 Issue date: 6 Feb 2020 | 6 Aug 2018 | 6 Feb 2020 |
| Utility: COMPENSATING CHAMBER AND PROCESS EFFECTS TO IMPROVE CRITICAL DIMENSION VARIATION FOR TRIM PROCESS Filling date: 8 Sep 2025 Issue date: 6 Feb 2020 | 2 Aug 2018 | 6 Feb 2020 |
| Utility: RF TUNING SYSTEMS INCLUDING TUNING CIRCUITS HAVING IMPEDANCES FOR SETTING AND ADJUSTING PARAMETERS OF ELECTRODES IN ELECTROSTATIC CHUCKS Filling date: 8 Sep 2025 Issue date: 6 Feb 2020 | 2 Aug 2018 | 6 Feb 2020 |
| Utility: Ceramic Layer for Electrostatic Chuck Including Embedded Faraday Cage for RF Delivery and Associated Methods Filling date: 8 Sep 2025 Issue date: 30 Jan 2020 | 2 Oct 2019 | 30 Jan 2020 |
| Utility: SYSTEM AND METHOD FOR CHEMICAL AND HEATED WETTING OF SUBSTRATES PRIOR TO METAL PLATING Filling date: 8 Sep 2025 Issue date: 30 Jan 2020 | 30 Jul 2018 | 30 Jan 2020 |
| Utility: MAINTENANCE MODE POWER SUPPLY SYSTEM Filling date: 8 Sep 2025 Issue date: 30 Jan 2020 | 25 Jul 2018 | 30 Jan 2020 |
| Utility: MAGNETIC SHIELDING FOR PLASMA SOURCES Filling date: 8 Sep 2025 Issue date: 30 Jan 2020 | 25 Jul 2018 | 30 Jan 2020 |
| Utility: Method for Controlling Core Critical Dimension Variation Using Flash Trim Sequence Filling date: 8 Sep 2025 Issue date: 30 Jan 2020 | 24 Jul 2018 | 30 Jan 2020 |
