Advanced Energy Industries
Patents, Design & Utilities

Last updated:

List of all Advanced Energy Industries patents 105 in total

Status Patent
Application
Utility: INTER-PERIOD CONTROL SYSTEM FOR PLASMA POWER DELIVERY SYSTEM AND METHOD OF OPERATING SAME External link
Filling date: 7 Sep 2025 Issue date: 22 Apr 2021
Application
Utility: ASSESSMENT OF MATCHING NETWORKS External link
Filling date: 7 Sep 2025 Issue date: 15 Apr 2021
Application
Utility: RATE ENHANCED PULSED DC SPUTTERING SYSTEM External link
Filling date: 7 Sep 2025 Issue date: 15 Apr 2021
Application
Utility: APPLICATION OF MODULATING SUPPLIES IN A PLASMA PROCESSING SYSTEM External link
Filling date: 7 Sep 2025 Issue date: 11 Mar 2021
Grant
Utility: Precision digital to analog conversion in the presence of variable and uncertain fractional bit contributions External link
Filling date: 7 Sep 2025 Issue date: 9 Mar 2021
Grant
Utility: Detection of damage in matching networks External link
Filling date: 7 Sep 2025 Issue date: 9 Mar 2021
Application
Utility: GENERATOR WITH CONTROLLABLE SOURCE IMPEDANCE External link
Filling date: 7 Sep 2025 Issue date: 25 Feb 2021
Application
Utility: TRIBOELECTRIC-BASED SENSORS External link
Filling date: 7 Sep 2025 Issue date: 18 Feb 2021
Application
Utility: MULTIPLEXED POWER GENERATOR OUTPUT WITH CHANNEL OFFSETS FOR PULSED DRIVING OF MULTIPLE LOADS External link
Filling date: 7 Sep 2025 Issue date: 4 Feb 2021
Application
Utility: HIGH ENERGY PULSE ON A HIGH-VOLTAGE-DIRECT-CURRENT OFFSET External link
Filling date: 7 Sep 2025 Issue date: 4 Feb 2021
Grant
Utility: Rate enhanced pulsed DC sputtering system External link
Filling date: 7 Sep 2025 Issue date: 2 Feb 2021
Application
Utility: PULSED DC SPUTTERING SYSTEMS AND METHODS External link
Filling date: 7 Sep 2025 Issue date: 28 Jan 2021
Grant
Utility: Low power pin diode driver External link
Filling date: 7 Sep 2025 Issue date: 26 Jan 2021
Grant
Utility: Synchronization between an excitation source and a substrate bias supply External link
Filling date: 7 Sep 2025 Issue date: 19 Jan 2021
Application
Utility: BIAS SUPPLY WITH A SINGLE CONTROLLED SWITCH External link
Filling date: 7 Sep 2025 Issue date: 14 Jan 2021
Application
Utility: SPATIAL MONITORING AND CONTROL OF PLASMA PROCESSING ENVIRONMENTS External link
Filling date: 7 Sep 2025 Issue date: 7 Jan 2021
Grant
Utility: Adaptive plasma ignition External link
Filling date: 7 Sep 2025 Issue date: 5 Jan 2021
Application
Utility: HIGH SIDE CURRENT MONITOR External link
Filling date: 7 Sep 2025 Issue date: 24 Dec 2020
Application
Utility: ADAPTIVE PLASMA IGNITION External link
Filling date: 7 Sep 2025 Issue date: 10 Dec 2020
Grant
Utility: Inter-period control system for plasma power delivery system and method of operating the same External link
Filling date: 7 Sep 2025 Issue date: 8 Dec 2020
Application
Utility: SYSTEM AND METHOD TO MEASURE AND ADJUST A CHARGE OF A WORKPIECE External link
Filling date: 7 Sep 2025 Issue date: 26 Nov 2020
Grant
Utility: System and method for control of high efficiency generator source impedance External link
Filling date: 7 Sep 2025 Issue date: 17 Nov 2020
Application
Utility: APPARATUS AND SYSTEM FOR MODULATED PLASMA SYSTEMS External link
Filling date: 7 Sep 2025 Issue date: 5 Nov 2020
Application
Utility: VIRTUAL RESISTIVE LOAD IN FEEDBACK LOOP DRIVING A PIEZOELECTRIC ACTUATOR External link
Filling date: 7 Sep 2025 Issue date: 5 Nov 2020
Grant
Utility: Synchronization with a bias supply in a plasma processing system External link
Filling date: 7 Sep 2025 Issue date: 20 Oct 2020
Grant
Utility: Control of plasma processing systems that include plasma modulating supplies External link
Filling date: 7 Sep 2025 Issue date: 20 Oct 2020
Grant
Utility: Application of modulating supplies in a plasma processing system External link
Filling date: 7 Sep 2025 Issue date: 20 Oct 2020
Application
Utility: POWER SUPPLY SYSTEM WITH ACTIVELY SWITCHED BUS CAPACITOR External link
Filling date: 7 Sep 2025 Issue date: 8 Oct 2020
Grant
Utility: Power supply system with actively switched bus capacitor External link
Filling date: 7 Sep 2025 Issue date: 6 Oct 2020
Application
Utility: ADDITIVE SYNTHESIS OF INTERLEAVED SWITCH MODE POWER STAGES FOR MINIMAL DELAY IN SET POINT TRACKING External link
Filling date: 7 Sep 2025 Issue date: 1 Oct 2020
Application
Utility: SINGLE-TURN AND LAMINATED-WALL INDUCTIVELY COUPLED PLASMA SOURCES External link
Filling date: 7 Sep 2025 Issue date: 10 Sep 2020
Application
Utility: DETECTION OF DAMAGE IN MATCHING NETWORKS External link
Filling date: 7 Sep 2025 Issue date: 10 Sep 2020
Application
Utility: PRECISION DIGITAL TO ANALOG CONVERSION IN THE PRESENCE OF VARIABLE AND UNCERTAIN FRACTIONAL BIT CONTRIBUTIONS External link
Filling date: 7 Sep 2025 Issue date: 20 Aug 2020
Application
Utility: MAINTENANCE FOR REMOTE PLASMA SOURCES External link
Filling date: 7 Sep 2025 Issue date: 20 Aug 2020
Grant
Utility: System and method for prolonging the life of switching components External link
Filling date: 7 Sep 2025 Issue date: 11 Aug 2020
Grant
Utility: Pin diode driver with energy recovery External link
Filling date: 7 Sep 2025 Issue date: 11 Aug 2020
Grant
Utility: Plasma delivery system for modulated plasma systems External link
Filling date: 7 Sep 2025 Issue date: 21 Jul 2020
Application
Utility: CONTROL CIRCUIT FOR A POWER CONVERTER External link
Filling date: 7 Sep 2025 Issue date: 9 Jul 2020
Grant
Utility: Spatial and temporal control of ion bias voltage for plasma processing External link
Filling date: 7 Sep 2025 Issue date: 7 Jul 2020
Application
Utility: SYNCHRONIZATION BETWEEN AN EXCITATION SOURCE AND A SUBSTRATE BIAS SUPPLY External link
Filling date: 7 Sep 2025 Issue date: 25 Jun 2020
Application
Utility: PLASMA DELIVERY SYSTEM FOR MODULATED PLASMA SYSTEMS External link
Filling date: 7 Sep 2025 Issue date: 25 Jun 2020
Grant
Utility: Additive synthesis of interleaved switch mode power stages for minimal delay in set point tracking External link
Filling date: 7 Sep 2025 Issue date: 19 May 2020
Application
Utility: ADDITIVE SYNTHESIS OF INTERLEAVED SWITCH MODE POWER STAGES FOR MINIMAL DELAY IN SET POINT TRACKING External link
Filling date: 7 Sep 2025 Issue date: 14 May 2020
Grant
Utility: Precision digital to analog conversion in the presence of variable and uncertain fractional bit contributions External link
Filling date: 7 Sep 2025 Issue date: 14 Apr 2020
Grant
Utility: Variable capacitor bank External link
Filling date: 7 Sep 2025 Issue date: 14 Apr 2020
Grant
Utility: Synchronized pulsing of plasma processing source and substrate bias External link
Filling date: 7 Sep 2025 Issue date: 31 Mar 2020
Application
Utility: ION ENERGY BIAS CONTROL WITH PLASMA-SOURCE PULSING External link
Filling date: 7 Sep 2025 Issue date: 19 Mar 2020
Application
Utility: VARIABLE CAPACITOR BANK External link
Filling date: 7 Sep 2025 Issue date: 12 Mar 2020
Application
Utility: PRECISION DIGITAL TO ANALOG CONVERSION IN THE PRESENCE OF VARIABLE AND UNCERTAIN FRACTIONAL BIT CONTRIBUTIONS External link
Filling date: 7 Sep 2025 Issue date: 14 Nov 2019
Grant
Utility: System and method for plasma ignition External link
Filling date: 7 Sep 2025 Issue date: 12 Nov 2019

Showing 50 to 100 of 105 patents.