Lam Research
Patents, Design & Utilities
Last updated:
List of all Lam Research patents 221 in total
| Status | Patent |
|---|---|
Grant | Utility: Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition Filling date: 13 Sep 2025 Issue date: 24 Aug 2021 |
Grant | Utility: Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods Filling date: 13 Sep 2025 Issue date: 24 Aug 2021 |
Grant | Utility: Ultrathin atomic layer deposition film accuracy thickness control Filling date: 13 Sep 2025 Issue date: 24 Aug 2021 |
Application | Utility: VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP Filling date: 13 Sep 2025 Issue date: 19 Aug 2021 |
Application | Utility: RADIO FREQUENCY (RF) SIGNAL SOURCE SUPPLYING RF PLASMA GENERATOR AND REMOTE PLASMA GENERATOR Filling date: 13 Sep 2025 Issue date: 19 Aug 2021 |
Application | Utility: CLEANING SYSTEM FOR REMOVING DEPOSITS FROM PUMP IN AN EXHAUST OF A SUBSTRATE PROCESSING SYSTEM Filling date: 13 Sep 2025 Issue date: 19 Aug 2021 |
Application | Utility: EFFICIENT CLEANING AND ETCHING OF HIGH ASPECT RATIO STRUCTURES Filling date: 13 Sep 2025 Issue date: 12 Aug 2021 |
Grant | Utility: Real-time control of temperature in a plasma chamber Filling date: 13 Sep 2025 Issue date: 10 Aug 2021 |
Grant | Utility: Protective coating for electrostatic chucks Filling date: 13 Sep 2025 Issue date: 10 Aug 2021 |
Grant | Utility: Quartz component with protective coating Filling date: 13 Sep 2025 Issue date: 10 Aug 2021 |
Grant | Utility: Method to create air gaps Filling date: 13 Sep 2025 Issue date: 10 Aug 2021 |
Application | Utility: TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING Filling date: 13 Sep 2025 Issue date: 5 Aug 2021 |
Application | Utility: SYMMETRIC PRECURSOR DELIVERY Filling date: 13 Sep 2025 Issue date: 5 Aug 2021 |
Application | Utility: METAL-CONTAINING PASSIVATION FOR HIGH ASPECT RATIO ETCH Filling date: 13 Sep 2025 Issue date: 5 Aug 2021 |
Application | Utility: METHOD OF DEPOSITING TUNGSTEN AND OTHER METALS IN 3D NAND STRUCTURES Filling date: 13 Sep 2025 Issue date: 5 Aug 2021 |
Grant | Utility: Process for optimizing cobalt electrofill using sacrificial oxidants Filling date: 13 Sep 2025 Issue date: 3 Aug 2021 |
Grant | Utility: Azimuthal critical dimension non-uniformity for double patterning process Filling date: 13 Sep 2025 Issue date: 3 Aug 2021 |
Application | Utility: PREVENTING DEPOSITION ON PEDESTAL IN SEMICONDUCTOR SUBSTRATE PROCESSING Filling date: 13 Sep 2025 Issue date: 29 Jul 2021 |
Application | Utility: CONFIGURABLE DISTRIBUTED-INTERLOCK-SYSTEM Filling date: 13 Sep 2025 Issue date: 29 Jul 2021 |
Grant | Utility: Suppressing interfacial reactions by varying the wafer temperature throughout deposition Filling date: 13 Sep 2025 Issue date: 27 Jul 2021 |
Grant | Utility: Fill on demand ampoule refill Filling date: 13 Sep 2025 Issue date: 27 Jul 2021 |
Showing 200 to 221 of 221 patents.