Lam Research
Patents, Design & Utilities
Last updated:
List of all Lam Research patents 221 in total
| Status | Patent |
|---|---|
Application | Utility: ELECTROSTATIC CHUCK SYSTEM Filling date: 13 Sep 2025 Issue date: 9 Jun 2022 |
Application | Utility: HIGH STEP COVERAGE TUNGSTEN DEPOSITION Filling date: 13 Sep 2025 Issue date: 9 Jun 2022 |
Application | Utility: ETCH STOP LAYER Filling date: 13 Sep 2025 Issue date: 9 Jun 2022 |
Application | Utility: HIGH ETCH SELECTIVITY, LOW STRESS ASHABLE CARBON HARD MASK Filling date: 13 Sep 2025 Issue date: 9 Jun 2022 |
Application | Utility: LAMELLAR CERAMIC STRUCTURE Filling date: 13 Sep 2025 Issue date: 9 Jun 2022 |
Application | Utility: APPARATUS FOR CLEANING PLASMA CHAMBERS Filling date: 13 Sep 2025 Issue date: 9 Jun 2022 |
Application | Utility: HIGH DENSITY, CONTROLLED INTEGRATED CIRCUITS FACTORY Filling date: 13 Sep 2025 Issue date: 2 Jun 2022 |
Application | Utility: MODEL-BASED SCHEDULING FOR SUBSTRATE PROCESSING SYSTEMS Filling date: 13 Sep 2025 Issue date: 2 Jun 2022 |
Application | Utility: VARIABLE CYCLE AND TIME RF ACTIVATION METHOD FOR FILM THICKNESS MATCHING IN A MULTI-STATION DEPOSITION SYSTEM Filling date: 13 Sep 2025 Issue date: 19 May 2022 |
Application | Utility: REDUCING ROUGHNESS OF EXTREME ULTRAVIOLET LITHOGRAPHY RESISTS Filling date: 13 Sep 2025 Issue date: 19 May 2022 |
Application | Utility: MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE COATING WITH INTERMITTENT RESTORATION PLASMA Filling date: 13 Sep 2025 Issue date: 12 May 2022 |
Application | Utility: MEASUREMENT SYSTEM TO MEASURE A THICKNESS OF AN ADJUSTABLE EDGE RING FOR A SUBSTRATE PROCESSING SYSTEM Filling date: 13 Sep 2025 Issue date: 12 May 2022 |
Application | Utility: ELECTROSTATIC CHUCK WITH CERAMIC MONOLITHIC BODY Filling date: 13 Sep 2025 Issue date: 12 May 2022 |
Application | Utility: APPARATUSES AND METHODS FOR AVOIDING ELECTRICAL BREAKDOWN FROM RF TERMINAL TO ADJACENT NON-RF TERMINAL Filling date: 13 Sep 2025 Issue date: 5 May 2022 |
Application | Utility: COOLING FOR A PLASMA-BASED REACTOR Filling date: 13 Sep 2025 Issue date: 5 May 2022 |
Application | Utility: MULTI-STATION SEMICONDUCTOR PROCESSING WITH INDEPENDENTLY ADJUSTABLE PEDESTALS Filling date: 13 Sep 2025 Issue date: 5 May 2022 |
Application | Utility: CHUCK FOR PLASMA PROCESSING CHAMBER Filling date: 13 Sep 2025 Issue date: 5 May 2022 |
Application | Utility: FIXTURE FOR AUTOMATIC CALIBRATION OF SUBSTRATE TRANSFER ROBOT Filling date: 13 Sep 2025 Issue date: 5 May 2022 |
Application | Utility: MACROSCOPIC TEXTURING FOR ANODIZED AND COATED SURFACES Filling date: 13 Sep 2025 Issue date: 5 May 2022 |
Application | Utility: MULTI-CHANNEL LIQUID DELIVERY SYSTEM FOR ADVANCED SEMICONDUCTOR APPLICATIONS Filling date: 13 Sep 2025 Issue date: 5 May 2022 |
Application | Utility: ION BEAM ETCHING WITH SIDEWALL CLEANING Filling date: 13 Sep 2025 Issue date: 28 Apr 2022 |
Application | Utility: SUBSTRATE LOCATION DETECTION AND ADJUSTMENT Filling date: 13 Sep 2025 Issue date: 28 Apr 2022 |
Application | Utility: REMOVING BUBBLES FROM PLATING CELLS Filling date: 13 Sep 2025 Issue date: 21 Apr 2022 |
Application | Utility: SUBSTRATE PROCESSING TOOL CAPABLE OF MODULATING ONE OR MORE PLASMA TEMPORALLY AND/OR SPATIALLY Filling date: 13 Sep 2025 Issue date: 21 Apr 2022 |
Application | Utility: ATOMIC LAYER ETCHING OF TUNGSTEN FOR ENHANCED TUNGSTEN DEPOSITION FILL Filling date: 13 Sep 2025 Issue date: 14 Apr 2022 |
Application | Utility: CARRIER RING DESIGNS FOR CONTROLLING DEPOSITION ON WAFER BEVEL/EDGE Filling date: 13 Sep 2025 Issue date: 14 Apr 2022 |
Application | Utility: AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER Filling date: 13 Sep 2025 Issue date: 7 Apr 2022 |
Application | Utility: REMOTE-PLASMA CLEAN (RPC) DIRECTIONAL-FLOW DEVICE Filling date: 13 Sep 2025 Issue date: 7 Apr 2022 |
Application | Utility: MULTI-LOCATION GAS INJECTION TO IMPROVE UNIFORMITY IN RAPID ALTERNATING PROCESSES Filling date: 13 Sep 2025 Issue date: 7 Apr 2022 |
Application | Utility: FEATURE FILL WITH NUCLEATION INHIBITION Filling date: 13 Sep 2025 Issue date: 31 Mar 2022 |
Application | Utility: ION BEAM ETCHING WITH GAS TREATMENT AND PULSING Filling date: 13 Sep 2025 Issue date: 31 Mar 2022 |
Application | Utility: DESIGNER ATOMIC LAYER ETCHING Filling date: 13 Sep 2025 Issue date: 24 Mar 2022 |
Application | Utility: SHOWERHEAD SHROUD Filling date: 13 Sep 2025 Issue date: 24 Mar 2022 |
Application | Utility: TEXTURED SILICON SEMICONDUCTOR PROCESSING CHAMBER COMPONENTS Filling date: 13 Sep 2025 Issue date: 24 Mar 2022 |
Application | Utility: SHOWERHEAD FOR DEPOSITION TOOLS HAVING MULTIPLE PLENUMS AND GAS DISTRIBUTION CHAMBERS Filling date: 13 Sep 2025 Issue date: 24 Mar 2022 |
Application | Utility: ATOMIC LAYER TREATMENT PROCESS USING METASTABLE ACTIVATED RADICAL SPECIES Filling date: 13 Sep 2025 Issue date: 24 Mar 2022 |
Application | Utility: METAL ATOMIC LAYER ETCH AND DEPOSITION APPARATUSES AND PROCESSES WITH METAL-FREE LIGANDS Filling date: 13 Sep 2025 Issue date: 17 Mar 2022 |
Application | Utility: VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS Filling date: 13 Sep 2025 Issue date: 10 Mar 2022 |
Application | Utility: SEMICONDUCTOR MASK RESHAPING USING A SACRIFICIAL LAYER Filling date: 13 Sep 2025 Issue date: 10 Mar 2022 |
Application | Utility: COOLING SYSTEM FOR PROCESSING CHAMBER Filling date: 13 Sep 2025 Issue date: 10 Mar 2022 |
Application | Utility: INTEGRATED WAFER BOW MEASUREMENTS Filling date: 13 Sep 2025 Issue date: 10 Mar 2022 |
Application | Utility: SUBSTRATE PROCESSING SYSTEM INCLUDING DUAL ION FILTER FOR DOWNSTREAM PLASMA Filling date: 13 Sep 2025 Issue date: 10 Mar 2022 |
Application | Utility: LOW STRESS FILMS FOR ADVANCED SEMICONDUCTOR APPLICATIONS Filling date: 13 Sep 2025 Issue date: 3 Mar 2022 |
Application | Utility: FILM STACK SIMPLIFICATION FOR HIGH ASPECT RATIO PATTERNING AND VERTICAL SCALING Filling date: 13 Sep 2025 Issue date: 17 Feb 2022 |
Grant | Utility: Designer atomic layer etching Filling date: 13 Sep 2025 Issue date: 1 Feb 2022 |
Grant | Utility: Multi zone substrate support for ALD film property correction and tunability Filling date: 13 Sep 2025 Issue date: 1 Feb 2022 |
Application | Utility: METHOD FOR ETCHING AN ETCH LAYER Filling date: 13 Sep 2025 Issue date: 27 Jan 2022 |
Application | Utility: LINE BENDING CONTROL FOR MEMORY APPLICATIONS Filling date: 13 Sep 2025 Issue date: 27 Jan 2022 |
Application | Utility: MULTILAYER COATINGS OF COMPONENT PARTS FOR A WORK PIECE PROCESSING CHAMBER Filling date: 13 Sep 2025 Issue date: 27 Jan 2022 |
Application | Utility: DIRECTIONAL DEPOSITION IN ETCH CHAMBER Filling date: 13 Sep 2025 Issue date: 27 Jan 2022 |
Showing 50 to 100 of 221 patents.