Lam Research
Patents, Design & Utilities
Last updated:
List of all Lam Research patents 221 in total
| Status | Patent |
|---|---|
Grant | Utility: Electrostatic chucking pedestal with substrate backside purging and thermal sinking Filling date: 13 Sep 2025 Issue date: 25 Jan 2022 |
Application | Utility: DRY DEVELOPMENT OF RESISTS Filling date: 13 Sep 2025 Issue date: 20 Jan 2022 |
Application | Utility: LOW TEMPERATURE DIRECT COPPER-COPPER BONDING Filling date: 13 Sep 2025 Issue date: 20 Jan 2022 |
Application | Utility: VOID FREE LOW STRESS FILL Filling date: 13 Sep 2025 Issue date: 20 Jan 2022 |
Grant | Utility: Control of current density in an electroplating apparatus Filling date: 13 Sep 2025 Issue date: 18 Jan 2022 |
Grant | Utility: Electrochemical doping of thin metal layers employing underpotential deposition and thermal treatment Filling date: 13 Sep 2025 Issue date: 18 Jan 2022 |
Grant | Utility: Atomic layer deposition of tungsten for enhanced fill and reduced substrate attack Filling date: 13 Sep 2025 Issue date: 18 Jan 2022 |
Grant | Utility: 3D printed plasma arrestor for an electrostatic chuck Filling date: 13 Sep 2025 Issue date: 18 Jan 2022 |
Application | Utility: WIRELESS ELECTRONIC-CONTROL SYSTEM Filling date: 13 Sep 2025 Issue date: 13 Jan 2022 |
Application | Utility: MOLYBDENUM TEMPLATES FOR TUNGSTEN Filling date: 13 Sep 2025 Issue date: 13 Jan 2022 |
Application | Utility: ELECTRODEPOSITION OF NANOTWINNED COPPER STRUCTURES Filling date: 13 Sep 2025 Issue date: 13 Jan 2022 |
Application | Utility: PIN-LIFTER TEST SUBSTRATE Filling date: 13 Sep 2025 Issue date: 13 Jan 2022 |
Grant | Utility: Matchless plasma source for semiconductor wafer fabrication Filling date: 13 Sep 2025 Issue date: 11 Jan 2022 |
Application | Utility: TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING Filling date: 13 Sep 2025 Issue date: 6 Jan 2022 |
Application | Utility: PEDESTAL INCLUDING VAPOR CHAMBER FOR SUBSTRATE PROCESSING SYSTEMS Filling date: 13 Sep 2025 Issue date: 6 Jan 2022 |
Application | Utility: DUAL-PHASE COOLING IN SEMICONDUCTOR MANUFACTURING Filling date: 13 Sep 2025 Issue date: 6 Jan 2022 |
Application | Utility: BUBBLE DEFECT REDUCTION Filling date: 13 Sep 2025 Issue date: 6 Jan 2022 |
Application | Utility: ATOMIC LAYER ETCH SYSTEMS FOR SELECTIVELY ETCHING WITH HALOGEN-BASED COMPOUNDS Filling date: 13 Sep 2025 Issue date: 6 Jan 2022 |
Grant | Utility: Removing bubbles from plating cell Filling date: 13 Sep 2025 Issue date: 4 Jan 2022 |
Application | Utility: SILICON OXIDE SILICON NITRIDE STACK STAIR STEP ETCH Filling date: 13 Sep 2025 Issue date: 30 Dec 2021 |
Grant | Utility: Atomic layer deposition and etch in a single plasma chamber for critical dimension control Filling date: 13 Sep 2025 Issue date: 28 Dec 2021 |
Grant | Utility: Vacuum-integrated hardmask processes and apparatus Filling date: 13 Sep 2025 Issue date: 28 Dec 2021 |
Grant | Utility: Monitoring surface oxide on seed layers during electroplating Filling date: 13 Sep 2025 Issue date: 28 Dec 2021 |
Application | Utility: THROUGHPUT IMPROVEMENT WITH INTERVAL CONDITIONING PURGING Filling date: 13 Sep 2025 Issue date: 23 Dec 2021 |
Application | Utility: CERAMIC PEDESTAL WITH MULTI-LAYER HEATER FOR ENHANCED THERMAL UNIFORMITY Filling date: 13 Sep 2025 Issue date: 23 Dec 2021 |
Application | Utility: METHOD ANDD APPARATUS FOR ATOMIC LAYER DEPOSITION OR CHEMICAL VAPOR DEPOSITION Filling date: 13 Sep 2025 Issue date: 23 Dec 2021 |
Application | Utility: CROSS FLOW CONDUIT FOR FOAMING PREVENTION IN HIGH CONVECTION PLATING CELLS Filling date: 13 Sep 2025 Issue date: 23 Dec 2021 |
Application | Utility: METHODS FOR MAKING HARD MASKS USEFUL IN NEXT-GENERATION LITHOGRAPHY Filling date: 13 Sep 2025 Issue date: 23 Dec 2021 |
Application | Utility: SELF-ALIGNED VERTICAL INTEGRATION OF THREE-TERMINAL MEMORY DEVICES Filling date: 13 Sep 2025 Issue date: 16 Dec 2021 |
Application | Utility: DOPED OR UNDOPED SILICON CARBIDE DEPOSITION AND REMOTE HYDROGEN PLASMA EXPOSURE FOR GAPFILL Filling date: 13 Sep 2025 Issue date: 16 Dec 2021 |
Application | Utility: IDENTIFICATION OF AND COMPENSATION FOR A FAILURE IN A HEATER ARRAY Filling date: 13 Sep 2025 Issue date: 9 Dec 2021 |
Application | Utility: METHOD OF DEPOSITING SILICON NITRIDE FILMS Filling date: 13 Sep 2025 Issue date: 9 Dec 2021 |
Application | Utility: MODIFYING HYDROPHOBICITY OF A WAFER SURFACE USING AN ORGANOSILICON PRECURSOR Filling date: 13 Sep 2025 Issue date: 9 Dec 2021 |
Grant | Utility: Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators Filling date: 13 Sep 2025 Issue date: 7 Dec 2021 |
Application | Utility: INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL AND PRECURSOR GAS TO A DOWNSTREAM CHAMBER TO ENABLE REMOTE PLASMA FILM DEPOSITION Filling date: 13 Sep 2025 Issue date: 2 Dec 2021 |
Application | Utility: EDGE EXCLUSION CONTROL Filling date: 13 Sep 2025 Issue date: 2 Dec 2021 |
Application | Utility: PLASMA ENHANCED WAFER SOAK FOR THIN FILM DEPOSITION Filling date: 13 Sep 2025 Issue date: 25 Nov 2021 |
Application | Utility: IMPROVING SUBSTRATE WETTABILITY FOR PLATING OPERATIONS Filling date: 13 Sep 2025 Issue date: 25 Nov 2021 |
Grant | Utility: Tin oxide thin film spacers in semiconductor device manufacturing Filling date: 13 Sep 2025 Issue date: 23 Nov 2021 |
Grant | Utility: Control of wafer bow in multiple stations Filling date: 13 Sep 2025 Issue date: 23 Nov 2021 |
Grant | Utility: Determining tilt angle in patterned arrays of high aspect-ratio structures by small-angle x-ray scattering Filling date: 13 Sep 2025 Issue date: 23 Nov 2021 |
Grant | Utility: Dynamic precursor dosing for atomic layer deposition Filling date: 13 Sep 2025 Issue date: 23 Nov 2021 |
Grant | Utility: Progressive heating of components of substrate processing systems using TCR element-based heaters Filling date: 13 Sep 2025 Issue date: 23 Nov 2021 |
Grant | Utility: RF tuning systems including tuning circuits having impedances for setting and adjusting parameters of electrodes in electrostatic chucks Filling date: 13 Sep 2025 Issue date: 23 Nov 2021 |
Application | Utility: SELECTIVE DEPOSITION OF ETCH-STOP LAYER FOR ENHANCED PATTERNING Filling date: 13 Sep 2025 Issue date: 18 Nov 2021 |
Application | Utility: REAL-TIME CONTROL OF TEMPERATURE IN A PLASMA CHAMBER Filling date: 13 Sep 2025 Issue date: 18 Nov 2021 |
Application | Utility: ETCHING ISOLATION FEATURES AND DENSE FEATURES WITHIN A SUBSTRATE Filling date: 13 Sep 2025 Issue date: 18 Nov 2021 |
Application | Utility: FRICTION STIR WELDING FOR CERAMIC APPLICATIONS Filling date: 13 Sep 2025 Issue date: 18 Nov 2021 |
Application | Utility: LOWER PLASMA EXCLUSION ZONE RING FOR BEVEL ETCHER Filling date: 13 Sep 2025 Issue date: 11 Nov 2021 |
Grant | Utility: Atomic layer deposition and etch for reducing roughness Filling date: 13 Sep 2025 Issue date: 9 Nov 2021 |
Showing 100 to 150 of 221 patents.