KLA
Utility Patent Applications
Last updated:
List of all KLA patents 231 in total
| Status | Patent |
|---|---|
Application | Utility: Semiconductor Hot-Spot and Process-Window Discovery Combining Optical and Electron-Beam Inspection Filling date: 7 Sep 2025 Issue date: 11 Feb 2021 |
Application | Utility: VAPOR AS A PROTECTANT AND LIFETIME EXTENDER IN OPTICAL SYSTEMS Filling date: 7 Sep 2025 Issue date: 11 Feb 2021 |
Application | Utility: METHOD FOR PROCESS MONITORING WITH OPTICAL INSPECTIONS Filling date: 7 Sep 2025 Issue date: 4 Feb 2021 |
Application | Utility: System and Method for Enhancing Data Processing Throughput Using Less Effective Pixel While Maintaining Wafer Warp Coverage Filling date: 7 Sep 2025 Issue date: 4 Feb 2021 |
Application | Utility: Systems and Methods for MOKE Metrology with Consistent MRAM Die Orientation Filling date: 7 Sep 2025 Issue date: 28 Jan 2021 |
Application | Utility: System and Method for Determining Defects Using Physics-Based Image Perturbations Filling date: 7 Sep 2025 Issue date: 28 Jan 2021 |
Application | Utility: OVERLAY MEASUREMENT TARGETS DESIGN Filling date: 7 Sep 2025 Issue date: 28 Jan 2021 |
Application | Utility: Combined Transmitted and Reflected Light Imaging of Internal Cracks in Semiconductor Devices Filling date: 7 Sep 2025 Issue date: 28 Jan 2021 |
Application | Utility: Automatic Recipe Optimization for Overlay Metrology System Filling date: 7 Sep 2025 Issue date: 28 Jan 2021 |
Application | Utility: System and Method for Rendering SEM Images and Predicting Defect Imaging Conditions of Substrates Using 3D Design Filling date: 7 Sep 2025 Issue date: 28 Jan 2021 |
Application | Utility: MULTIPLE-TOOL PARAMETER SET CONFIGURATION AND MISREGISTRATION MEASUREMENT SYSTEM AND METHOD Filling date: 7 Sep 2025 Issue date: 28 Jan 2021 |
Application | Utility: APPARATUS, METHOD AND COMPUTER PROGRAM PRODUCT FOR DEFECT DETECTION IN WORK PIECES Filling date: 7 Sep 2025 Issue date: 21 Jan 2021 |
Application | Utility: High Efficiency Laser-Sustained Plasma Light Source Filling date: 7 Sep 2025 Issue date: 21 Jan 2021 |
Application | Utility: PARAMETER-STABLE MISREGISTRATION MEASUREMENT AMELIORATION IN SEMICONDUCTOR DEVICES Filling date: 7 Sep 2025 Issue date: 21 Jan 2021 |
Application | Utility: Strontium Tetraborate as Optical Glass Material Filling date: 7 Sep 2025 Issue date: 14 Jan 2021 |
Application | Utility: Methods And Systems For Optical Surface Defect Material Characterization Filling date: 7 Sep 2025 Issue date: 14 Jan 2021 |
Application | Utility: SYSTEMS AND METHODS FOR SELECTING DEFECT DETECTION METHODS FOR INSPECTION OF A SPECIMEN Filling date: 7 Sep 2025 Issue date: 14 Jan 2021 |
Application | Utility: Metrology Target for Scanning Metrology Filling date: 7 Sep 2025 Issue date: 31 Dec 2020 |
Application | Utility: SIX DEGREE OF FREEDOM WORKPIECE STAGE Filling date: 7 Sep 2025 Issue date: 24 Dec 2020 |
Application | Utility: Multi-Stage, Multi-Zone Substrate Positioning Systems Filling date: 7 Sep 2025 Issue date: 24 Dec 2020 |
Application | Utility: EUV In-Situ Linearity Calibration for TDI Image Sensors Using Test Photomasks Filling date: 7 Sep 2025 Issue date: 24 Dec 2020 |
Application | Utility: METRICS FOR ASYMMETRIC WAFER SHAPE CHARACTERIZATION Filling date: 7 Sep 2025 Issue date: 24 Dec 2020 |
Application | Utility: CONTROLLING PRESSURE IN A CAVITY OF A LIGHT SOURCE Filling date: 7 Sep 2025 Issue date: 24 Dec 2020 |
Application | Utility: Visualization of Three-Dimensional Semiconductor Structures Filling date: 7 Sep 2025 Issue date: 17 Dec 2020 |
Application | Utility: Broadband Ultraviolet Illumination Sources Filling date: 7 Sep 2025 Issue date: 10 Dec 2020 |
Application | Utility: In Situ Process Chamber Chuck Cleaning by Cleaning Substrate Filling date: 7 Sep 2025 Issue date: 10 Dec 2020 |
Application | Utility: DETERMINING ONE OR MORE CHARACTERISTICS OF LIGHT IN AN OPTICAL SYSTEM Filling date: 7 Sep 2025 Issue date: 3 Dec 2020 |
Application | Utility: Wave-Front Aberration Metrology of Extreme Ultraviolet Mask Inspection Systems Filling date: 7 Sep 2025 Issue date: 3 Dec 2020 |
Application | Utility: Optical Etendue Matching Methods for Extreme Ultraviolet Metrology Filling date: 7 Sep 2025 Issue date: 3 Dec 2020 |
Application | Utility: Computer Assisted Weak Pattern Detection and Quantification System Filling date: 7 Sep 2025 Issue date: 26 Nov 2020 |
Application | Utility: Single Cell In-Die Metrology Targets and Measurement Methods Filling date: 7 Sep 2025 Issue date: 26 Nov 2020 |
Application | Utility: PER-SITE RESIDUALS ANALYSIS FOR ACCURATE METROLOGY MEASUREMENTS Filling date: 7 Sep 2025 Issue date: 26 Nov 2020 |
Application | Utility: STRONTIUM TETRABORATE AS OPTICAL COATING MATERIAL Filling date: 7 Sep 2025 Issue date: 12 Nov 2020 |
Application | Utility: Verification Metrology Targets and Their Design Filling date: 7 Sep 2025 Issue date: 5 Nov 2020 |
Application | Utility: System and Method for Generation of Wafer Inspection Critical Areas Filling date: 7 Sep 2025 Issue date: 22 Oct 2020 |
Application | Utility: Methods And Systems For Combining X-Ray Metrology Data Sets To Improve Parameter Estimation Filling date: 7 Sep 2025 Issue date: 22 Oct 2020 |
Application | Utility: LEARNABLE DEFECT DETECTION FOR SEMICONDUCTOR APPLICATIONS Filling date: 7 Sep 2025 Issue date: 15 Oct 2020 |
Application | Utility: Stochastic Reticle Defect Dispositioning Filling date: 7 Sep 2025 Issue date: 15 Oct 2020 |
Application | Utility: Defect Candidate Generation for Inspection Filling date: 7 Sep 2025 Issue date: 15 Oct 2020 |
Application | Utility: USING ABSOLUTE Z-HEIGHT VALUES FOR SYNERGY BETWEEN TOOLS Filling date: 7 Sep 2025 Issue date: 8 Oct 2020 |
Application | Utility: Automated Focusing System For Tracking Specimen Surface with a Configurable Focus Offset Filling date: 7 Sep 2025 Issue date: 8 Oct 2020 |
Application | Utility: Process Monitoring Of Deep Structures With X-Ray Scatterometry Filling date: 7 Sep 2025 Issue date: 24 Sep 2020 |
Application | Utility: Full Beam Metrology For X-Ray Scatterometry Systems Filling date: 7 Sep 2025 Issue date: 24 Sep 2020 |
Application | Utility: MAGNETO-OPTIC KERR EFFECT METROLOGY SYSTEMS Filling date: 7 Sep 2025 Issue date: 24 Sep 2020 |
Application | Utility: System and Method for Converting Backside Surface Roughness to Frontside Overlay Filling date: 7 Sep 2025 Issue date: 24 Sep 2020 |
Application | Utility: Multi-Dimensional Model Of Optical Dispersion Filling date: 7 Sep 2025 Issue date: 17 Sep 2020 |
Application | Utility: COLLECTING AND RECYCLING RARE GASES IN SEMICONDUCTOR PROCESSING EQUIPMENT Filling date: 7 Sep 2025 Issue date: 17 Sep 2020 |
Application | Utility: Methods And Systems For Measurement Of Thick Films And High Aspect Ratio Structures Filling date: 7 Sep 2025 Issue date: 10 Sep 2020 |
Application | Utility: Variable Aperture Mask Filling date: 7 Sep 2025 Issue date: 27 Aug 2020 |
Application | Utility: REFERENCE IMAGE GENERATION FOR SEMICONDUCTOR APPLICATIONS Filling date: 7 Sep 2025 Issue date: 27 Aug 2020 |
Showing 150 to 200 of 231 patents.