Lam Research
Utility Patents
Last updated:
List of all Lam Research patents 478 in total
| Status | Patent |
|---|---|
Grant | Utility: RF voltage sensor incorporating multiple voltage dividers for detecting RF voltages at a pickup device of a substrate support Filling date: 6 Sep 2025 Issue date: 22 Sep 2020 |
Grant | Utility: Cobalt etch back Filling date: 6 Sep 2025 Issue date: 22 Sep 2020 |
Grant | Utility: Method and apparatus for determining etch process parameters Filling date: 6 Sep 2025 Issue date: 22 Sep 2020 |
Grant | Utility: Methods and apparatus for controlling delivery of cross flowing and impinging electrolyte during electroplating Filling date: 6 Sep 2025 Issue date: 22 Sep 2020 |
Grant | Utility: Chemical deposition chamber having gas seal Filling date: 6 Sep 2025 Issue date: 22 Sep 2020 |
Grant | Utility: Low resistivity films containing molybdenum Filling date: 6 Sep 2025 Issue date: 15 Sep 2020 |
Grant | Utility: Cluster tool system with step ladder assembly Filling date: 6 Sep 2025 Issue date: 15 Sep 2020 |
Grant | Utility: Selective deposition of silicon nitride on silicon oxide using catalytic control Filling date: 6 Sep 2025 Issue date: 15 Sep 2020 |
Grant | Utility: Monitoring electrolytes during electroplating Filling date: 6 Sep 2025 Issue date: 15 Sep 2020 |
Grant | Utility: Methods for controlling plasma glow discharge in a plasma chamber Filling date: 6 Sep 2025 Issue date: 15 Sep 2020 |
Grant | Utility: Method to form ultrashallow junctions using atomic layer deposition and annealing Filling date: 6 Sep 2025 Issue date: 8 Sep 2020 |
Grant | Utility: Methods and systems for determining a fault in a gas heater channel Filling date: 6 Sep 2025 Issue date: 8 Sep 2020 |
Grant | Utility: Automated replacement of consumable parts using interfacing chambers Filling date: 6 Sep 2025 Issue date: 8 Sep 2020 |
Grant | Utility: Power switching system for ESC with array of thermal control elements Filling date: 6 Sep 2025 Issue date: 8 Sep 2020 |
Grant | Utility: Methods of encapsulation Filling date: 6 Sep 2025 Issue date: 1 Sep 2020 |
Grant | Utility: Segmenting a model within a plasma system Filling date: 6 Sep 2025 Issue date: 1 Sep 2020 |
Grant | Utility: Showerhead tilt mechanism Filling date: 6 Sep 2025 Issue date: 1 Sep 2020 |
Grant | Utility: High energy atomic layer etching Filling date: 6 Sep 2025 Issue date: 1 Sep 2020 |
Grant | Utility: Extracting real-time data from EtherCAT sensor bus in a substrate processing system Filling date: 6 Sep 2025 Issue date: 1 Sep 2020 |
Grant | Utility: Hybrid flow metrology for improved chamber matching Filling date: 6 Sep 2025 Issue date: 1 Sep 2020 |
Grant | Utility: Method and apparatus for synchronized pressure regulation of separated anode chamber Filling date: 6 Sep 2025 Issue date: 1 Sep 2020 |
Grant | Utility: Ex situ coating of chamber components for semiconductor processing Filling date: 6 Sep 2025 Issue date: 1 Sep 2020 |
Grant | Utility: Geometrically selective deposition of a dielectric film Filling date: 6 Sep 2025 Issue date: 1 Sep 2020 |
Grant | Utility: Laminated heater with different heater trace materials Filling date: 6 Sep 2025 Issue date: 1 Sep 2020 |
Grant | Utility: System and method for determining field non-uniformities of a wafer processing chamber using a wafer processing parameter Filling date: 6 Sep 2025 Issue date: 1 Sep 2020 |
Grant | Utility: Multi-level pulsing of DC and RF signals Filling date: 6 Sep 2025 Issue date: 25 Aug 2020 |
Grant | Utility: Ion energy control by RF pulse shape Filling date: 6 Sep 2025 Issue date: 25 Aug 2020 |
Grant | Utility: Showerhead with air-gapped plenums and overhead isolation gas distributor Filling date: 6 Sep 2025 Issue date: 18 Aug 2020 |
Grant | Utility: Dry plasma etch method to pattern MRAM stack Filling date: 6 Sep 2025 Issue date: 18 Aug 2020 |
Grant | Utility: RF impedance model based fault detection Filling date: 6 Sep 2025 Issue date: 18 Aug 2020 |
Grant | Utility: System and method for automating user interaction for semiconductor manufacturing equipment Filling date: 6 Sep 2025 Issue date: 18 Aug 2020 |
Grant | Utility: Edge exclusion control with adjustable plasma exclusion zone ring Filling date: 6 Sep 2025 Issue date: 18 Aug 2020 |
Grant | Utility: Reduction of sidewall notching for high aspect ratio 3D NAND etch Filling date: 6 Sep 2025 Issue date: 11 Aug 2020 |
Grant | Utility: Selective self-aligned patterning of silicon germanium, germanium and type III/V materials using a sulfur-containing mask Filling date: 6 Sep 2025 Issue date: 11 Aug 2020 |
Grant | Utility: Model-based control of substrate processing systems Filling date: 6 Sep 2025 Issue date: 11 Aug 2020 |
Grant | Utility: Metal liner passivation and adhesion enhancement by zinc doping Filling date: 6 Sep 2025 Issue date: 11 Aug 2020 |
Grant | Utility: Manufacture of an orifice plate for use in gas calibration Filling date: 6 Sep 2025 Issue date: 11 Aug 2020 |
Grant | Utility: Helium plug design to reduce arcing Filling date: 6 Sep 2025 Issue date: 11 Aug 2020 |
Grant | Utility: Methods for processing substrates using a movable plasma confinement structure Filling date: 6 Sep 2025 Issue date: 11 Aug 2020 |
Grant | Utility: Low volume showerhead with porous baffle Filling date: 6 Sep 2025 Issue date: 11 Aug 2020 |
Grant | Utility: Depositing ruthenium layers in interconnect metallization Filling date: 6 Sep 2025 Issue date: 4 Aug 2020 |
Grant | Utility: Atomic layer deposition and etch in a single plasma chamber for critical dimension control Filling date: 6 Sep 2025 Issue date: 4 Aug 2020 |
Grant | Utility: Systems and methods for transformer coupled plasma pulsing with transformer coupled capacitive tuning switching Filling date: 6 Sep 2025 Issue date: 4 Aug 2020 |
Grant | Utility: Method for controlling core critical dimension variation using flash trim sequence Filling date: 6 Sep 2025 Issue date: 28 Jul 2020 |
Grant | Utility: Surface modified depth controlled deposition for plasma based deposition Filling date: 6 Sep 2025 Issue date: 28 Jul 2020 |
Grant | Utility: System and method for calculating substrate support temperature Filling date: 6 Sep 2025 Issue date: 28 Jul 2020 |
Grant | Utility: Systems and methods for selectively etching film Filling date: 6 Sep 2025 Issue date: 28 Jul 2020 |
Grant | Utility: Atomic layer etching 3D structures: Si and SiGe and Ge smoothness on horizontal and vertical surfaces Filling date: 6 Sep 2025 Issue date: 28 Jul 2020 |
Grant | Utility: Confinement ring for use in a plasma processing system Filling date: 6 Sep 2025 Issue date: 21 Jul 2020 |
Grant | Utility: Substrate support with thermal zones for semiconductor processing Filling date: 6 Sep 2025 Issue date: 21 Jul 2020 |
Showing 200 to 250 of 478 patents.