| Utility: Radiation analysis system Filling date: 9 Sep 2025 Issue date: 2 Mar 2021 | 2 Oct 2017 | 2 Mar 2021 |
| Utility: Patterning device Filling date: 9 Sep 2025 Issue date: 23 Feb 2021 | 27 Nov 2019 | 23 Feb 2021 |
| Utility: Method for characterizing distortions in a lithographic process, lithographic apparatus, lithographic cell and computer program Filling date: 9 Sep 2025 Issue date: 23 Feb 2021 | 22 Feb 2017 | 23 Feb 2021 |
| Utility: Method and apparatus for direct write maskless lithography Filling date: 9 Sep 2025 Issue date: 23 Feb 2021 | 13 Dec 2016 | 23 Feb 2021 |
| Utility: Method of manufacturing a membrane assembly for EUV lithography, a membrane assembly, a lithographic apparatus, and a device manufacturing method Filling date: 9 Sep 2025 Issue date: 23 Feb 2021 | 2 Dec 2016 | 23 Feb 2021 |
| Utility: Support structure, method and lithographic apparatus Filling date: 9 Sep 2025 Issue date: 16 Feb 2021 | 28 Mar 2018 | 16 Feb 2021 |
| Utility: Feedthrough device and signal conductor path arrangement Filling date: 9 Sep 2025 Issue date: 9 Feb 2021 | 15 Jan 2020 | 9 Feb 2021 |
| Utility: Lithographic apparatus, method of transferring a substrate and device manufacturing method Filling date: 9 Sep 2025 Issue date: 9 Feb 2021 | 9 Sep 2019 | 9 Feb 2021 |
| Utility: Lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 9 Feb 2021 | 17 Nov 2016 | 9 Feb 2021 |
| Utility: Method and apparatus to correct for patterning process error Filling date: 9 Sep 2025 Issue date: 9 Feb 2021 | 28 Sep 2016 | 9 Feb 2021 |
| Utility: Metrology apparatus, lithographic system, and method of measuring a structure Filling date: 9 Sep 2025 Issue date: 2 Feb 2021 | 6 Sep 2019 | 2 Feb 2021 |
| Utility: Imprint lithography Filling date: 9 Sep 2025 Issue date: 2 Feb 2021 | 26 Aug 2019 | 2 Feb 2021 |
| Utility: Metrology method and apparatus and computer program Filling date: 9 Sep 2025 Issue date: 2 Feb 2021 | 3 Jul 2018 | 2 Feb 2021 |
| Utility: Lithographic apparatus and method Filling date: 9 Sep 2025 Issue date: 2 Feb 2021 | 18 May 2018 | 2 Feb 2021 |
| Utility: Setpoint generator, lithographic apparatus, lithographic apparatus operating method, and device manufacturing method Filling date: 9 Sep 2025 Issue date: 2 Feb 2021 | 18 Apr 2018 | 2 Feb 2021 |
| Utility: Method and apparatus for pattern fidelity control Filling date: 9 Sep 2025 Issue date: 2 Feb 2021 | 28 Nov 2017 | 2 Feb 2021 |
| Utility: Membrane for EUV lithography Filling date: 9 Sep 2025 Issue date: 2 Feb 2021 | 12 Apr 2017 | 2 Feb 2021 |
| Utility: Methods of controlling a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus Filling date: 9 Sep 2025 Issue date: 2 Feb 2021 | 9 Dec 2016 | 2 Feb 2021 |
| Utility: Metrology method and apparatus with increased bandwidth Filling date: 9 Sep 2025 Issue date: 26 Jan 2021 | 17 Jun 2020 | 26 Jan 2021 |
| Utility: Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus Filling date: 9 Sep 2025 Issue date: 26 Jan 2021 | 4 Mar 2020 | 26 Jan 2021 |
| Utility: Supply system for an extreme ultraviolet light source Filling date: 9 Sep 2025 Issue date: 26 Jan 2021 | 1 Nov 2019 | 26 Jan 2021 |
| Utility: EUV cleaning systems and methods thereof for an extreme ultraviolet light source Filling date: 9 Sep 2025 Issue date: 26 Jan 2021 | 18 Sep 2019 | 26 Jan 2021 |
| Utility: Radiation sensor apparatus Filling date: 9 Sep 2025 Issue date: 26 Jan 2021 | 30 Jul 2019 | 26 Jan 2021 |
| Utility: Reducing the effect of plasma on an object in an extreme ultraviolet light source Filling date: 9 Sep 2025 Issue date: 26 Jan 2021 | 21 May 2019 | 26 Jan 2021 |
| Utility: Recipe selection based on inter-recipe consistency Filling date: 9 Sep 2025 Issue date: 26 Jan 2021 | 21 May 2019 | 26 Jan 2021 |
| Utility: Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder Filling date: 9 Sep 2025 Issue date: 26 Jan 2021 | 29 Mar 2019 | 26 Jan 2021 |
| Utility: Methods for evaluating resist development Filling date: 9 Sep 2025 Issue date: 26 Jan 2021 | 20 Apr 2018 | 26 Jan 2021 |
| Utility: Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method Filling date: 9 Sep 2025 Issue date: 19 Jan 2021 | 11 Oct 2019 | 19 Jan 2021 |
| Utility: Metrology apparatus Filling date: 9 Sep 2025 Issue date: 19 Jan 2021 | 3 Sep 2019 | 19 Jan 2021 |
| Utility: Metrology apparatus, lithographic system, and method of measuring a structure Filling date: 9 Sep 2025 Issue date: 19 Jan 2021 | 6 Dec 2017 | 19 Jan 2021 |
| Utility: Visualization performance metrics of computational analyses of design layouts Filling date: 9 Sep 2025 Issue date: 19 Jan 2021 | 23 Jun 2017 | 19 Jan 2021 |
| Utility: Substrate holder, a lithographic apparatus and method of manufacturing devices Filling date: 9 Sep 2025 Issue date: 19 Jan 2021 | 2 Nov 2016 | 19 Jan 2021 |
| Utility: Multi-beam inspection apparatus with improved detection performance of signal electrons Filling date: 9 Sep 2025 Issue date: 12 Jan 2021 | 7 Mar 2019 | 12 Jan 2021 |
| Utility: Object identification and comparison Filling date: 9 Sep 2025 Issue date: 12 Jan 2021 | 2 Mar 2018 | 12 Jan 2021 |
| Utility: Imprint lithography Filling date: 9 Sep 2025 Issue date: 12 Jan 2021 | 1 Dec 2017 | 12 Jan 2021 |
| Utility: Calibration method for a lithographic apparatus Filling date: 9 Sep 2025 Issue date: 5 Jan 2021 | 18 Mar 2020 | 5 Jan 2021 |
| Utility: High voltage vacuum feedthrough Filling date: 9 Sep 2025 Issue date: 5 Jan 2021 | 4 Dec 2019 | 5 Jan 2021 |
| Utility: Lithographic method Filling date: 9 Sep 2025 Issue date: 5 Jan 2021 | 10 Jun 2019 | 5 Jan 2021 |
| Utility: Optical pulse generation for an extreme ultraviolet light source Filling date: 9 Sep 2025 Issue date: 5 Jan 2021 | 14 Jan 2019 | 5 Jan 2021 |
| Utility: Position measurement system, zeroing method, lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 5 Jan 2021 | 6 Feb 2018 | 5 Jan 2021 |
| Utility: Method and apparatus for predicting performance of a metrology system Filling date: 9 Sep 2025 Issue date: 5 Jan 2021 | 7 Oct 2016 | 5 Jan 2021 |
| Utility: Method of designing lithography features by self-assembly of block copolymer Filling date: 9 Sep 2025 Issue date: 5 Jan 2021 | 9 Jul 2014 | 5 Jan 2021 |
| Utility: Illumination intensity correction device for specifying an illumination intensity over an illumination field of a lithographic projection exposure apparatus Filling date: 9 Sep 2025 Issue date: 29 Dec 2020 | 8 May 2020 | 29 Dec 2020 |
| Utility: Apparatus of plural charged-particle beams Filling date: 9 Sep 2025 Issue date: 29 Dec 2020 | 26 Aug 2019 | 29 Dec 2020 |
| Utility: Multi-beam inspection apparatus Filling date: 9 Sep 2025 Issue date: 29 Dec 2020 | 1 May 2019 | 29 Dec 2020 |
| Utility: Radiation shielding device and apparatus comprising such shielding device Filling date: 9 Sep 2025 Issue date: 29 Dec 2020 | 21 Feb 2019 | 29 Dec 2020 |
| Utility: Methods of determining corrections for a patterning process Filling date: 9 Sep 2025 Issue date: 29 Dec 2020 | 28 Sep 2017 | 29 Dec 2020 |
| Utility: Substrate holder and method of manufacturing a substrate holder Filling date: 9 Sep 2025 Issue date: 29 Dec 2020 | 19 Jul 2017 | 29 Dec 2020 |
| Utility: Substrate, metrology apparatus and associated methods for a lithographic process Filling date: 9 Sep 2025 Issue date: 22 Dec 2020 | 26 May 2020 | 22 Dec 2020 |
| Utility: Lithographic apparatus and a device manufacturing method Filling date: 9 Sep 2025 Issue date: 22 Dec 2020 | 21 Nov 2019 | 22 Dec 2020 |
