| Utility: Method of determining a value of a parameter of interest, method of cleaning a signal containing information about a parameter of interest, device manufacturing method Filling date: 9 Sep 2025 Issue date: 6 Oct 2020 | 25 Oct 2018 | 6 Oct 2020 |
| Utility: Metrology method, apparatus and computer program Filling date: 9 Sep 2025 Issue date: 6 Oct 2020 | 13 Aug 2018 | 6 Oct 2020 |
| Utility: Method of performing model-based scanner tuning Filling date: 9 Sep 2025 Issue date: 6 Oct 2020 | 9 Feb 2018 | 6 Oct 2020 |
| Utility: Model for estimating stochastic variation Filling date: 9 Sep 2025 Issue date: 6 Oct 2020 | 17 Nov 2017 | 6 Oct 2020 |
| Utility: Mapping of patterns between design layout and patterning device Filling date: 9 Sep 2025 Issue date: 6 Oct 2020 | 4 Apr 2017 | 6 Oct 2020 |
| Utility: Metrology method and apparatus, computer program and lithographic system Filling date: 9 Sep 2025 Issue date: 29 Sep 2020 | 9 Apr 2019 | 29 Sep 2020 |
| Utility: Lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 29 Sep 2020 | 21 Dec 2018 | 29 Sep 2020 |
| Utility: Method of measuring a parameter of interest, device manufacturing method, metrology apparatus, and lithographic system Filling date: 9 Sep 2025 Issue date: 29 Sep 2020 | 17 Apr 2018 | 29 Sep 2020 |
| Utility: Metrology sensor, lithographic apparatus and method for manufacturing devices Filling date: 9 Sep 2025 Issue date: 29 Sep 2020 | 6 Mar 2018 | 29 Sep 2020 |
| Utility: Method and apparatus for measuring a structure on a substrate Filling date: 9 Sep 2025 Issue date: 29 Sep 2020 | 10 Jan 2018 | 29 Sep 2020 |
| Utility: Determining an optimal operational parameter setting of a metrology system Filling date: 9 Sep 2025 Issue date: 29 Sep 2020 | 17 Oct 2017 | 29 Sep 2020 |
| Utility: Lithographic apparatus Filling date: 9 Sep 2025 Issue date: 29 Sep 2020 | 17 Nov 2016 | 29 Sep 2020 |
| Utility: Systems and methods for charged particle flooding to enhance voltage contrast defect signal Filling date: 9 Sep 2025 Issue date: 22 Sep 2020 | 2 Aug 2018 | 22 Sep 2020 |
| Utility: Method and apparatus to determine a patterning process parameter Filling date: 9 Sep 2025 Issue date: 22 Sep 2020 | 1 Aug 2018 | 22 Sep 2020 |
| Utility: Automatic selection of metrology target measurement recipes Filling date: 9 Sep 2025 Issue date: 22 Sep 2020 | 7 Aug 2017 | 22 Sep 2020 |
| Utility: Electron emitter and method of fabricating same Filling date: 9 Sep 2025 Issue date: 22 Sep 2020 | 31 Jul 2017 | 22 Sep 2020 |
| Utility: Vibration isolation device, lithographic apparatus and method to tune a vibration isolation device Filling date: 9 Sep 2025 Issue date: 22 Sep 2020 | 3 Nov 2016 | 22 Sep 2020 |
| Utility: Method of measuring a structure, inspection apparatus, lithographic system, device manufacturing method and wavelength-selective filter for use therein Filling date: 9 Sep 2025 Issue date: 15 Sep 2020 | 29 Jul 2019 | 15 Sep 2020 |
| Utility: Method and system for inspecting an EUV mask Filling date: 9 Sep 2025 Issue date: 15 Sep 2020 | 28 Sep 2018 | 15 Sep 2020 |
| Utility: Lithographic apparatus and method Filling date: 9 Sep 2025 Issue date: 15 Sep 2020 | 21 Sep 2017 | 15 Sep 2020 |
| Utility: Patterning stack optimization Filling date: 9 Sep 2025 Issue date: 15 Sep 2020 | 2 Aug 2017 | 15 Sep 2020 |
| Utility: Support apparatus, a lithographic apparatus and a device manufacturing method Filling date: 9 Sep 2025 Issue date: 8 Sep 2020 | 20 Dec 2019 | 8 Sep 2020 |
| Utility: Lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 8 Sep 2020 | 18 Oct 2019 | 8 Sep 2020 |
| Utility: Lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 8 Sep 2020 | 12 Nov 2018 | 8 Sep 2020 |
| Utility: Encoder, position measurement system and lithographic apparatus involving an enclosing device Filling date: 9 Sep 2025 Issue date: 8 Sep 2020 | 22 Oct 2015 | 8 Sep 2020 |
| Utility: Lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 1 Sep 2020 | 1 Mar 2019 | 1 Sep 2020 |
| Utility: Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method Filling date: 9 Sep 2025 Issue date: 1 Sep 2020 | 24 Apr 2018 | 1 Sep 2020 |
| Utility: Active drying station and method to remove immersion liquid using gas flow supply with gas outlet between two gas inlets Filling date: 9 Sep 2025 Issue date: 1 Sep 2020 | 6 Apr 2017 | 1 Sep 2020 |
| Utility: Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product Filling date: 9 Sep 2025 Issue date: 25 Aug 2020 | 15 Mar 2018 | 25 Aug 2020 |
| Utility: Process window identifier Filling date: 9 Sep 2025 Issue date: 25 Aug 2020 | 22 Nov 2017 | 25 Aug 2020 |
| Utility: Method and device for pupil illumination in overlay and critical dimension sensors Filling date: 9 Sep 2025 Issue date: 25 Aug 2020 | 16 Jun 2017 | 25 Aug 2020 |
| Utility: Method and apparatus for pattern correction and verification Filling date: 9 Sep 2025 Issue date: 25 Aug 2020 | 3 Oct 2016 | 25 Aug 2020 |
| Utility: Lithographic method and apparatus Filling date: 9 Sep 2025 Issue date: 18 Aug 2020 | 2 Sep 2019 | 18 Aug 2020 |
| Utility: Method of measuring a target, metrology apparatus, polarizer assembly Filling date: 9 Sep 2025 Issue date: 18 Aug 2020 | 14 Jun 2019 | 18 Aug 2020 |
| Utility: Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 18 Aug 2020 | 11 Jun 2019 | 18 Aug 2020 |
| Utility: Methods and apparatus for measuring a property of a substrate Filling date: 9 Sep 2025 Issue date: 18 Aug 2020 | 10 Apr 2019 | 18 Aug 2020 |
| Utility: Support apparatus, lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 18 Aug 2020 | 1 Nov 2018 | 18 Aug 2020 |
| Utility: Method of measuring a parameter of a device manufacturing process, metrology apparatus, substrate, target, device manufacturing system, and device manufacturing method Filling date: 9 Sep 2025 Issue date: 18 Aug 2020 | 31 Oct 2017 | 18 Aug 2020 |
| Utility: Lithographic apparatus Filling date: 9 Sep 2025 Issue date: 18 Aug 2020 | 11 Aug 2017 | 18 Aug 2020 |
| Utility: Droplet generator for lithographic apparatus, EUV source and lithographic apparatus Filling date: 9 Sep 2025 Issue date: 18 Aug 2020 | 22 Nov 2016 | 18 Aug 2020 |
| Utility: Lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 11 Aug 2020 | 27 Jun 2019 | 11 Aug 2020 |
| Utility: Metrology method and apparatus, substrate, lithographic system and device manufacturing method Filling date: 9 Sep 2025 Issue date: 11 Aug 2020 | 9 Nov 2018 | 11 Aug 2020 |
| Utility: Method and apparatus for image analysis Filling date: 9 Sep 2025 Issue date: 4 Aug 2020 | 5 Sep 2019 | 4 Aug 2020 |
| Utility: Patterning device Filling date: 9 Sep 2025 Issue date: 4 Aug 2020 | 3 Jul 2019 | 4 Aug 2020 |
| Utility: Metrology method and apparatus with increased bandwidth Filling date: 9 Sep 2025 Issue date: 4 Aug 2020 | 1 Feb 2019 | 4 Aug 2020 |
| Utility: Projection system and mirror and radiation source for a lithographic apparatus Filling date: 9 Sep 2025 Issue date: 4 Aug 2020 | 25 Jan 2019 | 4 Aug 2020 |
| Utility: Metrology method and apparatus, lithographic system and device manufacturing method Filling date: 9 Sep 2025 Issue date: 28 Jul 2020 | 24 May 2019 | 28 Jul 2020 |
| Utility: Inspection substrate and an inspection method Filling date: 9 Sep 2025 Issue date: 28 Jul 2020 | 16 Jan 2019 | 28 Jul 2020 |
| Utility: Optical systems, metrology apparatus and associated method Filling date: 9 Sep 2025 Issue date: 28 Jul 2020 | 30 Aug 2018 | 28 Jul 2020 |
| Utility: Determining an edge roughness parameter of a periodic structure Filling date: 9 Sep 2025 Issue date: 28 Jul 2020 | 6 Jul 2018 | 28 Jul 2020 |
