ASML Holding N.V.
Patents, Design & Utilities
Last updated:
List of all ASML Holding N.V. patents 666 in total
| Status | Patent |
|---|---|
Grant | Utility: Method for process metrology Filling date: 9 Sep 2025 Issue date: 12 Jul 2022 |
Grant | Utility: Substrate holder and method of manufacturing a substrate holder Filling date: 9 Sep 2025 Issue date: 5 Jul 2022 |
Grant | Utility: Lithographic apparatus and device manufacturing method involving a heater Filling date: 9 Sep 2025 Issue date: 5 Jul 2022 |
Grant | Utility: Method for determining contribution to a fingerprint Filling date: 9 Sep 2025 Issue date: 5 Jul 2022 |
Grant | Utility: Process window identifier Filling date: 9 Sep 2025 Issue date: 5 Jul 2022 |
Grant | Utility: Deep learning for semantic segmentation of pattern Filling date: 9 Sep 2025 Issue date: 5 Jul 2022 |
Grant | Utility: Method, assembly, and apparatus for improved control of broadband radiation generation Filling date: 9 Sep 2025 Issue date: 28 Jun 2022 |
Grant | Utility: Method of performing model-based scanner tuning Filling date: 9 Sep 2025 Issue date: 28 Jun 2022 |
Grant | Utility: Device manufacturing method and computer program Filling date: 9 Sep 2025 Issue date: 28 Jun 2022 |
Grant | Utility: Alignment method and associated metrology device Filling date: 9 Sep 2025 Issue date: 28 Jun 2022 |
Grant | Utility: Method for evaluating control strategies in a semiconductor manufacturing process Filling date: 9 Sep 2025 Issue date: 28 Jun 2022 |
Grant | Utility: Lithography apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 28 Jun 2022 |
Grant | Utility: Method and apparatus for configuring spatial dimensions of a beam during a scan Filling date: 9 Sep 2025 Issue date: 21 Jun 2022 |
Grant | Utility: Laser beam monitoring system Filling date: 9 Sep 2025 Issue date: 21 Jun 2022 |
Grant | Utility: Mode control of photonic crystal fiber based broadband radiation sources Filling date: 9 Sep 2025 Issue date: 14 Jun 2022 |
Grant | Utility: Metrology sensor for position metrology Filling date: 9 Sep 2025 Issue date: 14 Jun 2022 |
Grant | Utility: Bandwidth calculation system and method for determining a desired wavelength bandwidth for a measurement beam in a mark detection system Filling date: 9 Sep 2025 Issue date: 14 Jun 2022 |
Grant | Utility: Control method for a scanning exposure apparatus Filling date: 9 Sep 2025 Issue date: 14 Jun 2022 |
Grant | Utility: Failure model for predicting failure due to resist layer Filling date: 9 Sep 2025 Issue date: 7 Jun 2022 |
Grant | Utility: Method and apparatus for determining a radiation beam intensity profile Filling date: 9 Sep 2025 Issue date: 7 Jun 2022 |
Grant | Utility: Method and apparatus for controlling a computing process Filling date: 9 Sep 2025 Issue date: 7 Jun 2022 |
Grant | Utility: Pellicle and pellicle assembly Filling date: 9 Sep 2025 Issue date: 31 May 2022 |
Grant | Utility: Computational metrology Filling date: 9 Sep 2025 Issue date: 31 May 2022 |
Grant | Utility: Methods and apparatus for calculating electromagnetic scattering properties of a structure Filling date: 9 Sep 2025 Issue date: 31 May 2022 |
Grant | Utility: Illumination source for an inspection apparatus, inspection apparatus and inspection method Filling date: 9 Sep 2025 Issue date: 31 May 2022 |
Grant | Utility: Cleaning a structure surface in an EUV chamber Filling date: 9 Sep 2025 Issue date: 31 May 2022 |
Grant | Utility: Scan signal characterization diagnostics Filling date: 9 Sep 2025 Issue date: 31 May 2022 |
Grant | Utility: Aberration correction in charged particle system Filling date: 9 Sep 2025 Issue date: 31 May 2022 |
Grant | Utility: Prolonging optical element lifetime in an EUV lithography system Filling date: 9 Sep 2025 Issue date: 24 May 2022 |
Grant | Utility: Method of manufacture of a capillary for a hollow-core photonic crystal fiber Filling date: 9 Sep 2025 Issue date: 17 May 2022 |
Grant | Utility: Position sensor Filling date: 9 Sep 2025 Issue date: 17 May 2022 |
Grant | Utility: Apparatus for and method of in-situ particle removal in a lithography apparatus Filling date: 9 Sep 2025 Issue date: 17 May 2022 |
Grant | Utility: Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus Filling date: 9 Sep 2025 Issue date: 10 May 2022 |
Grant | Utility: Metrology apparatus and a method of determining a characteristic of interest Filling date: 9 Sep 2025 Issue date: 10 May 2022 |
Grant | Utility: Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus Filling date: 9 Sep 2025 Issue date: 10 May 2022 |
Grant | Utility: Lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 10 May 2022 |
Grant | Utility: Estimating a parameter of a substrate Filling date: 9 Sep 2025 Issue date: 10 May 2022 |
Grant | Utility: Topography measurement system Filling date: 9 Sep 2025 Issue date: 10 May 2022 |
Grant | Utility: Determining an optimal operational parameter setting of a metrology system Filling date: 9 Sep 2025 Issue date: 3 May 2022 |
Grant | Utility: Measuring a process parameter for a manufacturing process involving lithography Filling date: 9 Sep 2025 Issue date: 3 May 2022 |
Grant | Utility: Method to label substrates based on process parameters Filling date: 9 Sep 2025 Issue date: 3 May 2022 |
Grant | Utility: Apparatus incorporating a gas lock Filling date: 9 Sep 2025 Issue date: 3 May 2022 |
Grant | Utility: Membrane for EUV lithography Filling date: 9 Sep 2025 Issue date: 3 May 2022 |
Grant | Utility: E-beam apparatus Filling date: 9 Sep 2025 Issue date: 26 Apr 2022 |
Grant | Utility: Method of purifying target material for an EUV light source Filling date: 9 Sep 2025 Issue date: 26 Apr 2022 |
Grant | Utility: Instant tuning method for accelerating resist and etch model calibration Filling date: 9 Sep 2025 Issue date: 26 Apr 2022 |
Grant | Utility: Pellicle frame and pellicle assembly Filling date: 9 Sep 2025 Issue date: 26 Apr 2022 |
Grant | Utility: Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method Filling date: 9 Sep 2025 Issue date: 26 Apr 2022 |
Grant | Utility: Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Filling date: 9 Sep 2025 Issue date: 19 Apr 2022 |
Grant | Utility: Method and apparatus for adaptive alignment Filling date: 9 Sep 2025 Issue date: 19 Apr 2022 |
Showing 50 to 100 of 666 patents.