| Utility: Metrology robustness based on through-wavelength similarity Filling date: 9 Sep 2025 Issue date: 22 Dec 2020 | 23 Aug 2019 | 22 Dec 2020 |
| Utility: Lithographic apparatus, cover for use in a lithographic apparatus and method for designing a cover for use in a lithographic apparatus Filling date: 9 Sep 2025 Issue date: 22 Dec 2020 | 14 Mar 2018 | 22 Dec 2020 |
| Utility: E-beam apparatus Filling date: 9 Sep 2025 Issue date: 15 Dec 2020 | 2 May 2019 | 15 Dec 2020 |
| Utility: Lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 15 Dec 2020 | 4 Feb 2019 | 15 Dec 2020 |
| Utility: Lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 15 Dec 2020 | 11 Jan 2018 | 15 Dec 2020 |
| Utility: Methods and apparatus for monitoring a lithographic manufacturing process Filling date: 9 Sep 2025 Issue date: 15 Dec 2020 | 3 Jan 2018 | 15 Dec 2020 |
| Utility: Athermalization of an alignment system Filling date: 9 Sep 2025 Issue date: 15 Dec 2020 | 4 Sep 2017 | 15 Dec 2020 |
| Utility: Process window tracker Filling date: 9 Sep 2025 Issue date: 15 Dec 2020 | 27 May 2016 | 15 Dec 2020 |
| Utility: Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method Filling date: 9 Sep 2025 Issue date: 8 Dec 2020 | 16 Feb 2020 | 8 Dec 2020 |
| Utility: Fluid handling structure, a lithographic apparatus and a device manufacturing method Filling date: 9 Sep 2025 Issue date: 8 Dec 2020 | 31 Jan 2020 | 8 Dec 2020 |
| Utility: Methods and apparatus for calculating substrate model parameters and controlling lithographic processing Filling date: 9 Sep 2025 Issue date: 8 Dec 2020 | 28 Oct 2019 | 8 Dec 2020 |
| Utility: Methods for defect validation Filling date: 9 Sep 2025 Issue date: 8 Dec 2020 | 25 May 2016 | 8 Dec 2020 |
| Utility: Variable corrector of a wave front Filling date: 9 Sep 2025 Issue date: 1 Dec 2020 | 31 Jul 2017 | 1 Dec 2020 |
| Utility: Displacement based overlay or alignment Filling date: 9 Sep 2025 Issue date: 1 Dec 2020 | 20 Apr 2017 | 1 Dec 2020 |
| Utility: Method for manufacturing a membrane assembly Filling date: 9 Sep 2025 Issue date: 1 Dec 2020 | 25 Oct 2016 | 1 Dec 2020 |
| Utility: Lithography apparatus and a method of manufacturing a device Filling date: 9 Sep 2025 Issue date: 24 Nov 2020 | 8 Nov 2019 | 24 Nov 2020 |
| Utility: Optical system and method Filling date: 9 Sep 2025 Issue date: 24 Nov 2020 | 19 Sep 2019 | 24 Nov 2020 |
| Utility: Determination of stack difference and correction using stack difference Filling date: 9 Sep 2025 Issue date: 24 Nov 2020 | 19 Sep 2019 | 24 Nov 2020 |
| Utility: Scatterometer and method of scatterometry using acoustic radiation Filling date: 9 Sep 2025 Issue date: 24 Nov 2020 | 16 Oct 2018 | 24 Nov 2020 |
| Utility: Laser-operated light source Filling date: 9 Sep 2025 Issue date: 24 Nov 2020 | 17 Jul 2018 | 24 Nov 2020 |
| Utility: Methods and systems for parameter-sensitive and orthogonal gauge design for lithography calibration Filling date: 9 Sep 2025 Issue date: 24 Nov 2020 | 16 Jul 2018 | 24 Nov 2020 |
| Utility: Mirror array Filling date: 9 Sep 2025 Issue date: 24 Nov 2020 | 8 Mar 2018 | 24 Nov 2020 |
| Utility: Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 24 Nov 2020 | 20 Dec 2017 | 24 Nov 2020 |
| Utility: Metrology method and apparatus, computer program and lithographic system Filling date: 9 Sep 2025 Issue date: 24 Nov 2020 | 11 Jul 2017 | 24 Nov 2020 |
| Utility: Lithographic apparatus and device manufacturing method involving a heater Filling date: 9 Sep 2025 Issue date: 17 Nov 2020 | 5 Apr 2019 | 17 Nov 2020 |
| Utility: Three-dimensional mask model for photolithography simulation Filling date: 9 Sep 2025 Issue date: 17 Nov 2020 | 1 Feb 2019 | 17 Nov 2020 |
| Utility: Lithographic apparatus, lithographic projection apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 17 Nov 2020 | 30 Jan 2018 | 17 Nov 2020 |
| Utility: Method and machine for examining wafers Filling date: 9 Sep 2025 Issue date: 17 Nov 2020 | 18 Sep 2017 | 17 Nov 2020 |
| Utility: Device manufacturing method and patterning devices for use in device manufacturing method Filling date: 9 Sep 2025 Issue date: 17 Nov 2020 | 5 Feb 2016 | 17 Nov 2020 |
| Utility: Method for of measuring a parameter relating to a structure formed using a lithographic process Filling date: 9 Sep 2025 Issue date: 10 Nov 2020 | 30 Aug 2019 | 10 Nov 2020 |
| Utility: Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method Filling date: 9 Sep 2025 Issue date: 10 Nov 2020 | 12 Dec 2017 | 10 Nov 2020 |
| Utility: Metrology method and lithographic method, lithographic cell and computer program Filling date: 9 Sep 2025 Issue date: 10 Nov 2020 | 21 Feb 2017 | 10 Nov 2020 |
| Utility: HHG source, inspection apparatus and method for performing a measurement Filling date: 9 Sep 2025 Issue date: 27 Oct 2020 | 23 Jan 2019 | 27 Oct 2020 |
| Utility: Method for forming an optical fiber array Filling date: 9 Sep 2025 Issue date: 27 Oct 2020 | 3 Oct 2018 | 27 Oct 2020 |
| Utility: Metrology system and method for determining a characteristic of one or more structures on a substrate Filling date: 9 Sep 2025 Issue date: 27 Oct 2020 | 3 Oct 2018 | 27 Oct 2020 |
| Utility: Method for determining contribution to a fingerprint Filling date: 9 Sep 2025 Issue date: 27 Oct 2020 | 23 May 2018 | 27 Oct 2020 |
| Utility: Method for determining an optimized set of measurement locations for measurement of a parameter of a lithographic process, metrology system and computer program products for implementing such methods Filling date: 9 Sep 2025 Issue date: 27 Oct 2020 | 27 Sep 2017 | 27 Oct 2020 |
| Utility: Vibration isolator, lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 27 Oct 2020 | 3 Feb 2017 | 27 Oct 2020 |
| Utility: Radiation source Filling date: 9 Sep 2025 Issue date: 20 Oct 2020 | 14 Jun 2019 | 20 Oct 2020 |
| Utility: Inspection apparatus having non-linear optics Filling date: 9 Sep 2025 Issue date: 20 Oct 2020 | 25 Mar 2019 | 20 Oct 2020 |
| Utility: Apparatus of plural charged-particle beams Filling date: 9 Sep 2025 Issue date: 20 Oct 2020 | 26 Nov 2018 | 20 Oct 2020 |
| Utility: Metrology apparatus and a method of determining a characteristic of interest Filling date: 9 Sep 2025 Issue date: 20 Oct 2020 | 6 Nov 2018 | 20 Oct 2020 |
| Utility: Method of designing metrology targets, substrates having metrology targets, method of measuring overlay, and device manufacturing method Filling date: 9 Sep 2025 Issue date: 20 Oct 2020 | 6 Jul 2018 | 20 Oct 2020 |
| Utility: Method of monitoring and device manufacturing method Filling date: 9 Sep 2025 Issue date: 20 Oct 2020 | 12 Apr 2018 | 20 Oct 2020 |
| Utility: Stage system and metrology tool Filling date: 9 Sep 2025 Issue date: 20 Oct 2020 | 14 Mar 2018 | 20 Oct 2020 |
| Utility: Method and apparatus to determine a patterning process parameter Filling date: 9 Sep 2025 Issue date: 20 Oct 2020 | 28 Feb 2017 | 20 Oct 2020 |
| Utility: Metrology method and apparatus, substrate, lithographic method and associated computer product Filling date: 9 Sep 2025 Issue date: 13 Oct 2020 | 25 Apr 2018 | 13 Oct 2020 |
| Utility: Method for optimization of a lithographic process Filling date: 9 Sep 2025 Issue date: 13 Oct 2020 | 16 Oct 2017 | 13 Oct 2020 |
| Utility: Lithographic apparatus and device manufacturing method involving a barrier structure to handle liquid Filling date: 9 Sep 2025 Issue date: 13 Oct 2020 | 20 Oct 2016 | 13 Oct 2020 |
| Utility: Determining moving properties of a target in an extreme ultraviolet light source Filling date: 9 Sep 2025 Issue date: 6 Oct 2020 | 24 Feb 2020 | 6 Oct 2020 |
