ASML Holding N.V.
Patents, Design & Utilities
Last updated:
List of all ASML Holding N.V. patents 666 in total
| Status | Patent |
|---|---|
Grant | Utility: Optimization of a lithographic projection apparatus accounting for an interlayer characteristic Filling date: 9 Sep 2025 Issue date: 7 Sep 2021 |
Grant | Utility: Beam splitting apparatus Filling date: 9 Sep 2025 Issue date: 7 Sep 2021 |
Grant | Utility: Apparatus of plural charged-particle beams Filling date: 9 Sep 2025 Issue date: 31 Aug 2021 |
Grant | Utility: Metrology recipe selection Filling date: 9 Sep 2025 Issue date: 31 Aug 2021 |
Grant | Utility: Measurement apparatus Filling date: 9 Sep 2025 Issue date: 31 Aug 2021 |
Grant | Utility: Lithographic method and apparatus Filling date: 9 Sep 2025 Issue date: 31 Aug 2021 |
Grant | Utility: Optimizing a sequence of processes for manufacturing of product units Filling date: 9 Sep 2025 Issue date: 31 Aug 2021 |
Grant | Utility: Optical fiber Filling date: 9 Sep 2025 Issue date: 24 Aug 2021 |
Grant | Utility: Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 24 Aug 2021 |
Grant | Utility: Method and apparatus to determine a patterning process parameter Filling date: 9 Sep 2025 Issue date: 24 Aug 2021 |
Grant | Utility: Method of measuring a parameter of a lithographic process, metrology apparatus Filling date: 9 Sep 2025 Issue date: 24 Aug 2021 |
Grant | Utility: Method and apparatus to determine a patterning process parameter Filling date: 9 Sep 2025 Issue date: 24 Aug 2021 |
Grant | Utility: Charged particle blocking element, exposure apparatus comprising such an element, and method for using such an exposure apparatus Filling date: 9 Sep 2025 Issue date: 24 Aug 2021 |
Grant | Utility: Maintaining a set of process fingerprints Filling date: 9 Sep 2025 Issue date: 24 Aug 2021 |
Grant | Utility: Method and apparatus for optimization of lithographic process Filling date: 9 Sep 2025 Issue date: 24 Aug 2021 |
Grant | Utility: Generating predicted data for control or monitoring of a production process Filling date: 9 Sep 2025 Issue date: 24 Aug 2021 |
Grant | Utility: Inspection substrate and an inspection method Filling date: 9 Sep 2025 Issue date: 24 Aug 2021 |
Grant | Utility: Target expansion rate control in an extreme ultraviolet light source Filling date: 9 Sep 2025 Issue date: 17 Aug 2021 |
Grant | Utility: Vacuum chamber arrangement for charged particle beam generator Filling date: 9 Sep 2025 Issue date: 17 Aug 2021 |
Grant | Utility: Method and apparatus for measuring a parameter of a lithographic process, substrate and patterning devices for use in the method Filling date: 9 Sep 2025 Issue date: 17 Aug 2021 |
Grant | Utility: Method and apparatus for detecting substrate surface variations Filling date: 9 Sep 2025 Issue date: 17 Aug 2021 |
Grant | Utility: Exposure apparatus Filling date: 9 Sep 2025 Issue date: 17 Aug 2021 |
Grant | Utility: Method and apparatus for inspection Filling date: 9 Sep 2025 Issue date: 17 Aug 2021 |
Grant | Utility: Determining a correction to a process Filling date: 9 Sep 2025 Issue date: 10 Aug 2021 |
Grant | Utility: Mask assembly and associated methods Filling date: 9 Sep 2025 Issue date: 10 Aug 2021 |
Grant | Utility: Method and apparatus for source mask optimization configured to increase scanner throughput for a patterning process Filling date: 9 Sep 2025 Issue date: 10 Aug 2021 |
Grant | Utility: Method of manufacturing devices Filling date: 9 Sep 2025 Issue date: 10 Aug 2021 |
Grant | Utility: System and method for bare wafer inspection Filling date: 9 Sep 2025 Issue date: 10 Aug 2021 |
Grant | Utility: Cleaning device and method of cleaning Filling date: 9 Sep 2025 Issue date: 10 Aug 2021 |
Grant | Utility: Lithographic apparatus, fluid handling structure for use in a lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 10 Aug 2021 |
Grant | Utility: Substrate holder and a method of manufacturing a device Filling date: 9 Sep 2025 Issue date: 10 Aug 2021 |
Grant | Utility: Mark, overlay target, and methods of alignment and overlay Filling date: 9 Sep 2025 Issue date: 10 Aug 2021 |
Grant | Utility: System, a lithographic apparatus, and a method for reducing oxidation or removing oxide on a substrate support Filling date: 9 Sep 2025 Issue date: 10 Aug 2021 |
Grant | Utility: Method to predict yield of a device manufacturing process Filling date: 9 Sep 2025 Issue date: 10 Aug 2021 |
Grant | Utility: Metrology sensor, lithographic apparatus and method for manufacturing devices Filling date: 9 Sep 2025 Issue date: 10 Aug 2021 |
Grant | Utility: Computational wafer inspection Filling date: 9 Sep 2025 Issue date: 3 Aug 2021 |
Grant | Utility: Measurement apparatus and a method for determining a substrate grid Filling date: 9 Sep 2025 Issue date: 3 Aug 2021 |
Grant | Utility: Process window based on defect probability Filling date: 9 Sep 2025 Issue date: 3 Aug 2021 |
Grant | Utility: Temperature sensing probe, burl plate, lithographic apparatus and method Filling date: 9 Sep 2025 Issue date: 3 Aug 2021 |
Grant | Utility: Charged particle source Filling date: 9 Sep 2025 Issue date: 27 Jul 2021 |
Grant | Utility: Computational metrology Filling date: 9 Sep 2025 Issue date: 20 Jul 2021 |
Grant | Utility: Method and apparatus for image analysis Filling date: 9 Sep 2025 Issue date: 20 Jul 2021 |
Grant | Utility: Method for manufacturing a membrane assembly Filling date: 9 Sep 2025 Issue date: 13 Jul 2021 |
Grant | Utility: Apparatus of plural charged-particle beams Filling date: 9 Sep 2025 Issue date: 13 Jul 2021 |
Grant | Utility: Device manufacturing method Filling date: 9 Sep 2025 Issue date: 13 Jul 2021 |
Grant | Utility: Apparatus using multiple charged particle beams Filling date: 9 Sep 2025 Issue date: 13 Jul 2021 |
Grant | Utility: Time-dependent defect inspection apparatus Filling date: 9 Sep 2025 Issue date: 6 Jul 2021 |
Grant | Utility: Reducing speckle in an excimer light source Filling date: 9 Sep 2025 Issue date: 6 Jul 2021 |
Grant | Utility: Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method Filling date: 9 Sep 2025 Issue date: 6 Jul 2021 |
Grant | Utility: Method and apparatus for controlling an industrial process using product grouping Filling date: 9 Sep 2025 Issue date: 6 Jul 2021 |
Showing 250 to 300 of 666 patents.