| Utility: Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus Filling date: 9 Sep 2025 Issue date: 16 Nov 2021 | 21 Apr 2017 | 16 Nov 2021 |
| Utility: Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product Filling date: 9 Sep 2025 Issue date: 9 Nov 2021 | 21 Aug 2020 | 9 Nov 2021 |
| Utility: Pneumatic support device and lithographic apparatus with pneumatic support device Filling date: 9 Sep 2025 Issue date: 9 Nov 2021 | 18 Mar 2019 | 9 Nov 2021 |
| Utility: Radioisotope production Filling date: 9 Sep 2025 Issue date: 9 Nov 2021 | 3 Nov 2016 | 9 Nov 2021 |
| Utility: Method and apparatus for inspection and metrology Filling date: 9 Sep 2025 Issue date: 9 Nov 2021 | 25 Mar 2016 | 9 Nov 2021 |
| Utility: Heating system for an optical component of a lithographic apparatus Filling date: 9 Sep 2025 Issue date: 2 Nov 2021 | 4 Mar 2020 | 2 Nov 2021 |
| Utility: Hollow-core photonic crystal fiber based optical component for broadband radiation generation Filling date: 9 Sep 2025 Issue date: 2 Nov 2021 | 3 Mar 2020 | 2 Nov 2021 |
| Utility: Image contrast enhancement in sample inspection Filling date: 9 Sep 2025 Issue date: 2 Nov 2021 | 25 Sep 2018 | 2 Nov 2021 |
| Utility: Electron beam inspection tool and method of controlling heat load Filling date: 9 Sep 2025 Issue date: 26 Oct 2021 | 28 Feb 2020 | 26 Oct 2021 |
| Utility: Substrate support, lithographic apparatus, substrate inspection apparatus, device manufacturing method Filling date: 9 Sep 2025 Issue date: 26 Oct 2021 | 16 Jul 2019 | 26 Oct 2021 |
| Utility: Positioning system for a lithographic apparatus Filling date: 9 Sep 2025 Issue date: 26 Oct 2021 | 14 Feb 2019 | 26 Oct 2021 |
| Utility: Fluid handling structure, lithographic apparatus, and method of using a fluid handling structure Filling date: 9 Sep 2025 Issue date: 26 Oct 2021 | 22 Nov 2018 | 26 Oct 2021 |
| Utility: Lithographic method and lithographic apparatus Filling date: 9 Sep 2025 Issue date: 26 Oct 2021 | 10 Dec 2015 | 26 Oct 2021 |
| Utility: Projection system and mirror and radiation source for a lithographic apparatus Filling date: 9 Sep 2025 Issue date: 19 Oct 2021 | 22 May 2020 | 19 Oct 2021 |
| Utility: Fabricating unique chips using a charged particle multi-beamlet lithography system Filling date: 9 Sep 2025 Issue date: 19 Oct 2021 | 23 Mar 2020 | 19 Oct 2021 |
| Utility: In-lens wafer pre-charging and inspection with multiple beams Filling date: 9 Sep 2025 Issue date: 19 Oct 2021 | 27 Dec 2019 | 19 Oct 2021 |
| Utility: Method of measuring a parameter of a patterning process, metrology apparatus, target Filling date: 9 Sep 2025 Issue date: 19 Oct 2021 | 10 Dec 2019 | 19 Oct 2021 |
| Utility: Optimizing an apparatus for multi-stage processing of product units Filling date: 9 Sep 2025 Issue date: 19 Oct 2021 | 22 Feb 2018 | 19 Oct 2021 |
| Utility: Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 19 Oct 2021 | 9 Aug 2016 | 19 Oct 2021 |
| Utility: Method and apparatus for image analysis Filling date: 9 Sep 2025 Issue date: 12 Oct 2021 | 30 Jul 2020 | 12 Oct 2021 |
| Utility: Method and apparatus to determine a patterning process parameter Filling date: 9 Sep 2025 Issue date: 12 Oct 2021 | 14 Feb 2020 | 12 Oct 2021 |
| Utility: Reflector and method of manufacturing a reflector Filling date: 9 Sep 2025 Issue date: 12 Oct 2021 | 13 Jun 2019 | 12 Oct 2021 |
| Utility: Control based on probability density function of parameter Filling date: 9 Sep 2025 Issue date: 12 Oct 2021 | 14 Jan 2019 | 12 Oct 2021 |
| Utility: Method and apparatus to determine a patterning process parameter Filling date: 9 Sep 2025 Issue date: 12 Oct 2021 | 2 Nov 2018 | 12 Oct 2021 |
| Utility: Method of performance testing working parameters of a fluid handling structure and a method of detecting loss of immersion liquid from a fluid handing structure in an immersion lithographic apparatus Filling date: 9 Sep 2025 Issue date: 12 Oct 2021 | 9 Mar 2018 | 12 Oct 2021 |
| Utility: Lithographic apparatus comprising an object with an upper layer having improved resistance to peeling off Filling date: 9 Sep 2025 Issue date: 12 Oct 2021 | 27 Nov 2017 | 12 Oct 2021 |
| Utility: Fluid handling structure, lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 12 Oct 2021 | 29 Jun 2016 | 12 Oct 2021 |
| Utility: Systems and methods for thermally conditioning a wafer in a charged particle beam apparatus Filling date: 9 Sep 2025 Issue date: 5 Oct 2021 | 5 Nov 2019 | 5 Oct 2021 |
| Utility: Substrate holder for use in a lithographic apparatus Filling date: 9 Sep 2025 Issue date: 5 Oct 2021 | 19 Sep 2018 | 5 Oct 2021 |
| Utility: Radiation source Filling date: 9 Sep 2025 Issue date: 5 Oct 2021 | 16 Aug 2018 | 5 Oct 2021 |
| Utility: Particle suppression systems and methods Filling date: 9 Sep 2025 Issue date: 5 Oct 2021 | 18 Jul 2018 | 5 Oct 2021 |
| Utility: Method of determining a height profile, a measurement system and a computer readable medium Filling date: 9 Sep 2025 Issue date: 5 Oct 2021 | 8 Sep 2017 | 5 Oct 2021 |
| Utility: Method and system for fabricating unique chips using a charged particle multi-beamlet lithography system Filling date: 9 Sep 2025 Issue date: 5 Oct 2021 | 8 Sep 2017 | 5 Oct 2021 |
| Utility: Positioning device, stiffness reduction device and electron beam apparatus Filling date: 9 Sep 2025 Issue date: 28 Sep 2021 | 20 Dec 2019 | 28 Sep 2021 |
| Utility: Method of measuring variation, inspection system, computer program, and computer system Filling date: 9 Sep 2025 Issue date: 28 Sep 2021 | 7 Feb 2018 | 28 Sep 2021 |
| Utility: Method for determining corrections to features of a mask Filling date: 9 Sep 2025 Issue date: 21 Sep 2021 | 14 Apr 2020 | 21 Sep 2021 |
| Utility: Model for calculating a stochastic variation in an arbitrary pattern Filling date: 9 Sep 2025 Issue date: 21 Sep 2021 | 24 Jan 2020 | 21 Sep 2021 |
| Utility: Method for scanning a sample by a charged particle beam system Filling date: 9 Sep 2025 Issue date: 21 Sep 2021 | 30 Dec 2019 | 21 Sep 2021 |
| Utility: Optical system, metrology apparatus and associated method Filling date: 9 Sep 2025 Issue date: 21 Sep 2021 | 10 Sep 2019 | 21 Sep 2021 |
| Utility: Metrology apparatus and method for determining a characteristic of one or more structures on a substrate Filling date: 9 Sep 2025 Issue date: 21 Sep 2021 | 31 Jul 2019 | 21 Sep 2021 |
| Utility: Measurement apparatus and method for predicting aberrations in a projection system Filling date: 9 Sep 2025 Issue date: 21 Sep 2021 | 28 Jan 2019 | 21 Sep 2021 |
| Utility: Apparatus for and a method of removing contaminant particles from a component of an apparatus Filling date: 9 Sep 2025 Issue date: 21 Sep 2021 | 27 Dec 2018 | 21 Sep 2021 |
| Utility: Patterning device, a method of making the same, and a patterning device design method Filling date: 9 Sep 2025 Issue date: 21 Sep 2021 | 20 Feb 2018 | 21 Sep 2021 |
| Utility: System for dynamically compensating position errors of a sample Filling date: 9 Sep 2025 Issue date: 21 Sep 2021 | 26 Aug 2017 | 21 Sep 2021 |
| Utility: Focus and overlay improvement by modifying a patterning device Filling date: 9 Sep 2025 Issue date: 21 Sep 2021 | 17 May 2017 | 21 Sep 2021 |
| Utility: Methods for determining an approximate value of a processing parameter at which a characteristic of the patterning process has a target value Filling date: 9 Sep 2025 Issue date: 21 Sep 2021 | 7 Oct 2016 | 21 Sep 2021 |
| Utility: Yield estimation and control Filling date: 9 Sep 2025 Issue date: 14 Sep 2021 | 17 Apr 2020 | 14 Sep 2021 |
| Utility: Method of determining a characteristic of a structure, and metrology apparatus Filling date: 9 Sep 2025 Issue date: 14 Sep 2021 | 5 Apr 2019 | 14 Sep 2021 |
| Utility: Method of metrology and associated apparatuses Filling date: 9 Sep 2025 Issue date: 7 Sep 2021 | 22 Mar 2019 | 7 Sep 2021 |
| Utility: Motor, dual stroke stage and lithographic apparatus Filling date: 9 Sep 2025 Issue date: 7 Sep 2021 | 5 Sep 2018 | 7 Sep 2021 |
