| Utility: Profile aware source-mask optimization Filling date: 9 Sep 2025 Issue date: 6 Jul 2021 | 11 Sep 2014 | 6 Jul 2021 |
| Utility: Online calibration for repetition rate dependent performance variables Filling date: 9 Sep 2025 Issue date: 29 Jun 2021 | 24 Jun 2020 | 29 Jun 2021 |
| Utility: Component for use in a patterning device environment Filling date: 9 Sep 2025 Issue date: 29 Jun 2021 | 16 Sep 2019 | 29 Jun 2021 |
| Utility: Systems and methods for charged particle beam modulation Filling date: 9 Sep 2025 Issue date: 29 Jun 2021 | 3 Sep 2019 | 29 Jun 2021 |
| Utility: Lithographic apparatus with improved patterning performance Filling date: 9 Sep 2025 Issue date: 29 Jun 2021 | 22 Nov 2018 | 29 Jun 2021 |
| Utility: Fast freeform source and mask co-optimization method Filling date: 9 Sep 2025 Issue date: 22 Jun 2021 | 17 Mar 2020 | 22 Jun 2021 |
| Utility: Apparatus of plural charged-particle beams Filling date: 9 Sep 2025 Issue date: 22 Jun 2021 | 24 Feb 2020 | 22 Jun 2021 |
| Utility: Local alignment point calibration method in die inspection Filling date: 9 Sep 2025 Issue date: 22 Jun 2021 | 2 Dec 2019 | 22 Jun 2021 |
| Utility: Measurement apparatus and method of measuring a target Filling date: 9 Sep 2025 Issue date: 22 Jun 2021 | 13 May 2019 | 22 Jun 2021 |
| Utility: Alignment measurement system Filling date: 9 Sep 2025 Issue date: 22 Jun 2021 | 15 May 2018 | 22 Jun 2021 |
| Utility: Methods and apparatus for calculating electromagnetic scattering properties of a structure and for reconstruction of approximate structures Filling date: 9 Sep 2025 Issue date: 22 Jun 2021 | 12 Dec 2017 | 22 Jun 2021 |
| Utility: Patterning device cooling system and method of thermally conditioning a patterning device Filling date: 9 Sep 2025 Issue date: 15 Jun 2021 | 2 Dec 2019 | 15 Jun 2021 |
| Utility: Lithographic method and apparatus Filling date: 9 Sep 2025 Issue date: 15 Jun 2021 | 3 Dec 2018 | 15 Jun 2021 |
| Utility: Membrane assembly Filling date: 9 Sep 2025 Issue date: 15 Jun 2021 | 2 Dec 2016 | 15 Jun 2021 |
| Utility: Method and apparatus to reduce effects of nonlinear behavior Filling date: 9 Sep 2025 Issue date: 15 Jun 2021 | 26 Sep 2016 | 15 Jun 2021 |
| Utility: Scanning efficiency by individual beam steering of multi-beam apparatus Filling date: 9 Sep 2025 Issue date: 8 Jun 2021 | 27 Dec 2019 | 8 Jun 2021 |
| Utility: Mask assembly and associated methods Filling date: 9 Sep 2025 Issue date: 8 Jun 2021 | 9 Dec 2019 | 8 Jun 2021 |
| Utility: Optimization based on machine learning Filling date: 9 Sep 2025 Issue date: 8 Jun 2021 | 31 Jul 2019 | 8 Jun 2021 |
| Utility: Lithographic method Filling date: 9 Sep 2025 Issue date: 8 Jun 2021 | 4 Sep 2018 | 8 Jun 2021 |
| Utility: Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness Filling date: 9 Sep 2025 Issue date: 8 Jun 2021 | 15 Feb 2018 | 8 Jun 2021 |
| Utility: Simulation-assisted alignment between metrology image and design Filling date: 9 Sep 2025 Issue date: 8 Jun 2021 | 6 Dec 2017 | 8 Jun 2021 |
| Utility: Optimization of a lithography apparatus or patterning process based on selected aberration Filling date: 9 Sep 2025 Issue date: 8 Jun 2021 | 30 Aug 2017 | 8 Jun 2021 |
| Utility: Fluid handling structure for lithographic apparatus Filling date: 9 Sep 2025 Issue date: 8 Jun 2021 | 28 Aug 2017 | 8 Jun 2021 |
| Utility: Level sensor apparatus, method of measuring topographical variation across a substrate, method of measuring variation of a physical parameter related to a lithographic process, and lithographic apparatus Filling date: 9 Sep 2025 Issue date: 8 Jun 2021 | 22 Jun 2017 | 8 Jun 2021 |
| Utility: Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method Filling date: 9 Sep 2025 Issue date: 1 Jun 2021 | 16 Jul 2020 | 1 Jun 2021 |
| Utility: Method of measuring a focus parameter relating to a structure formed using a lithographic process Filling date: 9 Sep 2025 Issue date: 1 Jun 2021 | 25 Nov 2019 | 1 Jun 2021 |
| Utility: Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method Filling date: 9 Sep 2025 Issue date: 1 Jun 2021 | 30 Oct 2019 | 1 Jun 2021 |
| Utility: Rule-based deployment of assist features Filling date: 9 Sep 2025 Issue date: 1 Jun 2021 | 13 Jun 2019 | 1 Jun 2021 |
| Utility: Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets Filling date: 9 Sep 2025 Issue date: 1 Jun 2021 | 19 Nov 2018 | 1 Jun 2021 |
| Utility: Positioning device, magnetic support system and lithographic apparatus Filling date: 9 Sep 2025 Issue date: 1 Jun 2021 | 24 Sep 2018 | 1 Jun 2021 |
| Utility: Lithographic apparatus adjustment method Filling date: 9 Sep 2025 Issue date: 1 Jun 2021 | 14 Aug 2018 | 1 Jun 2021 |
| Utility: Sensor, lithographic apparatus, and device manufacturing method Filling date: 9 Sep 2025 Issue date: 1 Jun 2021 | 14 May 2018 | 1 Jun 2021 |
| Utility: Mark position determination method Filling date: 9 Sep 2025 Issue date: 1 Jun 2021 | 22 Feb 2017 | 1 Jun 2021 |
| Utility: Lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 25 May 2021 | 15 Jun 2020 | 25 May 2021 |
| Utility: Method for controlling a manufacturing apparatus and associated apparatuses Filling date: 9 Sep 2025 Issue date: 25 May 2021 | 10 Dec 2018 | 25 May 2021 |
| Utility: Substrates and methods of using those substrates Filling date: 9 Sep 2025 Issue date: 25 May 2021 | 1 May 2018 | 25 May 2021 |
| Utility: Methods of determining scattering of radiation by structures of finite thicknesses on a patterning device Filling date: 9 Sep 2025 Issue date: 25 May 2021 | 6 Dec 2017 | 25 May 2021 |
| Utility: Source separation from metrology data Filling date: 9 Sep 2025 Issue date: 25 May 2021 | 22 Nov 2016 | 25 May 2021 |
| Utility: System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector Filling date: 9 Sep 2025 Issue date: 18 May 2021 | 7 Oct 2019 | 18 May 2021 |
| Utility: Mask assembly Filling date: 9 Sep 2025 Issue date: 18 May 2021 | 30 Sep 2019 | 18 May 2021 |
| Utility: Metrology method, apparatus, and computer program to determine a representative sensitivity coefficient Filling date: 9 Sep 2025 Issue date: 18 May 2021 | 21 May 2019 | 18 May 2021 |
| Utility: Metrology apparatus and method for determining a characteristic of one or more structures on a substrate Filling date: 9 Sep 2025 Issue date: 18 May 2021 | 15 Feb 2019 | 18 May 2021 |
| Utility: Measurement system, lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 18 May 2021 | 26 Jan 2017 | 18 May 2021 |
| Utility: Lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 11 May 2021 | 18 Dec 2019 | 11 May 2021 |
| Utility: Secure chips with serial numbers Filling date: 9 Sep 2025 Issue date: 11 May 2021 | 26 Nov 2019 | 11 May 2021 |
| Utility: Process variability aware adaptive inspection and metrology Filling date: 9 Sep 2025 Issue date: 11 May 2021 | 26 Nov 2019 | 11 May 2021 |
| Utility: Pellicle attachment apparatus Filling date: 9 Sep 2025 Issue date: 11 May 2021 | 18 Nov 2019 | 11 May 2021 |
| Utility: Method and apparatus for design of a metrology target Filling date: 9 Sep 2025 Issue date: 11 May 2021 | 4 Oct 2019 | 11 May 2021 |
| Utility: Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder Filling date: 9 Sep 2025 Issue date: 11 May 2021 | 5 Apr 2019 | 11 May 2021 |
| Utility: Positioning system and lithographic apparatus Filling date: 9 Sep 2025 Issue date: 11 May 2021 | 31 Aug 2017 | 11 May 2021 |
