Lam Research
Utility Patent Applications
Last updated:
List of all Lam Research patents 402 in total
| Status | Patent |
|---|---|
Application | Utility: ELIMINATING YIELD IMPACT OF STOCHASTICS IN LITHOGRAPHY Filling date: 8 Sep 2025 Issue date: 21 Apr 2022 |
Application | Utility: AUTOMATED PROCESS MODULE RING POSITIONING AND REPLACEMENT Filling date: 8 Sep 2025 Issue date: 21 Apr 2022 |
Application | Utility: SELECTIVE ETCH USING A SACRIFICIAL MASK Filling date: 8 Sep 2025 Issue date: 21 Apr 2022 |
Application | Utility: MATCHLESS PLASMA SOURCE FOR SEMICONDUCTOR WAFER FABRICATION Filling date: 8 Sep 2025 Issue date: 14 Apr 2022 |
Application | Utility: CONFORMAL DAMAGE-FREE ENCAPSULATION OF CHALCOGENIDE MATERIALS Filling date: 8 Sep 2025 Issue date: 14 Apr 2022 |
Application | Utility: LAMINATED AEROSOL DEPOSITION COATING FOR ALUMINUM COMPONENTS FOR PLASMA PROCESSING CHAMBERS Filling date: 8 Sep 2025 Issue date: 14 Apr 2022 |
Application | Utility: CARRIER RING DESIGNS FOR CONTROLLING DEPOSITION ON WAFER BEVEL/EDGE Filling date: 8 Sep 2025 Issue date: 7 Apr 2022 |
Application | Utility: SHOWERHEAD SHROUD Filling date: 8 Sep 2025 Issue date: 7 Apr 2022 |
Application | Utility: DIFFERENTIAL-PRESSURE-BASED FLOW METERS Filling date: 8 Sep 2025 Issue date: 7 Apr 2022 |
Application | Utility: SYSTEMS AND METHODS FOR FILTERING RADIO FREQUENCIES FROM A SIGNAL OF A THERMOCOUPLE AND CONTROLLING A TEMPERATURE OF AN ELECTRODE IN A PLASMA CHAMBER Filling date: 8 Sep 2025 Issue date: 17 Mar 2022 |
Application | Utility: RESISTIVE RANDOM ACCESS MEMORY WITH PREFORMED FILAMENTS Filling date: 8 Sep 2025 Issue date: 3 Mar 2022 |
Application | Utility: LONG-LIFE EXTENDED TEMPERATURE RANGE EMBEDDED DIODE DESIGN FOR ELECTROSTATIC CHUCK WITH MULTIPLEXED HEATERS ARRAY Filling date: 8 Sep 2025 Issue date: 3 Mar 2022 |
Application | Utility: GAPFILL OF VARIABLE ASPECT RATIO FEATURES WITH A COMPOSITE PEALD AND PECVD METHOD Filling date: 8 Sep 2025 Issue date: 24 Feb 2022 |
Application | Utility: CONTROL OF WAFER BOW IN MULTIPLE STATIONS Filling date: 8 Sep 2025 Issue date: 17 Feb 2022 |
Application | Utility: UNDERLAYER FOR PHOTORESIST ADHESION AND DOSE REDUCTION Filling date: 8 Sep 2025 Issue date: 10 Feb 2022 |
Application | Utility: RF TUNING SYSTEMS INCLUDING TUNING CIRCUITS HAVING IMPEDANCES FOR SETTING AND ADJUSTING PARAMETERS OF ELECTRODES IN ELECTROSTATIC CHUCKS Filling date: 8 Sep 2025 Issue date: 10 Feb 2022 |
Application | Utility: MAGNETIC SHIELDING FOR PLASMA SOURCES Filling date: 8 Sep 2025 Issue date: 10 Feb 2022 |
Application | Utility: INTEGRATED TOOL LIFT Filling date: 8 Sep 2025 Issue date: 10 Feb 2022 |
Application | Utility: DYNAMIC PRECURSOR DOSING FOR ATOMIC LAYER DEPOSITION Filling date: 8 Sep 2025 Issue date: 3 Feb 2022 |
Application | Utility: PROGRESSIVE HEATING OF COMPONENTS OF SUBSTRATE PROCESSING SYSTEMS USING TCR ELEMENT-BASED HEATERS Filling date: 8 Sep 2025 Issue date: 3 Feb 2022 |
Application | Utility: UNDERLAYER FOR PHOTORESIST ADHESION AND DOSE REDUCTION Filling date: 8 Sep 2025 Issue date: 3 Feb 2022 |
Application | Utility: ANOMALOUS PLASMA EVENT DETECTION AND MITIGATION IN SEMICONDUCTOR PROCESSING Filling date: 8 Sep 2025 Issue date: 3 Feb 2022 |
Application | Utility: REMOVING METAL CONTAMINATION FROM SURFACES OF A PROCESSING CHAMBER Filling date: 8 Sep 2025 Issue date: 3 Feb 2022 |
Application | Utility: LOW-K ALD GAP-FILL METHODS AND MATERIAL Filling date: 8 Sep 2025 Issue date: 3 Feb 2022 |
Application | Utility: ENHANCED AUTOMATIC WAFER CENTERING SYSTEM AND TECHNIQUES FOR SAME Filling date: 8 Sep 2025 Issue date: 27 Jan 2022 |
Application | Utility: PLASMA PROCESSING CHAMBER Filling date: 8 Sep 2025 Issue date: 6 Jan 2022 |
Application | Utility: MECHANICAL INDEXER FOR MULTI-STATION PROCESS MODULE Filling date: 8 Sep 2025 Issue date: 14 Oct 2021 |
Application | Utility: NITRIDE FILMS WITH IMPROVED ETCH SELECTIVITY FOR 3D NAND INTEGRATION Filling date: 8 Sep 2025 Issue date: 14 Oct 2021 |
Application | Utility: SYSTEMS AND METHODS FOR OPTIMIZING POWER DELIVERY TO AN ELECTRODE OF A PLASMA CHAMBER Filling date: 8 Sep 2025 Issue date: 14 Oct 2021 |
Application | Utility: Components and Processes for Managing Plasma Process Byproduct Materials Filling date: 8 Sep 2025 Issue date: 22 Jul 2021 |
Application | Utility: METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY Filling date: 8 Sep 2025 Issue date: 15 Jul 2021 |
Application | Utility: Showerhead Faceplate Having Flow Apertures Configured for Hollow Cathode Discharge Suppression Filling date: 8 Sep 2025 Issue date: 8 Jul 2021 |
Application | Utility: CONDITIONING CHAMBER COMPONENT Filling date: 8 Sep 2025 Issue date: 8 Jul 2021 |
Application | Utility: DIRECT FREQUENCY TUNING FOR MATCHLESS PLASMA SOURCE IN SUBSTRATE PROCESSING SYSTEMS Filling date: 8 Sep 2025 Issue date: 8 Jul 2021 |
Application | Utility: METHOD OF IMPROVING DEPOSITION INDUCED CD IMBALANCE USING SPATIALLY SELECTIVE ASHING OF CARBON BASED FILM Filling date: 8 Sep 2025 Issue date: 1 Jul 2021 |
Application | Utility: MODULAR RECIPE CONTROLLED CALIBRATION (MRCC) APPARATUS USED TO BALANCE PLASMA IN MULTIPLE STATION SYSTEM Filling date: 8 Sep 2025 Issue date: 1 Jul 2021 |
Application | Utility: Methods and Systems for Advanced Ion Control for Etching Processes Filling date: 8 Sep 2025 Issue date: 24 Jun 2021 |
Application | Utility: ALTERNATIVE INTEGRATION FOR REDISTRIBUTION LAYER PROCESS Filling date: 8 Sep 2025 Issue date: 24 Jun 2021 |
Application | Utility: DETECTING WAFER STATUS IN A WAFER CHUCK ASSEMBLY Filling date: 8 Sep 2025 Issue date: 17 Jun 2021 |
Application | Utility: EDGE RING ARRANGEMENT WITH MOVEABLE EDGE RINGS Filling date: 8 Sep 2025 Issue date: 17 Jun 2021 |
Application | Utility: GAS MIXER Filling date: 8 Sep 2025 Issue date: 17 Jun 2021 |
Application | Utility: COMPACT HIGH DENSITY PLASMA SOURCE Filling date: 8 Sep 2025 Issue date: 17 Jun 2021 |
Application | Utility: ELECTROSTATICALLY CLAMPED EDGE RING Filling date: 8 Sep 2025 Issue date: 3 Jun 2021 |
Application | Utility: SUBSTRATE SUPPORT WITH IMPROVED PROCESS UNIFORMITY Filling date: 8 Sep 2025 Issue date: 3 Jun 2021 |
Application | Utility: ZINCATING AND DOPING OF METAL LINER FOR LINER PASSIVATION AND ADHESION IMPROVEMENT Filling date: 8 Sep 2025 Issue date: 3 Jun 2021 |
Application | Utility: OXIDATION RESISTANT PROTECTIVE LAYER IN CHAMBER CONDITIONING Filling date: 8 Sep 2025 Issue date: 3 Jun 2021 |
Application | Utility: RESIST AND ETCH MODELING Filling date: 8 Sep 2025 Issue date: 27 May 2021 |
Application | Utility: COPPER ELECTROFILL ON NON-COPPER LINER LAYERS Filling date: 8 Sep 2025 Issue date: 27 May 2021 |
Application | Utility: TUNABLE UPPER PLASMA-EXCLUSION-ZONE RING FOR A BEVEL ETCHER Filling date: 8 Sep 2025 Issue date: 20 May 2021 |
Application | Utility: Method and Apparatus for Anisotropic Pattern Etching and Treatment Filling date: 8 Sep 2025 Issue date: 20 May 2021 |
Showing 50 to 100 of 402 patents.