Lam Research
Utility Patent Applications
Last updated:
List of all Lam Research patents 402 in total
| Status | Patent |
|---|---|
Application | Utility: COPPER ELECTRODEPOSITION SEQUENCE FOR THE FILLING OF COBALT LINED FEATURES Filling date: 8 Sep 2025 Issue date: 20 May 2021 |
Application | Utility: APPARATUS WITH OPTICAL CAVITY FOR DETERMINING PROCESS RATE Filling date: 8 Sep 2025 Issue date: 13 May 2021 |
Application | Utility: DEPOSITION OF PURE METAL FILMS Filling date: 8 Sep 2025 Issue date: 13 May 2021 |
Application | Utility: ATOMIC LAYER ETCH AND DEPOSITION PROCESSING SYSTEMS INCLUDING A LENS CIRCUIT WITH A TELE-CENTRIC LENS, AN OPTICAL BEAM FOLDING ASSEMBLY, OR A POLYGON SCANNER Filling date: 8 Sep 2025 Issue date: 13 May 2021 |
Application | Utility: DETERMINING AND CONTROLLING SUBSTRATE TEMPERATURE DURING SUBSTRATE PROCESSING Filling date: 8 Sep 2025 Issue date: 13 May 2021 |
Application | Utility: MEMS CORIOLIS GAS FLOW CONTROLLER Filling date: 8 Sep 2025 Issue date: 13 May 2021 |
Application | Utility: CONTROLLING PLATING ELECTROLYTE CONCENTRATION ON AN ELECTROCHEMICAL PLATING APPARATUS Filling date: 8 Sep 2025 Issue date: 6 May 2021 |
Application | Utility: ROTATIONAL INDEXER WITH ADDITIONAL ROTATIONAL AXES Filling date: 8 Sep 2025 Issue date: 22 Apr 2021 |
Application | Utility: Methods for Depositing a Film on a Backside of a Substrate Filling date: 8 Sep 2025 Issue date: 15 Apr 2021 |
Application | Utility: PLASMA ETCHING DEVICE WITH PLASMA ETCH RESISTANT COATING Filling date: 8 Sep 2025 Issue date: 15 Apr 2021 |
Application | Utility: THERMAL ATOMIC LAYER ETCH WITH RAPID TEMPERATURE CYCLING Filling date: 8 Sep 2025 Issue date: 8 Apr 2021 |
Application | Utility: MEMS-BASED CORIOLIS MASS FLOW CONTROLLER Filling date: 8 Sep 2025 Issue date: 1 Apr 2021 |
Application | Utility: CAPACITANCE MEASUREMENT WITHOUT DISCONNECTING FROM HIGH POWER CIRCUIT Filling date: 8 Sep 2025 Issue date: 1 Apr 2021 |
Application | Utility: SELECTIVE PROCESSING WITH ETCH RESIDUE-BASED INHIBITORS Filling date: 8 Sep 2025 Issue date: 1 Apr 2021 |
Application | Utility: CARRIER PLATE FOR USE IN PLASMA PROCESSING SYSTEMS Filling date: 8 Sep 2025 Issue date: 25 Mar 2021 |
Application | Utility: RF CURRENT MEASUREMENT IN SEMICONDUCTOR PROCESSING TOOL Filling date: 8 Sep 2025 Issue date: 25 Mar 2021 |
Application | Utility: DUAL-MODE AUTONOMOUS GUIDED VEHICLE Filling date: 8 Sep 2025 Issue date: 18 Mar 2021 |
Application | Utility: METHOD TO CLEAN SNO2 FILM FROM CHAMBER Filling date: 8 Sep 2025 Issue date: 25 Feb 2021 |
Application | Utility: CONNECTOR FOR SUBSTRATE SUPPORT WITH EMBEDDED TEMPERATURE SENSORS Filling date: 8 Sep 2025 Issue date: 18 Feb 2021 |
Application | Utility: SYSTEMS FOR COOLING RF HEATED CHAMBER COMPONENTS Filling date: 8 Sep 2025 Issue date: 18 Feb 2021 |
Application | Utility: ELECTROSTATIC CHUCK (ESC) PEDESTAL VOLTAGE ISOLATION Filling date: 8 Sep 2025 Issue date: 11 Feb 2021 |
Application | Utility: MANIFOLD VALVE FOR MULTIPLE PRECURSORS Filling date: 8 Sep 2025 Issue date: 11 Feb 2021 |
Application | Utility: OPTICAL METROLOGY IN MACHINE LEARNING TO CHARACTERIZE FEATURES Filling date: 8 Sep 2025 Issue date: 4 Feb 2021 |
Application | Utility: AMORPHOUS CARBON LAYER OPENING PROCESS Filling date: 8 Sep 2025 Issue date: 4 Feb 2021 |
Application | Utility: MODIFYING FERROELECTRIC PROPERTIES OF HAFNIUM OXIDE WITH HAFNIUM NITRIDE LAYERS Filling date: 8 Sep 2025 Issue date: 28 Jan 2021 |
Application | Utility: IN SITU INVERSE MASK PATTERNING Filling date: 8 Sep 2025 Issue date: 21 Jan 2021 |
Application | Utility: CAPPING LAYER FOR A HAFNIUM OXIDE-BASED FERROELECTRIC MATERIAL Filling date: 8 Sep 2025 Issue date: 21 Jan 2021 |
Application | Utility: CHAMFER-LESS VIA INTEGRATION SCHEME Filling date: 8 Sep 2025 Issue date: 21 Jan 2021 |
Application | Utility: METHODS FOR MAKING EUV PATTERNABLE HARD MASKS Filling date: 8 Sep 2025 Issue date: 14 Jan 2021 |
Application | Utility: ELECTROSTATIC CHUCK WITH SEAL SURFACE Filling date: 8 Sep 2025 Issue date: 14 Jan 2021 |
Application | Utility: WAFER TRANSPORT ASSEMBLY WITH INTEGRATED BUFFERS Filling date: 8 Sep 2025 Issue date: 7 Jan 2021 |
Application | Utility: ATOMIC LAYER ETCHING AND SMOOTHING OF REFRACTORY METALS AND OTHER HIGH SURFACE BINDING ENERGY MATERIALS Filling date: 8 Sep 2025 Issue date: 7 Jan 2021 |
Application | Utility: PLASMA ETCHING CHEMISTRIES OF HIGH ASPECT RATIO FEATURES IN DIELECTRICS Filling date: 8 Sep 2025 Issue date: 7 Jan 2021 |
Application | Utility: SELECTIVE DEPOSITION USING HYDROLYSIS Filling date: 8 Sep 2025 Issue date: 7 Jan 2021 |
Application | Utility: ELECTROSTATIC CHUCKS WITH COOLANT GAS ZONES AND CORRESPONDING GROOVE AND MONOPOLAR ELECTROSTATIC CLAMPING ELECTRODE PATTERNS Filling date: 8 Sep 2025 Issue date: 7 Jan 2021 |
Application | Utility: METHOD AND APPARATUS FOR PROVIDING STATION TO STATION UNIFORMITY Filling date: 8 Sep 2025 Issue date: 31 Dec 2020 |
Application | Utility: WAFER CHUCK ASSEMBLY Filling date: 8 Sep 2025 Issue date: 31 Dec 2020 |
Application | Utility: SUBSTRATE PROCESSING SYSTEM INCLUDING COIL WITH RF POWERED FARADAY SHIELD Filling date: 8 Sep 2025 Issue date: 31 Dec 2020 |
Application | Utility: SYSTEMS AND METHODS FOR FLOW MONITORING IN A PRECURSOR VAPOR SUPPLY SYSTEM OF A SUBSTRATE PROCESSING SYSTEM Filling date: 8 Sep 2025 Issue date: 31 Dec 2020 |
Application | Utility: High Speed Synchronization Of Plasma Source/Bias Power Delivery Filling date: 8 Sep 2025 Issue date: 31 Dec 2020 |
Application | Utility: SYSTEMS AND METHODS FOR HOMOGENOUS INTERMIXING OF PRECURSORS IN ALLOY ATOMIC LAYER DEPOSITION Filling date: 8 Sep 2025 Issue date: 31 Dec 2020 |
Application | Utility: ELIMINATING YIELD IMPACT OF STOCHASTICS IN LITHOGRAPHY Filling date: 8 Sep 2025 Issue date: 24 Dec 2020 |
Application | Utility: HIGH ENERGY ATOMIC LAYER ETCHING Filling date: 8 Sep 2025 Issue date: 24 Dec 2020 |
Application | Utility: SELF-LIMITING GROWTH Filling date: 8 Sep 2025 Issue date: 24 Dec 2020 |
Application | Utility: REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES Filling date: 8 Sep 2025 Issue date: 17 Dec 2020 |
Application | Utility: MOVING SUBSTRATE TRANSFER CHAMBER Filling date: 8 Sep 2025 Issue date: 3 Dec 2020 |
Application | Utility: SYSTEM AND METHOD FOR EDGE RING WEAR COMPENSATION Filling date: 8 Sep 2025 Issue date: 26 Nov 2020 |
Application | Utility: METAL LINER PASSIVATION AND ADHESION ENHANCEMENT BY ZINC DOPING Filling date: 8 Sep 2025 Issue date: 19 Nov 2020 |
Application | Utility: LOW RESISTIVITY FILMS CONTAINING MOLYBDENUM Filling date: 8 Sep 2025 Issue date: 19 Nov 2020 |
Application | Utility: Ring Structures and Systems for Use in a Plasma Chamber Filling date: 8 Sep 2025 Issue date: 19 Nov 2020 |
Showing 100 to 150 of 402 patents.