ASML Holding N.V.
Patents, Design & Utilities
Last updated:
List of all ASML Holding N.V. patents 666 in total
| Status | Patent |
|---|---|
Grant | Utility: Online calibration for repetition rate dependent performance variables Filling date: 9 Sep 2025 Issue date: 28 Jul 2020 |
Grant | Utility: Method and apparatus for reticle optimization Filling date: 9 Sep 2025 Issue date: 28 Jul 2020 |
Grant | Utility: Metrology method, target and substrate Filling date: 9 Sep 2025 Issue date: 21 Jul 2020 |
Grant | Utility: Substrate holder and a method of manufacturing a substrate holder Filling date: 9 Sep 2025 Issue date: 21 Jul 2020 |
Grant | Utility: Method and apparatus to correct for patterning process error Filling date: 9 Sep 2025 Issue date: 21 Jul 2020 |
Grant | Utility: Etch variation tolerant optimization Filling date: 9 Sep 2025 Issue date: 14 Jul 2020 |
Grant | Utility: Immersion liquid, exposure apparatus, and exposure process Filling date: 9 Sep 2025 Issue date: 14 Jul 2020 |
Grant | Utility: Method of determining a property of a structure, inspection apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 14 Jul 2020 |
Grant | Utility: Method of predicting patterning defects caused by overlay error Filling date: 9 Sep 2025 Issue date: 14 Jul 2020 |
Grant | Utility: Secure chips with serial numbers Filling date: 9 Sep 2025 Issue date: 14 Jul 2020 |
Grant | Utility: Method and apparatus for direct write maskless lithography Filling date: 9 Sep 2025 Issue date: 14 Jul 2020 |
Grant | Utility: Method for manufacturing a membrane assembly Filling date: 9 Sep 2025 Issue date: 14 Jul 2020 |
Grant | Utility: Method for manufacturing a membrane assembly Filling date: 9 Sep 2025 Issue date: 14 Jul 2020 |
Grant | Utility: Imprint lithography apparatus and method Filling date: 9 Sep 2025 Issue date: 14 Jul 2020 |
Grant | Utility: Lithographic method Filling date: 9 Sep 2025 Issue date: 7 Jul 2020 |
Grant | Utility: Lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 7 Jul 2020 |
Grant | Utility: Metrology method and apparatus, computer program and lithographic system Filling date: 9 Sep 2025 Issue date: 7 Jul 2020 |
Grant | Utility: Method of measuring a parameter of interest, inspection apparatus, lithographic system and device manufacturing method Filling date: 9 Sep 2025 Issue date: 7 Jul 2020 |
Grant | Utility: Lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 7 Jul 2020 |
Grant | Utility: Extraction body for lithographic apparatus Filling date: 9 Sep 2025 Issue date: 7 Jul 2020 |
Grant | Utility: Metrology method, computer product and system Filling date: 9 Sep 2025 Issue date: 30 Jun 2020 |
Grant | Utility: Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane Filling date: 9 Sep 2025 Issue date: 30 Jun 2020 |
Grant | Utility: Measurement method, inspection apparatus, patterning device, lithographic system and device manufacturing method Filling date: 9 Sep 2025 Issue date: 23 Jun 2020 |
Grant | Utility: Method and apparatus to determine a patterning process parameter Filling date: 9 Sep 2025 Issue date: 23 Jun 2020 |
Grant | Utility: Substrate measurement recipe configuration to improve device matching Filling date: 9 Sep 2025 Issue date: 23 Jun 2020 |
Grant | Utility: Radiation source Filling date: 9 Sep 2025 Issue date: 23 Jun 2020 |
Grant | Utility: Method and apparatus to correct for patterning process error Filling date: 9 Sep 2025 Issue date: 23 Jun 2020 |
Grant | Utility: Optical element and optical system for EUV lithography, and method for treating such an optical element Filling date: 9 Sep 2025 Issue date: 23 Jun 2020 |
Grant | Utility: Deflection scan speed adjustment during charged particle exposure Filling date: 9 Sep 2025 Issue date: 23 Jun 2020 |
Grant | Utility: Lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 16 Jun 2020 |
Grant | Utility: EUV exposure apparatus with reflective elements having reduced influence of temperature variation Filling date: 9 Sep 2025 Issue date: 16 Jun 2020 |
Grant | Utility: Motor assembly, lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 16 Jun 2020 |
Grant | Utility: Method for adjusting actuation of a lithographic apparatus Filling date: 9 Sep 2025 Issue date: 16 Jun 2020 |
Grant | Utility: Radiation source Filling date: 9 Sep 2025 Issue date: 16 Jun 2020 |
Grant | Utility: Lithography model for 3D features Filling date: 9 Sep 2025 Issue date: 16 Jun 2020 |
Grant | Utility: Target trajectory metrology in an extreme ultraviolet light source Filling date: 9 Sep 2025 Issue date: 9 Jun 2020 |
Grant | Utility: Apparatus for and method of source material delivery in a laser produced plasma EUV light source Filling date: 9 Sep 2025 Issue date: 9 Jun 2020 |
Grant | Utility: Lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 9 Jun 2020 |
Grant | Utility: Target trajectory metrology in an extreme ultraviolet light source Filling date: 9 Sep 2025 Issue date: 9 Jun 2020 |
Grant | Utility: Inspection method and system Filling date: 9 Sep 2025 Issue date: 9 Jun 2020 |
Grant | Utility: Substrate, metrology apparatus and associated methods for a lithographic process Filling date: 9 Sep 2025 Issue date: 9 Jun 2020 |
Grant | Utility: Radiation receiving system Filling date: 9 Sep 2025 Issue date: 9 Jun 2020 |
Grant | Utility: Projection system modelling method Filling date: 9 Sep 2025 Issue date: 9 Jun 2020 |
Grant | Utility: Suppression filter, radiation collector and radiation source for a lithographic apparatus; method of determining a separation distance between at least two reflective surface levels of a suppression filter Filling date: 9 Sep 2025 Issue date: 9 Jun 2020 |
Grant | Utility: Measurement systems, lithographic apparatus, device manufacturing method and a method of measuring Filling date: 9 Sep 2025 Issue date: 9 Jun 2020 |
Grant | Utility: Lithography system, sensor and measuring method Filling date: 9 Sep 2025 Issue date: 9 Jun 2020 |
Grant | Utility: Target expansion rate control in an extreme ultraviolet light source Filling date: 9 Sep 2025 Issue date: 2 Jun 2020 |
Grant | Utility: Metrology apparatus for and a method of determining a characteristic of interest of a structure on a substrate Filling date: 9 Sep 2025 Issue date: 2 Jun 2020 |
Grant | Utility: Adjustment of a metrology apparatus or a measurement thereby based on a characteristic of a target measured Filling date: 9 Sep 2025 Issue date: 2 Jun 2020 |
Grant | Utility: Coloring aware optimization Filling date: 9 Sep 2025 Issue date: 2 Jun 2020 |
Showing 550 to 600 of 666 patents.