Entegris
Patents, Design & Utilities

Last updated:

List of all Entegris patents 325 in total

Status Patent
Application
Utility: CHEMICAL VAPOR DEPOSITION PROCESSES USING RUTHENIUM PRECURSOR AND REDUCING GAS External link
Filling date: 6 Sep 2025 Issue date: 14 May 2020
Application
Utility: POST CMP CLEANING COMPOSITION External link
Filling date: 6 Sep 2025 Issue date: 14 May 2020
Application
Utility: MICROENVIRONMENT FOR FLEXIBLE SUBSTRATES External link
Filling date: 6 Sep 2025 Issue date: 14 May 2020
Grant
Utility: Compositions and methods for etching silicon nitride-containing substrates External link
Filling date: 6 Sep 2025 Issue date: 12 May 2020
Grant
Utility: Diaphragm valve with total valve cavity evacuation External link
Filling date: 6 Sep 2025 Issue date: 12 May 2020
Application
Utility: RETICLE SUPPORT FOR A CONTAINER External link
Filling date: 6 Sep 2025 Issue date: 7 May 2020
Application
Utility: POROUS POLYETHYLENE FILTER MEMBRANE WITH ASYMMETRIC PORE STRUCTURE, AND RELATED FILTERS AND METHODS External link
Filling date: 6 Sep 2025 Issue date: 7 May 2020
Application
Utility: MULTI PIECE FITMENT FOR A FLUID CONTAINER External link
Filling date: 6 Sep 2025 Issue date: 7 May 2020
Grant
Utility: Aminoiodosilanes and methods of synthesizing these aminoiodosilanes External link
Filling date: 6 Sep 2025 Issue date: 5 May 2020
Application
Utility: BORON-DOPED AMORPHOUS CARBON HARD MASK AND RELATED METHODS External link
Filling date: 6 Sep 2025 Issue date: 30 Apr 2020
Application
Utility: METHOD FOR FORMING MOLYBDENUM FILMS ON A SUBSTRATE External link
Filling date: 6 Sep 2025 Issue date: 30 Apr 2020
Application
Utility: METHODS FOR DEPOSITING TUNGSTEN OR MOLYBDENUM FILMS External link
Filling date: 6 Sep 2025 Issue date: 16 Apr 2020
Grant
Utility: Methods and assemblies using fluorine containing and inert gases for plasma flood gun operation External link
Filling date: 6 Sep 2025 Issue date: 14 Apr 2020
Application
Utility: ELECTROSTATIC DISSIPATIVE FLUOROPOLYMER COMPOSITES AND ARTICLES FORMED THEREFROM External link
Filling date: 6 Sep 2025 Issue date: 2 Apr 2020
Application
Utility: VALVE SYSTEM WITH POSITION INDICATOR External link
Filling date: 6 Sep 2025 Issue date: 19 Mar 2020
Application
Utility: ADSORBENT-BASED, MECHANICALLY-REGULATED GAS STORAGE AND DELIVERY VESSEL External link
Filling date: 6 Sep 2025 Issue date: 19 Mar 2020
Application
Utility: AUTOMATABLE CLOSURE External link
Filling date: 6 Sep 2025 Issue date: 19 Mar 2020
Grant
Utility: Substrate container with window retention spring External link
Filling date: 6 Sep 2025 Issue date: 17 Mar 2020
Application
Utility: ION IMPLANTATION PROCESSES AND APPARATUS USING GALLIUM External link
Filling date: 6 Sep 2025 Issue date: 12 Mar 2020
Grant
Utility: Anti-rotation device for hydraulic connectors External link
Filling date: 6 Sep 2025 Issue date: 10 Mar 2020
Application
Utility: Microporous Polyamide-Imide Membranes External link
Filling date: 6 Sep 2025 Issue date: 5 Mar 2020
Application
Utility: MEMBRANE DIFFUSER FOR A SUBSTRATE CONTAINER External link
Filling date: 6 Sep 2025 Issue date: 5 Mar 2020
Application
Utility: POST CMP CLEANING COMPOSITIONS FOR CERIA PARTICLES External link
Filling date: 6 Sep 2025 Issue date: 5 Mar 2020
Grant
Utility: Cleaning compositions for removing post etch residue External link
Filling date: 6 Sep 2025 Issue date: 3 Mar 2020
Grant
Utility: High torque polymer fittings External link
Filling date: 6 Sep 2025 Issue date: 25 Feb 2020
Grant
Utility: Substrate container with enhanced containment External link
Filling date: 6 Sep 2025 Issue date: 18 Feb 2020
Application
Utility: CARBON MATERIALS FOR CARBON IMPLANTATION External link
Filling date: 6 Sep 2025 Issue date: 13 Feb 2020
Grant
Utility: Post chemical mechanical polishing formulations and method of use External link
Filling date: 6 Sep 2025 Issue date: 11 Feb 2020
Grant
Utility: Refillable ampoule with purge capability External link
Filling date: 6 Sep 2025 Issue date: 4 Feb 2020
Grant
Utility: Disposable liquid chemical sensor system External link
Filling date: 6 Sep 2025 Issue date: 28 Jan 2020
Application
Utility: CLEANING COMPOSITION WITH CORROSION INHIBITOR External link
Filling date: 6 Sep 2025 Issue date: 23 Jan 2020
Grant
Utility: Microporous polyamide-imide membranes External link
Filling date: 6 Sep 2025 Issue date: 14 Jan 2020
Application
Utility: SMART PACKAGE External link
Filling date: 6 Sep 2025 Issue date: 9 Jan 2020
Application
Utility: METHOD FOR SELECTIVELY REMOVING NICKEL PLATINUM MATERIAL External link
Filling date: 6 Sep 2025 Issue date: 9 Jan 2020
Application
Utility: SELECTIVELY ETCHING MATERIALS External link
Filling date: 6 Sep 2025 Issue date: 9 Jan 2020
Grant
Utility: High-purity tungsten hexacarbonyl for solid source delivery External link
Filling date: 6 Sep 2025 Issue date: 7 Jan 2020
Grant
Utility: Smart package External link
Filling date: 6 Sep 2025 Issue date: 17 Dec 2019
Grant
Utility: Apparatus and method for pressure dispensing of high viscosity liquid-containing materials External link
Filling date: 6 Sep 2025 Issue date: 3 Dec 2019
Grant
Utility: Fluid delivery system and method External link
Filling date: 6 Sep 2025 Issue date: 3 Dec 2019
Grant
Utility: Carbon materials for carbon implantation External link
Filling date: 6 Sep 2025 Issue date: 3 Dec 2019
Grant
Utility: Ion implantation processes and apparatus External link
Filling date: 6 Sep 2025 Issue date: 3 Dec 2019
Grant
Utility: Packaging for dip tubes External link
Filling date: 6 Sep 2025 Issue date: 3 Dec 2019
Grant
Utility: Electrostatic chuck and method of making same External link
Filling date: 6 Sep 2025 Issue date: 3 Dec 2019
Grant
Utility: Apparatus and methods for filling and dispensing liquids External link
Filling date: 6 Sep 2025 Issue date: 26 Nov 2019
Application
Utility: CONDITIONER FOR CHEMICAL-MECHANICAL-PLANARIZATION PAD AND RELATED METHODS External link
Filling date: 6 Sep 2025 Issue date: 21 Nov 2019
Application
Utility: MOLDS THAT INCLUDE A CERAMIC MATERIAL SURFACE, AND RELATED METHODS FOR MAKING AND USING THE MOLDS External link
Filling date: 6 Sep 2025 Issue date: 14 Nov 2019
Grant
Utility: CMP pad conditioning assembly External link
Filling date: 6 Sep 2025 Issue date: 12 Nov 2019
Grant
Utility: Wafer support column with interlocking features External link
Filling date: 6 Sep 2025 Issue date: 12 Nov 2019
Grant
Utility: Formulations to selectively etch silicon and germanium External link
Filling date: 6 Sep 2025 Issue date: 12 Nov 2019
Grant
Utility: Compositions and methods for selectively etching titanium nitride External link
Filling date: 6 Sep 2025 Issue date: 12 Nov 2019

Showing 250 to 300 of 325 patents.