Entegris
Patents, Design & Utilities
Last updated:
List of all Entegris patents 325 in total
| Status | Patent |
|---|---|
Grant | Design: Wafer support ring Filling date: 6 Sep 2025 Issue date: 27 Apr 2021 |
Grant | Utility: Airborne molecular contamination filter cartridge system with combustible filter cartridge and reusable frame Filling date: 6 Sep 2025 Issue date: 27 Apr 2021 |
Grant | Utility: Tungsten post-CMP cleaning composition Filling date: 6 Sep 2025 Issue date: 27 Apr 2021 |
Grant | Utility: Composition and process for selectively etching p-doped polysilicon relative to silicon nitride Filling date: 6 Sep 2025 Issue date: 27 Apr 2021 |
Grant | Utility: Blended potting resins and use thereof Filling date: 6 Sep 2025 Issue date: 20 Apr 2021 |
Application | Utility: RETICLE POD WITH WINDOW Filling date: 6 Sep 2025 Issue date: 15 Apr 2021 |
Application | Utility: WET ETCHING COMPOSITION AND METHOD Filling date: 6 Sep 2025 Issue date: 15 Apr 2021 |
Application | Utility: POROUS POLYMERIC MEMBRANE AND RELATED FILTERS AND METHODS Filling date: 6 Sep 2025 Issue date: 15 Apr 2021 |
Application | Utility: TRIIODOSILYLAMINE PRECURSOR COMPOUNDS Filling date: 6 Sep 2025 Issue date: 8 Apr 2021 |
Application | Utility: MEMBRANES WITH REDUCED PARTICLE FORMATION Filling date: 6 Sep 2025 Issue date: 1 Apr 2021 |
Grant | Utility: Articles coated with fluoro-annealed films Filling date: 6 Sep 2025 Issue date: 30 Mar 2021 |
Application | Utility: PLASMA IMMERSION METHODS FOR ION IMPLANTATION Filling date: 6 Sep 2025 Issue date: 25 Mar 2021 |
Grant | Utility: Formulations to selectively etch silicon germanium relative to germanium Filling date: 6 Sep 2025 Issue date: 23 Mar 2021 |
Application | Utility: HALOALKYNYL DICOBALT HEXACARBONYL PRECURSORS FOR CHEMICAL VAPOR DEPOSITION OF COBALT Filling date: 6 Sep 2025 Issue date: 18 Mar 2021 |
Application | Utility: ELECTROSTATIC DISCHARGE MITIGATION DEVICE Filling date: 6 Sep 2025 Issue date: 11 Mar 2021 |
Application | Utility: SINTERED POROUS MATERIAL HAVING NODES AND FIBERS OF DIFFERENT MATERIALS, WITH DIFFERENT SINTERING POINTS, AND RELATED METHODS OF PREPARATION AND USE Filling date: 6 Sep 2025 Issue date: 11 Mar 2021 |
Application | Utility: GROUP VI METAL DEPOSITION PROCESS Filling date: 6 Sep 2025 Issue date: 4 Mar 2021 |
Application | Utility: RETICLE POD HAVING SIDE CONTAINMENT OF RETICLE Filling date: 6 Sep 2025 Issue date: 25 Feb 2021 |
Application | Utility: FORMULATIONS FOR HIGH SELECTIVE SILICON NITRIDE ETCH Filling date: 6 Sep 2025 Issue date: 25 Feb 2021 |
Grant | Utility: Microporous polyamide-imide membranes Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Hydrogenated isotopically enriched boront trifluoride dopant source gas composition Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Application | Utility: INTEGRATED ELECTRONIC WASTE RECYCLING AND RECOVERY SYSTEM AND PROCESS OF USING SAME Filling date: 6 Sep 2025 Issue date: 11 Feb 2021 |
Application | Utility: SYSTEM AND METHOD FOR REMOVING AIRBORNE MOLECULAR CONTAMINANTS FROM GAS STREAMS Filling date: 6 Sep 2025 Issue date: 4 Feb 2021 |
Application | Utility: GROUNDING MECHANISM FOR MULTI-LAYER FOR ELECTROSTATIC CHUCK, AND RELATED METHODS Filling date: 6 Sep 2025 Issue date: 28 Jan 2021 |
Application | Utility: WAFER CUSHION Filling date: 6 Sep 2025 Issue date: 21 Jan 2021 |
Application | Utility: POROUS SINTERED MEMBRANES AND METHODS OF PREPARING POROUS SINTERED MEMBRANES Filling date: 6 Sep 2025 Issue date: 21 Jan 2021 |
Application | Utility: ION IMPLANTATION SYSTEM WITH MIXTURE OF ARC CHAMBER MATERIALS Filling date: 6 Sep 2025 Issue date: 21 Jan 2021 |
Grant | Utility: Heat transfer to ampoule trays Filling date: 6 Sep 2025 Issue date: 19 Jan 2021 |
Grant | Utility: Silicon carbide filter membrane and methods of use Filling date: 6 Sep 2025 Issue date: 19 Jan 2021 |
Grant | Utility: Solid precursor-based delivery of fluid utilizing controlled solids morphology Filling date: 6 Sep 2025 Issue date: 19 Jan 2021 |
Grant | Utility: Wafer shipper with stacked support rings Filling date: 6 Sep 2025 Issue date: 19 Jan 2021 |
Application | Utility: POROUS CARBONACEOUS VACUUM CHAMBER LINERS Filling date: 6 Sep 2025 Issue date: 14 Jan 2021 |
Application | Utility: OXYHALIDE PRECURSORS Filling date: 6 Sep 2025 Issue date: 14 Jan 2021 |
Grant | Utility: Ion implantation processes and apparatus using gallium Filling date: 6 Sep 2025 Issue date: 12 Jan 2021 |
Application | Utility: METHODS OF USING LASER ENERGY TO REMOVE PARTICLES FROM A SURFACE Filling date: 6 Sep 2025 Issue date: 7 Jan 2021 |
Grant | Utility: Coatings for glass-shaping molds and molds comprising the same Filling date: 6 Sep 2025 Issue date: 5 Jan 2021 |
Application | Utility: HYDROPHOBIC POLYETHYLENE MEMBRANE FOR USE IN VENTING, DEGASSING, AND MEMBRANE DISTILLATION PROCESSES Filling date: 6 Sep 2025 Issue date: 31 Dec 2020 |
Grant | Utility: Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor deposition of cobalt Filling date: 6 Sep 2025 Issue date: 22 Dec 2020 |
Grant | Utility: Substrate cushion brace retainer Filling date: 6 Sep 2025 Issue date: 22 Dec 2020 |
Grant | Utility: Cyclopentadienyl titanium alkoxides with ozone activated ligands for ALD of TiO2 Filling date: 6 Sep 2025 Issue date: 22 Dec 2020 |
Application | Utility: COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE ARTICLES AND APPARATUS Filling date: 6 Sep 2025 Issue date: 3 Dec 2020 |
Application | Utility: MANIFOLD WITH MOVABLE CONNECTOLOGY Filling date: 6 Sep 2025 Issue date: 3 Dec 2020 |
Grant | Utility: Bottom opening pod with magnetically coupled casssettes Filling date: 6 Sep 2025 Issue date: 1 Dec 2020 |
Application | Utility: METHODS AND SYSTEMS FOR ADSORBING ORGANOMETALLIC VAPOR Filling date: 6 Sep 2025 Issue date: 26 Nov 2020 |
Application | Utility: METHODS AND SYSTEMS FOR REMOVING AMMONIA FROM A GAS MIXTURE Filling date: 6 Sep 2025 Issue date: 26 Nov 2020 |
Grant | Utility: Smart package Filling date: 6 Sep 2025 Issue date: 24 Nov 2020 |
Application | Utility: SUBSTRATE CONTAINER VALVE ASSEMBLIES Filling date: 6 Sep 2025 Issue date: 19 Nov 2020 |
Grant | Utility: Gas supply vessel Filling date: 6 Sep 2025 Issue date: 17 Nov 2020 |
Grant | Utility: AlON coated substrate with optional yttria overlayer Filling date: 6 Sep 2025 Issue date: 17 Nov 2020 |
Application | Utility: METHOD FOR FORMING CARBON RICH SILICON-CONTAINING FILMS Filling date: 6 Sep 2025 Issue date: 12 Nov 2020 |
Showing 150 to 200 of 325 patents.