Entegris
Patents, Design & Utilities
Last updated:
List of all Entegris patents 325 in total
| Status | Patent |
|---|---|
Grant | Utility: Gas filter Filling date: 6 Sep 2025 Issue date: 26 Oct 2021 |
Application | Utility: HARD ABRASIVE PARTICLE-FREE POLISHING OF HARD MATERIALS Filling date: 6 Sep 2025 Issue date: 21 Oct 2021 |
Application | Utility: RETICLE POD HAVING COATED SENSOR ZONES Filling date: 6 Sep 2025 Issue date: 21 Oct 2021 |
Application | Utility: ELECTROSTATIC DISCHARGE MITIGATION DEVICE Filling date: 6 Sep 2025 Issue date: 21 Oct 2021 |
Application | Utility: HYDROPHOBIC MEMBRANES AND MEMBRANE DISTILLATION METHODS Filling date: 6 Sep 2025 Issue date: 21 Oct 2021 |
Application | Utility: METHOD AND COMPOSITION FOR ETCHING MOLYBDENUM Filling date: 6 Sep 2025 Issue date: 21 Oct 2021 |
Grant | Utility: Cleaning composition with corrosion inhibitor Filling date: 6 Sep 2025 Issue date: 19 Oct 2021 |
Grant | Utility: Selectively etching materials Filling date: 6 Sep 2025 Issue date: 19 Oct 2021 |
Application | Utility: YTTRIUM FLUORIDE FILMS AND METHODS OF PREPARING AND USING YTTRIUM FLUORIDE FILMS Filling date: 6 Sep 2025 Issue date: 14 Oct 2021 |
Grant | Utility: Valve system with position indicator Filling date: 6 Sep 2025 Issue date: 12 Oct 2021 |
Grant | Utility: Ion implantation system with mixture of arc chamber materials Filling date: 6 Sep 2025 Issue date: 5 Oct 2021 |
Grant | Utility: Tamper-resistant chemical reagent package Filling date: 6 Sep 2025 Issue date: 5 Oct 2021 |
Application | Utility: PRECURSORS AND METHODS FOR PREPARING SILICON-CONTAINING FILMS Filling date: 6 Sep 2025 Issue date: 30 Sep 2021 |
Application | Utility: SILICON HYDRAZIDO PRECURSOR COMPOUNDS Filling date: 6 Sep 2025 Issue date: 30 Sep 2021 |
Application | Utility: SILICON NITRIDE ETCHING COMPOSITION AND METHOD Filling date: 6 Sep 2025 Issue date: 23 Sep 2021 |
Application | Utility: Bulk Process Gas Purification Systems and Related Methods Filling date: 6 Sep 2025 Issue date: 23 Sep 2021 |
Grant | Utility: Ceria removal compositions Filling date: 6 Sep 2025 Issue date: 21 Sep 2021 |
Grant | Utility: Post chemical mechanical polishing cleaning compositions Filling date: 6 Sep 2025 Issue date: 21 Sep 2021 |
Grant | Utility: Post CMP cleaning composition Filling date: 6 Sep 2025 Issue date: 21 Sep 2021 |
Grant | Utility: Fluidized granular absorbent bed filter Filling date: 6 Sep 2025 Issue date: 21 Sep 2021 |
Grant | Utility: Non-amine post-CMP compositions and method of use Filling date: 6 Sep 2025 Issue date: 21 Sep 2021 |
Grant | Utility: Silicon carbide/graphite composite and articles and assemblies comprising same Filling date: 6 Sep 2025 Issue date: 14 Sep 2021 |
Application | Utility: MANIFOLD FOR A SUBSTRATE CONTAINER Filling date: 6 Sep 2025 Issue date: 9 Sep 2021 |
Grant | Utility: Modular tray ampoule Filling date: 6 Sep 2025 Issue date: 31 Aug 2021 |
Grant | Utility: CVD Mo deposition by using MoOCl.sub.4 Filling date: 6 Sep 2025 Issue date: 31 Aug 2021 |
Grant | Utility: Hydrophobic polyethylene membrane for use in venting, degassing, and membrane distillation processes Filling date: 6 Sep 2025 Issue date: 31 Aug 2021 |
Application | Utility: LIGAND-MODIFIED FILTER AND METHODS FOR REDUCING METALS FROM LIQUID COMPOSITIONS Filling date: 6 Sep 2025 Issue date: 26 Aug 2021 |
Grant | Utility: Post CMP cleaning compositions for ceria particles Filling date: 6 Sep 2025 Issue date: 10 Aug 2021 |
Application | Utility: CMP COMPOSITION FOR POLISHING HARD MATERIALS Filling date: 6 Sep 2025 Issue date: 5 Aug 2021 |
Grant | Utility: Hard abrasive particle-free polishing of hard materials Filling date: 6 Sep 2025 Issue date: 3 Aug 2021 |
Application | Utility: METHOD FOR ETCHING OR DEPOSITION Filling date: 6 Sep 2025 Issue date: 22 Jul 2021 |
Application | Utility: POROUS SINTERED METAL BODIES AND METHODS OF PREPARING POROUS SINTERED METAL BODIES Filling date: 6 Sep 2025 Issue date: 22 Jul 2021 |
Grant | Utility: Silicon implantation in substrates and provision of silicon precursor compositions therefor Filling date: 6 Sep 2025 Issue date: 13 Jul 2021 |
Grant | Utility: Silicon nitride etching composition and method Filling date: 6 Sep 2025 Issue date: 6 Jul 2021 |
Grant | Utility: Bulk process gas purification systems Filling date: 6 Sep 2025 Issue date: 6 Jul 2021 |
Application | Utility: METAL BODY HAVING MAGNESIUM FLUORIDE REGION FORMED THEREFROM Filling date: 6 Sep 2025 Issue date: 1 Jul 2021 |
Grant | Utility: Boron-doped amorphous carbon hard mask and related methods Filling date: 6 Sep 2025 Issue date: 29 Jun 2021 |
Application | Utility: FILTER LIFE INDICATOR MEDIA AND HOLDER Filling date: 6 Sep 2025 Issue date: 24 Jun 2021 |
Application | Utility: ACCURATE TEMPERATURE READING OF FLUID NEAR INTERFACE Filling date: 6 Sep 2025 Issue date: 24 Jun 2021 |
Application | Utility: GERMANIUM TETRAFLOURIDE AND HYDROGEN MIXTURES FOR AN ION IMPLANTATION SYSTEM Filling date: 6 Sep 2025 Issue date: 24 Jun 2021 |
Grant | Utility: Cold sintering of solid precursors Filling date: 6 Sep 2025 Issue date: 15 Jun 2021 |
Application | Utility: DIFFUSION BARRIERS MADE FROM MULTIPLE BARRIER MATERIALS, AND RELATED ARTICLES AND METHODS Filling date: 6 Sep 2025 Issue date: 10 Jun 2021 |
Grant | Utility: System and method for removing airborne molecular contaminants from gas streams Filling date: 6 Sep 2025 Issue date: 1 Jun 2021 |
Application | Utility: DENSIFIED SOLID PREFORMS FOR SUBLIMATION Filling date: 6 Sep 2025 Issue date: 20 May 2021 |
Application | Utility: WELDED CHECK VALVE Filling date: 6 Sep 2025 Issue date: 20 May 2021 |
Application | Utility: ENVIRONMENTAL CONTROL MATERIAL HOLDER Filling date: 6 Sep 2025 Issue date: 13 May 2021 |
Application | Utility: FILTER WITH IMPROVED FLUID FLOW Filling date: 6 Sep 2025 Issue date: 6 May 2021 |
Application | Utility: OPTICAL SENSOR WINDOW CLEANER Filling date: 6 Sep 2025 Issue date: 6 May 2021 |
Application | Utility: SUBLIMATION AMPOULE WITH LEVEL SENSING Filling date: 6 Sep 2025 Issue date: 29 Apr 2021 |
Grant | Utility: Triiodosilylamine precursor compounds Filling date: 6 Sep 2025 Issue date: 27 Apr 2021 |
Showing 100 to 150 of 325 patents.