Lam Research
Utility Patent Applications
Last updated:
List of all Lam Research patents 177 in total
| Status | Patent |
|---|---|
Application | Utility: VOID FREE LOW STRESS FILL Filling date: 13 Sep 2025 Issue date: 20 Jan 2022 |
Application | Utility: WIRELESS ELECTRONIC-CONTROL SYSTEM Filling date: 13 Sep 2025 Issue date: 13 Jan 2022 |
Application | Utility: MOLYBDENUM TEMPLATES FOR TUNGSTEN Filling date: 13 Sep 2025 Issue date: 13 Jan 2022 |
Application | Utility: ELECTRODEPOSITION OF NANOTWINNED COPPER STRUCTURES Filling date: 13 Sep 2025 Issue date: 13 Jan 2022 |
Application | Utility: PIN-LIFTER TEST SUBSTRATE Filling date: 13 Sep 2025 Issue date: 13 Jan 2022 |
Application | Utility: TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING Filling date: 13 Sep 2025 Issue date: 6 Jan 2022 |
Application | Utility: PEDESTAL INCLUDING VAPOR CHAMBER FOR SUBSTRATE PROCESSING SYSTEMS Filling date: 13 Sep 2025 Issue date: 6 Jan 2022 |
Application | Utility: DUAL-PHASE COOLING IN SEMICONDUCTOR MANUFACTURING Filling date: 13 Sep 2025 Issue date: 6 Jan 2022 |
Application | Utility: BUBBLE DEFECT REDUCTION Filling date: 13 Sep 2025 Issue date: 6 Jan 2022 |
Application | Utility: ATOMIC LAYER ETCH SYSTEMS FOR SELECTIVELY ETCHING WITH HALOGEN-BASED COMPOUNDS Filling date: 13 Sep 2025 Issue date: 6 Jan 2022 |
Application | Utility: SILICON OXIDE SILICON NITRIDE STACK STAIR STEP ETCH Filling date: 13 Sep 2025 Issue date: 30 Dec 2021 |
Application | Utility: THROUGHPUT IMPROVEMENT WITH INTERVAL CONDITIONING PURGING Filling date: 13 Sep 2025 Issue date: 23 Dec 2021 |
Application | Utility: CERAMIC PEDESTAL WITH MULTI-LAYER HEATER FOR ENHANCED THERMAL UNIFORMITY Filling date: 13 Sep 2025 Issue date: 23 Dec 2021 |
Application | Utility: METHOD ANDD APPARATUS FOR ATOMIC LAYER DEPOSITION OR CHEMICAL VAPOR DEPOSITION Filling date: 13 Sep 2025 Issue date: 23 Dec 2021 |
Application | Utility: CROSS FLOW CONDUIT FOR FOAMING PREVENTION IN HIGH CONVECTION PLATING CELLS Filling date: 13 Sep 2025 Issue date: 23 Dec 2021 |
Application | Utility: METHODS FOR MAKING HARD MASKS USEFUL IN NEXT-GENERATION LITHOGRAPHY Filling date: 13 Sep 2025 Issue date: 23 Dec 2021 |
Application | Utility: SELF-ALIGNED VERTICAL INTEGRATION OF THREE-TERMINAL MEMORY DEVICES Filling date: 13 Sep 2025 Issue date: 16 Dec 2021 |
Application | Utility: DOPED OR UNDOPED SILICON CARBIDE DEPOSITION AND REMOTE HYDROGEN PLASMA EXPOSURE FOR GAPFILL Filling date: 13 Sep 2025 Issue date: 16 Dec 2021 |
Application | Utility: IDENTIFICATION OF AND COMPENSATION FOR A FAILURE IN A HEATER ARRAY Filling date: 13 Sep 2025 Issue date: 9 Dec 2021 |
Application | Utility: METHOD OF DEPOSITING SILICON NITRIDE FILMS Filling date: 13 Sep 2025 Issue date: 9 Dec 2021 |
Application | Utility: MODIFYING HYDROPHOBICITY OF A WAFER SURFACE USING AN ORGANOSILICON PRECURSOR Filling date: 13 Sep 2025 Issue date: 9 Dec 2021 |
Application | Utility: INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL AND PRECURSOR GAS TO A DOWNSTREAM CHAMBER TO ENABLE REMOTE PLASMA FILM DEPOSITION Filling date: 13 Sep 2025 Issue date: 2 Dec 2021 |
Application | Utility: EDGE EXCLUSION CONTROL Filling date: 13 Sep 2025 Issue date: 2 Dec 2021 |
Application | Utility: PLASMA ENHANCED WAFER SOAK FOR THIN FILM DEPOSITION Filling date: 13 Sep 2025 Issue date: 25 Nov 2021 |
Application | Utility: IMPROVING SUBSTRATE WETTABILITY FOR PLATING OPERATIONS Filling date: 13 Sep 2025 Issue date: 25 Nov 2021 |
Application | Utility: SELECTIVE DEPOSITION OF ETCH-STOP LAYER FOR ENHANCED PATTERNING Filling date: 13 Sep 2025 Issue date: 18 Nov 2021 |
Application | Utility: REAL-TIME CONTROL OF TEMPERATURE IN A PLASMA CHAMBER Filling date: 13 Sep 2025 Issue date: 18 Nov 2021 |
Application | Utility: ETCHING ISOLATION FEATURES AND DENSE FEATURES WITHIN A SUBSTRATE Filling date: 13 Sep 2025 Issue date: 18 Nov 2021 |
Application | Utility: FRICTION STIR WELDING FOR CERAMIC APPLICATIONS Filling date: 13 Sep 2025 Issue date: 18 Nov 2021 |
Application | Utility: LOWER PLASMA EXCLUSION ZONE RING FOR BEVEL ETCHER Filling date: 13 Sep 2025 Issue date: 11 Nov 2021 |
Application | Utility: ULTRATHIN ATOMIC LAYER DEPOSITION FILM ACCURACY THICKNESS CONTROL Filling date: 13 Sep 2025 Issue date: 4 Nov 2021 |
Application | Utility: QUARTZ COMPONENT WITH PROTECTIVE COATING Filling date: 13 Sep 2025 Issue date: 4 Nov 2021 |
Application | Utility: METHOD TO CREATE AIR GAPS Filling date: 13 Sep 2025 Issue date: 4 Nov 2021 |
Application | Utility: IN SITU PROTECTIVE COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING Filling date: 13 Sep 2025 Issue date: 4 Nov 2021 |
Application | Utility: APPARATUS FOR AN INERT ANODE PLATING CELL Filling date: 13 Sep 2025 Issue date: 4 Nov 2021 |
Application | Utility: METHOD FOR CONDITIONING A PLASMA PROCESSING CHAMBER Filling date: 13 Sep 2025 Issue date: 4 Nov 2021 |
Application | Utility: METHOD AND APPARATUS FOR MEASURING PARTICLES Filling date: 13 Sep 2025 Issue date: 4 Nov 2021 |
Application | Utility: PROTECTIVE COATING FOR ELECTROSTATIC CHUCKS Filling date: 13 Sep 2025 Issue date: 28 Oct 2021 |
Application | Utility: ATOMIC LAYER DEPOSITION ON 3D NAND STRUCTURES Filling date: 13 Sep 2025 Issue date: 28 Oct 2021 |
Application | Utility: METHOD FOR ETCHING AN ETCH LAYER Filling date: 13 Sep 2025 Issue date: 28 Oct 2021 |
Application | Utility: CONTINUOUS PLASMA FOR FILM DEPOSITION AND SURFACE TREATMENT Filling date: 13 Sep 2025 Issue date: 28 Oct 2021 |
Application | Utility: SELECTIVELY ETCHING FOR NANOWIRES Filling date: 13 Sep 2025 Issue date: 28 Oct 2021 |
Application | Utility: METAL CONTAMINATION REDUCTION IN SUBSTRATE PROCESSING SYSTEMS WITH TRANSFORMER COUPLED PLASMA Filling date: 13 Sep 2025 Issue date: 21 Oct 2021 |
Application | Utility: FILL ON DEMAND AMPOULE REFILL Filling date: 13 Sep 2025 Issue date: 21 Oct 2021 |
Application | Utility: Multiple-Output Radiofrequency Matching Module and Associated Methods Filling date: 13 Sep 2025 Issue date: 7 Oct 2021 |
Application | Utility: SYSTEMS AND METHODS FOR ACHIEVING PEAK ION ENERGY ENHANCEMENT WITH A LOW ANGULAR SPREAD Filling date: 13 Sep 2025 Issue date: 7 Oct 2021 |
Application | Utility: ETCHING METAL-OXIDE AND PROTECTING CHAMBER COMPONENTS Filling date: 13 Sep 2025 Issue date: 7 Oct 2021 |
Application | Utility: RF POWER COMPENSATION TO REDUCE DEPOSITION OR ETCH RATE CHANGES IN RESPONSE TO SUBSTRATE BULK RESISTIVITY VARIATIONS Filling date: 13 Sep 2025 Issue date: 7 Oct 2021 |
Application | Utility: MULTI-LAYER FEATURE FILL Filling date: 13 Sep 2025 Issue date: 7 Oct 2021 |
Application | Utility: ATOMIC LAYER ETCHING OF TUNGSTEN FOR ENHANCED TUNGSTEN DEPOSITION FILL Filling date: 13 Sep 2025 Issue date: 30 Sep 2021 |
Showing 100 to 150 of 177 patents.