Lam Research
Utility Patent Applications
Last updated:
List of all Lam Research patents 402 in total
| Status | Patent |
|---|---|
Application | Utility: APPARATUSES AND METHODS FOR AVOIDING ELECTRICAL BREAKDOWN FROM RF TERMINAL TO ADJACENT NON-RF TERMINAL Filling date: 8 Sep 2025 Issue date: 23 Jan 2020 |
Application | Utility: Minimization of Carbon Loss in ALD SiO2 Deposition on Hardmask Films Filling date: 8 Sep 2025 Issue date: 23 Jan 2020 |
Application | Utility: RF GENERATOR FOR GENERATING A MODULATED FREQUENCY OR AN INTER-MODULATED FREQUENCY Filling date: 8 Sep 2025 Issue date: 23 Jan 2020 |
Application | Utility: Dual Gas Feed Showerhead for Deposition Filling date: 8 Sep 2025 Issue date: 23 Jan 2020 |
Application | Utility: REMOTE PLASMA BASED DEPOSITION OF BORON NITRIDE, BORON CARBIDE, AND BORON CARBONITRIDE FILMS Filling date: 8 Sep 2025 Issue date: 23 Jan 2020 |
Application | Utility: REAL-TIME CONTROL OF TEMPERATURE IN A PLASMA CHAMBER Filling date: 8 Sep 2025 Issue date: 23 Jan 2020 |
Application | Utility: GAS DISTRIBUTOR AND FLOW VERIFIER Filling date: 8 Sep 2025 Issue date: 23 Jan 2020 |
Application | Utility: PLASMA ASSISTED DOPING ON GERMANIUM Filling date: 8 Sep 2025 Issue date: 16 Jan 2020 |
Application | Utility: MONOENERGETIC ION GENERATION FOR CONTROLLED ETCH Filling date: 8 Sep 2025 Issue date: 16 Jan 2020 |
Application | Utility: METHOD AND APPARATUS FOR SYNCHRONIZED PRESSURE REGULATION OF SEPARATED ANODE CHAMBER Filling date: 8 Sep 2025 Issue date: 16 Jan 2020 |
Application | Utility: DIELECTRIC GAPFILL USING ATOMIC LAYER DEPOSITION (ALD), INHIBITOR PLASMA AND ETCHING Filling date: 8 Sep 2025 Issue date: 16 Jan 2020 |
Application | Utility: MOVEABLE EDGE RING DESIGNS Filling date: 8 Sep 2025 Issue date: 16 Jan 2020 |
Application | Utility: SELECTIVE GROWTH OF SIO2 ON DIELECTRIC SURFACES IN THE PRESENCE OF COPPER Filling date: 8 Sep 2025 Issue date: 9 Jan 2020 |
Application | Utility: Apparatus for Measuring Condition of Electroplating Cell Components and Associated Methods Filling date: 8 Sep 2025 Issue date: 9 Jan 2020 |
Application | Utility: SURFACE MODIFIED DEPTH CONTROLLED DEPOSITION FOR PLASMA BASED DEPOSITION Filling date: 8 Sep 2025 Issue date: 9 Jan 2020 |
Application | Utility: AZIMUTHAL CRITICAL DIMENSION NON-UNIFORMITY FOR DOUBLE PATTERNING PROCESS Filling date: 8 Sep 2025 Issue date: 2 Jan 2020 |
Application | Utility: SELECTIVE GROWTH OF METAL-CONTAINING HARDMASK THIN FILMS Filling date: 8 Sep 2025 Issue date: 2 Jan 2020 |
Application | Utility: MONITORING SURFACE OXIDE ON SEED LAYERS DURING ELECTROPLATING Filling date: 8 Sep 2025 Issue date: 26 Dec 2019 |
Application | Utility: DEPOSITION TOOL AND METHOD FOR DEPOSITING METAL OXIDE FILMS ON ORGANIC MATERIALS Filling date: 8 Sep 2025 Issue date: 26 Dec 2019 |
Application | Utility: METHOD OF ACHIEVING HIGH SELECTIVITY FOR HIGH ASPECT RATIO DIELECTRIC ETCH Filling date: 8 Sep 2025 Issue date: 26 Dec 2019 |
Application | Utility: SELECTIVE ATOMIC LAYER ETCHING Filling date: 8 Sep 2025 Issue date: 26 Dec 2019 |
Application | Utility: PROTECTIVE COATING ON PHOTORESIST FOR PHOTORESIST METROLOGY Filling date: 8 Sep 2025 Issue date: 26 Dec 2019 |
Application | Utility: MODEL-BASED CONTROL OF SUBSTRATE PROCESSING SYSTEMS Filling date: 8 Sep 2025 Issue date: 26 Dec 2019 |
Application | Utility: METHOD TO RECESS COBALT FOR GATE METAL APPLICATION Filling date: 8 Sep 2025 Issue date: 19 Dec 2019 |
Application | Utility: METHOD TO RECESS COBALT FOR GATE METAL APPLICATION Filling date: 8 Sep 2025 Issue date: 19 Dec 2019 |
Application | Utility: SUBSTRATE PROCESSING CHAMBER INCLUDING CONICAL SURFACE FOR REDUCING RECIRCULATION Filling date: 8 Sep 2025 Issue date: 19 Dec 2019 |
Application | Utility: CAPPED ALD FILMS FOR DOPING FIN-SHAPED CHANNEL REGIONS OF 3-D IC TRANSISTORS Filling date: 8 Sep 2025 Issue date: 19 Dec 2019 |
Application | Utility: APPARATUS AND METHOD FOR DEPOSITION AND ETCH IN GAP FILL Filling date: 8 Sep 2025 Issue date: 19 Dec 2019 |
Application | Utility: TEMPERATURE CONTROL SYSTEMS AND METHODS FOR REMOVING METAL OXIDE FILMS Filling date: 8 Sep 2025 Issue date: 19 Dec 2019 |
Application | Utility: ACTIVE CONTROL OF RADIAL ETCH UNIFORMITY Filling date: 8 Sep 2025 Issue date: 19 Dec 2019 |
Application | Utility: DIRECT DRIVE RF CIRCUIT FOR SUBSTRATE PROCESSING SYSTEMS Filling date: 8 Sep 2025 Issue date: 19 Dec 2019 |
Application | Utility: ULTRATHIN ATOMIC LAYER DEPOSITION FILM ACCURACY THICKNESS CONTROL Filling date: 8 Sep 2025 Issue date: 12 Dec 2019 |
Application | Utility: CHEMICAL VAPOR DEPOSITION SHOWER HEAD FOR UNIFORM GAS DISTRIBUTION Filling date: 8 Sep 2025 Issue date: 12 Dec 2019 |
Application | Utility: SUBSTRATE PROCESSING CHAMBER WITH SHOWERHEAD HAVING COOLED FACEPLATE Filling date: 8 Sep 2025 Issue date: 12 Dec 2019 |
Application | Utility: METHOD FOR TRANSFERRING A PATTERN FROM AN ORGANIC MASK Filling date: 8 Sep 2025 Issue date: 12 Dec 2019 |
Application | Utility: ACTIVE SHOWERHEAD Filling date: 8 Sep 2025 Issue date: 5 Dec 2019 |
Application | Utility: SYSTEMS AND METHODS FOR TUNING TO REDUCE REFLECTED POWER IN MULTIPLE STATES Filling date: 8 Sep 2025 Issue date: 5 Dec 2019 |
Application | Utility: CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF DELIVERY Filling date: 8 Sep 2025 Issue date: 5 Dec 2019 |
Application | Utility: SYSTEMS AND METHODS FOR CORRECTING NON-UNIFORMITIES IN PLASMA PROCESSING OF SUBSTRATES Filling date: 8 Sep 2025 Issue date: 5 Dec 2019 |
Application | Utility: METAL LINER PASSIVATION AND ADHESION ENHANCEMENT BY ZINC DOPING Filling date: 8 Sep 2025 Issue date: 5 Dec 2019 |
Application | Utility: HIGH FLOW MULTI-WAY PISTON VALVE FOR DEPOSITION SYSTEMS Filling date: 8 Sep 2025 Issue date: 5 Dec 2019 |
Application | Utility: IMAGE BASED PLASMA SHEATH PROFILE DETECTION ON PLASMA PROCESSING TOOLS Filling date: 8 Sep 2025 Issue date: 5 Dec 2019 |
Application | Utility: CONTROL OF ON-WAFER CD UNIFORMITY WITH MOVABLE EDGE RING AND GAS INJECTION ADJUSTMENT Filling date: 8 Sep 2025 Issue date: 28 Nov 2019 |
Application | Utility: SYSTEMS AND METHODS FOR ACHIEVING PEAK ION ENERGY ENHANCEMENT WITH A LOW ANGULAR SPREAD Filling date: 8 Sep 2025 Issue date: 28 Nov 2019 |
Application | Utility: APPARATUS WITH OPTICAL CAVITY FOR DETERMINING PROCESS RATE Filling date: 8 Sep 2025 Issue date: 28 Nov 2019 |
Application | Utility: VIA PREFILL IN A FULLY ALIGNED VIA Filling date: 8 Sep 2025 Issue date: 28 Nov 2019 |
Application | Utility: METHODS AND APPARATUSES FOR ELECTROPLATING AND SEED LAYER DETECTION Filling date: 8 Sep 2025 Issue date: 21 Nov 2019 |
Application | Utility: ELECTROSTATIC CHUCK FILTER BOX AND MOUNTING BRACKET Filling date: 8 Sep 2025 Issue date: 21 Nov 2019 |
Application | Utility: SHOWERHEAD WITH AIR-GAPPED PLENUMS AND OVERHEAD ISOLATION GAS DISTRIBUTOR Filling date: 8 Sep 2025 Issue date: 21 Nov 2019 |
Application | Utility: CLUSTER TOOL SYSTEM WITH STEP LADDER ASSEMBLY Filling date: 8 Sep 2025 Issue date: 14 Nov 2019 |
Showing 300 to 350 of 402 patents.