ASML Holding N.V.
Patents, Design & Utilities
Last updated:
List of all ASML Holding N.V. patents 666 in total
| Status | Patent |
|---|---|
Grant | Utility: Lithographic apparatus Filling date: 9 Sep 2025 Issue date: 26 May 2020 |
Grant | Utility: Gauge pattern selection Filling date: 9 Sep 2025 Issue date: 26 May 2020 |
Grant | Utility: Wavelength-based optical filtering Filling date: 9 Sep 2025 Issue date: 26 May 2020 |
Grant | Utility: Extreme ultraviolet light source Filling date: 9 Sep 2025 Issue date: 26 May 2020 |
Grant | Utility: Method of measuring, device manufacturing method, metrology apparatus, and lithographic system Filling date: 9 Sep 2025 Issue date: 19 May 2020 |
Grant | Utility: Lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 19 May 2020 |
Grant | Utility: Metrology in lithographic processes Filling date: 9 Sep 2025 Issue date: 19 May 2020 |
Grant | Utility: Imprint lithography Filling date: 9 Sep 2025 Issue date: 19 May 2020 |
Grant | Utility: Apparatus and method for process-window characterization Filling date: 9 Sep 2025 Issue date: 19 May 2020 |
Grant | Utility: Substrate support, method for loading a substrate on a substrate support location, lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 19 May 2020 |
Grant | Utility: Source and mask optimization by changing intensity and shape of the illumination source and magnitude and phase of mask diffraction orders Filling date: 9 Sep 2025 Issue date: 19 May 2020 |
Grant | Utility: Substrate table, a lithographic apparatus and a method for manufacturing a device using a lithographic apparatus Filling date: 9 Sep 2025 Issue date: 12 May 2020 |
Grant | Utility: Lithographic apparatus, a dryer and a method of removing liquid from a surface Filling date: 9 Sep 2025 Issue date: 12 May 2020 |
Grant | Utility: Lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 12 May 2020 |
Grant | Utility: Methods and apparatuses for measurement of a parameter of a feature fabricated on a substrate Filling date: 9 Sep 2025 Issue date: 12 May 2020 |
Grant | Utility: Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus Filling date: 9 Sep 2025 Issue date: 12 May 2020 |
Grant | Utility: Illumination source for an inspection apparatus, inspection apparatus and inspection method Filling date: 9 Sep 2025 Issue date: 12 May 2020 |
Grant | Utility: Method and apparatus for determining a fingerprint of a performance parameter Filling date: 9 Sep 2025 Issue date: 12 May 2020 |
Grant | Utility: Patterning device cooling apparatus Filling date: 9 Sep 2025 Issue date: 5 May 2020 |
Grant | Utility: Illumination source for an inspection apparatus, inspection apparatus and inspection method Filling date: 9 Sep 2025 Issue date: 5 May 2020 |
Grant | Utility: Apparatus of plural charged-particle beams Filling date: 9 Sep 2025 Issue date: 5 May 2020 |
Grant | Utility: Methods and apparatus for obtaining diagnostic information relating to an industrial process Filling date: 9 Sep 2025 Issue date: 5 May 2020 |
Grant | Utility: Load lock system for charged particle beam imaging Filling date: 9 Sep 2025 Issue date: 5 May 2020 |
Grant | Utility: Optical isolation module Filling date: 9 Sep 2025 Issue date: 5 May 2020 |
Grant | Utility: Methodology to generate a guiding template for directed self-assembly Filling date: 9 Sep 2025 Issue date: 5 May 2020 |
Grant | Utility: Determining edge roughness parameters Filling date: 9 Sep 2025 Issue date: 28 Apr 2020 |
Grant | Utility: Method and system for the removal and/or avoidance of contamination in charged particle beam systems Filling date: 9 Sep 2025 Issue date: 28 Apr 2020 |
Grant | Utility: Correction using stack difference Filling date: 9 Sep 2025 Issue date: 28 Apr 2020 |
Grant | Utility: Faceted EUV optical element Filling date: 9 Sep 2025 Issue date: 28 Apr 2020 |
Grant | Utility: System method and apparatus for high pressure liquid jet cleaning of sintered filters Filling date: 9 Sep 2025 Issue date: 28 Apr 2020 |
Grant | Utility: Apparatus for delivering gas and illumination source for generating high harmonic radiation Filling date: 9 Sep 2025 Issue date: 21 Apr 2020 |
Grant | Utility: Inspection apparatus, lithographic apparatus and method of measuring a property of a substrate Filling date: 9 Sep 2025 Issue date: 21 Apr 2020 |
Grant | Utility: Etch-assist features Filling date: 9 Sep 2025 Issue date: 21 Apr 2020 |
Grant | Utility: Statistical hierarchical reconstruction from metrology data Filling date: 9 Sep 2025 Issue date: 21 Apr 2020 |
Grant | Utility: Lithographic apparatus and method Filling date: 9 Sep 2025 Issue date: 21 Apr 2020 |
Grant | Utility: Lithography apparatus, and a method of manufacturing a device Filling date: 9 Sep 2025 Issue date: 21 Apr 2020 |
Grant | Utility: Calibration method for a lithographic apparatus Filling date: 9 Sep 2025 Issue date: 21 Apr 2020 |
Grant | Utility: Yield estimation and control Filling date: 9 Sep 2025 Issue date: 21 Apr 2020 |
Grant | Utility: Cabinet for electronic equipment Filling date: 9 Sep 2025 Issue date: 21 Apr 2020 |
Grant | Utility: Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus Filling date: 9 Sep 2025 Issue date: 14 Apr 2020 |
Grant | Utility: Lithographic apparatus and device manufacturing method involving a liquid confinement structure Filling date: 9 Sep 2025 Issue date: 14 Apr 2020 |
Grant | Utility: Lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 14 Apr 2020 |
Grant | Utility: Lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 14 Apr 2020 |
Grant | Utility: Fluid handling structure, lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 14 Apr 2020 |
Grant | Utility: Metrology method and apparatus Filling date: 9 Sep 2025 Issue date: 14 Apr 2020 |
Grant | Utility: Dual stage lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 14 Apr 2020 |
Grant | Utility: Stage system, lithographic apparatus and device manufacturing method Filling date: 9 Sep 2025 Issue date: 14 Apr 2020 |
Grant | Utility: Focusing electrode for cathode arrangement, electron gun, and lithography system comprising such electron gun Filling date: 9 Sep 2025 Issue date: 14 Apr 2020 |
Grant | Utility: Lithographic method and apparatus Filling date: 9 Sep 2025 Issue date: 14 Apr 2020 |
Grant | Utility: Methods and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process Filling date: 9 Sep 2025 Issue date: 7 Apr 2020 |
Showing 600 to 650 of 666 patents.