KLA
Patents, Design & Utilities
Last updated:
List of all KLA patents 357 in total
| Status | Patent |
|---|---|
Grant | Utility: Magneto-optic Kerr effect metrology systems Filling date: 5 Sep 2025 Issue date: 22 Jun 2021 |
Grant | Utility: System and method for converting backside surface roughness to frontside overlay Filling date: 5 Sep 2025 Issue date: 15 Jun 2021 |
Grant | Utility: System and method for enhancing data processing throughput using less effective pixel while maintaining wafer warp coverage Filling date: 5 Sep 2025 Issue date: 15 Jun 2021 |
Application | Utility: SYSTEM, METHOD AND APPARATUS FOR POLARIZATION CONTROL Filling date: 5 Sep 2025 Issue date: 10 Jun 2021 |
Application | Utility: System and Method for Defining Flexible Regions on a Sample During Inspection Filling date: 5 Sep 2025 Issue date: 10 Jun 2021 |
Application | Utility: SENSITIVE PARTICLE DETECTION WITH SPATIALLY-VARYING POLARIZATION ROTATOR AND POLARIZER Filling date: 5 Sep 2025 Issue date: 3 Jun 2021 |
Application | Utility: LOW-REFLECTIVITY BACK-ILLUMINATED IMAGE SENSOR Filling date: 5 Sep 2025 Issue date: 3 Jun 2021 |
Application | Utility: APPARATUS AND METHOD FOR GRAY FIELD IMAGING Filling date: 5 Sep 2025 Issue date: 3 Jun 2021 |
Application | Utility: Tomography Based Semiconductor Measurements Using Simplified Models Filling date: 5 Sep 2025 Issue date: 3 Jun 2021 |
Application | Utility: Measurement Recipe Optimization Based On Probabilistic Domain Knowledge And Physical Realization Filling date: 5 Sep 2025 Issue date: 3 Jun 2021 |
Application | Utility: INTEGRATED MULTI-TOOL RETICLE INSPECTION Filling date: 5 Sep 2025 Issue date: 27 May 2021 |
Application | Utility: Finding Semiconductor Defects Using Convolutional Context Attributes Filling date: 5 Sep 2025 Issue date: 27 May 2021 |
Application | Utility: Clustering Sub-Care Areas Based on Noise Characteristics Filling date: 5 Sep 2025 Issue date: 27 May 2021 |
Application | Utility: FAST PHASE-SHIFT INTERFEROMETRY BY LASER FREQUENCY SHIFT Filling date: 5 Sep 2025 Issue date: 27 May 2021 |
Grant | Utility: Multi-wavelength interferometry for defect classification Filling date: 5 Sep 2025 Issue date: 25 May 2021 |
Grant | Utility: Multiple-tool parameter set configuration and misregistration measurement system and method Filling date: 5 Sep 2025 Issue date: 25 May 2021 |
Application | Utility: SYSTEM AND METHOD FOR PROTECTING OPTICS FROM VACUUM ULTRAVIOLET LIGHT Filling date: 5 Sep 2025 Issue date: 20 May 2021 |
Application | Utility: SYSTEM AND METHOD FOR TILT CALCULATION BASED ON OVERLAY METROLOGY MEASUREMENTS Filling date: 5 Sep 2025 Issue date: 20 May 2021 |
Grant | Utility: Broadband ultraviolet illumination sources Filling date: 5 Sep 2025 Issue date: 18 May 2021 |
Application | Utility: Machine Learning for Metrology Measurements Filling date: 5 Sep 2025 Issue date: 13 May 2021 |
Application | Utility: Laser Produced Plasma Light Source Having a Target Material Coated on a Cylindrically-Symmetric Element Filling date: 5 Sep 2025 Issue date: 6 May 2021 |
Application | Utility: STRONTIUM TETRABORATE AS OPTICAL COATING MATERIAL Filling date: 5 Sep 2025 Issue date: 6 May 2021 |
Application | Utility: Laser Produced Plasma Illuminator With Low Atomic Number Cryogenic Target Filling date: 5 Sep 2025 Issue date: 6 May 2021 |
Application | Utility: Laser Produced Plasma Illuminator With Liquid Sheet Jet Target Filling date: 5 Sep 2025 Issue date: 6 May 2021 |
Application | Utility: BBP Assisted Defect Detection Flow for SEM Images Filling date: 5 Sep 2025 Issue date: 6 May 2021 |
Application | Utility: Ionic Liquids as Lubricants in Optical Systems Filling date: 5 Sep 2025 Issue date: 6 May 2021 |
Application | Utility: COMMON PATH MODE FIBER TIP DIFFRACTION INTERFEROMETER FOR WAVEFRONT MEASUREMENT Filling date: 5 Sep 2025 Issue date: 29 Apr 2021 |
Application | Utility: Deep Learning Networks for Nuisance Filtering Filling date: 5 Sep 2025 Issue date: 29 Apr 2021 |
Grant | Utility: Stochastic reticle defect dispositioning Filling date: 5 Sep 2025 Issue date: 27 Apr 2021 |
Grant | Utility: Field-to-field corrections using overlay targets Filling date: 5 Sep 2025 Issue date: 27 Apr 2021 |
Application | Utility: System and Method for Vacuum Ultraviolet Lamp Assisted Ignition of Oxygen-Containing Laser Sustained Plasma Sources Filling date: 5 Sep 2025 Issue date: 22 Apr 2021 |
Application | Utility: Broadband Light Interferometry for Focal-Map Generation in Photomask Inspection Filling date: 5 Sep 2025 Issue date: 15 Apr 2021 |
Application | Utility: SYSTEM AND METHOD FOR REDUCING PRINTABLE DEFECTS ON EXTREME ULTRAVIOLET PATTERN MASKS Filling date: 5 Sep 2025 Issue date: 15 Apr 2021 |
Application | Utility: STATISTICAL LEARNING-BASED MODE SELECTION FOR MULTI-MODE INSPECTION Filling date: 5 Sep 2025 Issue date: 15 Apr 2021 |
Application | Utility: Signal-Domain Adaptation for Metrology Filling date: 5 Sep 2025 Issue date: 15 Apr 2021 |
Application | Utility: DROPLET GENERATION FOR A LASER PRODUCED PLASMA LIGHT SOURCE Filling date: 5 Sep 2025 Issue date: 8 Apr 2021 |
Application | Utility: SYSTEM AND METHOD FOR PHOTOMULTIPLIER TUBE IMAGE CORRECTION Filling date: 5 Sep 2025 Issue date: 8 Apr 2021 |
Application | Utility: FREQUENCY DOMAIN ENHANCEMENT OF LOW-SNR FLAT RESIDUE/STAIN DEFECTS FOR EFFECTIVE DETECTION Filling date: 5 Sep 2025 Issue date: 8 Apr 2021 |
Application | Utility: PROCESS OPTIMIZATION USING DESIGN OF EXPERIMENTS AND RESPONSE SURFACE MODELS Filling date: 5 Sep 2025 Issue date: 8 Apr 2021 |
Application | Utility: PLASMONIC PHOTOCATHODE EMITTERS Filling date: 5 Sep 2025 Issue date: 1 Apr 2021 |
Application | Utility: MULTI-IMAGING MODE IMAGE ALIGNMENT Filling date: 5 Sep 2025 Issue date: 1 Apr 2021 |
Application | Utility: EQUI-PROBABILITY DEFECT DETECTION Filling date: 5 Sep 2025 Issue date: 1 Apr 2021 |
Application | Utility: CONTROLLING A PROCESS FOR INSPECTION OF A SPECIMEN Filling date: 5 Sep 2025 Issue date: 1 Apr 2021 |
Application | Utility: VARIATION-BASED SEGMENTATION FOR WAFER DEFECT DETECTION Filling date: 5 Sep 2025 Issue date: 1 Apr 2021 |
Application | Utility: LIGHT MODULATED ELECTRON SOURCE Filling date: 5 Sep 2025 Issue date: 1 Apr 2021 |
Application | Utility: Sensitive Optical Metrology in Scanning and Static Modes Filling date: 5 Sep 2025 Issue date: 1 Apr 2021 |
Application | Utility: MULTI-COLUMN SCANNING ELECTRON MICROSCOPY SYSTEM Filling date: 5 Sep 2025 Issue date: 25 Mar 2021 |
Application | Utility: ROTATING LAMP FOR LASER-SUSTAINED PLASMA ILLUMINATION SOURCE Filling date: 5 Sep 2025 Issue date: 25 Mar 2021 |
Application | Utility: Unsupervised Learning-Based Reference Selection for Enhanced Defect Inspection Sensitivity Filling date: 5 Sep 2025 Issue date: 25 Mar 2021 |
Application | Utility: Transmission Small-Angle X-Ray Scattering Metrology System Filling date: 5 Sep 2025 Issue date: 25 Mar 2021 |
Showing 200 to 250 of 357 patents.