| Utility: METROLOGY METHODS AND OPTICAL SCHEMES FOR MEASUREMENT OF MISREGISTRATION BY USING HATCHED TARGET DESIGNS Filling date: 6 Sep 2025 Issue date: 28 Oct 2021 | 6 Jan 2021 | 28 Oct 2021 |
| Utility: IMAGE ALIGNMENT FOR NOISY IMAGES Filling date: 6 Sep 2025 Issue date: 28 Oct 2021 | 10 Nov 2020 | 28 Oct 2021 |
| Utility: Micro-Four-Point Metrology of Joule-Heating-Induced Modulation of Test Sample Properties Filling date: 6 Sep 2025 Issue date: 28 Oct 2021 | 9 Oct 2020 | 28 Oct 2021 |
| Utility: TARGET DESIGN PROCESS FOR OVERLAY TARGETS INTENDED FOR MULTI-SIGNAL MEASUREMENTS Filling date: 6 Sep 2025 Issue date: 28 Oct 2021 | 2 Jun 2020 | 28 Oct 2021 |
| Utility: Cantilever-Type Probe with Multiple Metallic Coatings Filling date: 6 Sep 2025 Issue date: 28 Oct 2021 | 24 Apr 2020 | 28 Oct 2021 |
| Utility: FAB MANAGEMENT WITH DYNAMIC SAMPLING PLANS, OPTIMIZED WAFER MEASUREMENT PATHS AND OPTIMIZED WAFER TRANSPORT, USING QUANTUM COMPUTING Filling date: 6 Sep 2025 Issue date: 28 Oct 2021 | 5 Jul 2019 | 28 Oct 2021 |
| Utility: Vacuum actuator containment for molecular contaminant and particle mitigation Filling date: 6 Sep 2025 Issue date: 26 Oct 2021 | 6 Aug 2020 | 26 Oct 2021 |
| Utility: ELECTRON BEAM SYSTEM FOR INSPECTION AND REVIEW OF 3D DEVICES Filling date: 6 Sep 2025 Issue date: 21 Oct 2021 | 7 Apr 2021 | 21 Oct 2021 |
| Utility: MINI-ENVIRONMENT SYSTEM FOR CONTROLLING OXYGEN AND HUMIDITY LEVELS WITHIN A SAMPLE TRANSPORT DEVICE Filling date: 6 Sep 2025 Issue date: 21 Oct 2021 | 6 Apr 2021 | 21 Oct 2021 |
| Utility: Thin Pellicle Material for Protection of Solid-State Electron Detectors Filling date: 6 Sep 2025 Issue date: 21 Oct 2021 | 10 Mar 2021 | 21 Oct 2021 |
| Utility: LASER-SUSTAINED PLASMA LIGHT SOURCE WITH GAS VORTEX FLOW Filling date: 6 Sep 2025 Issue date: 14 Oct 2021 | 6 Apr 2021 | 14 Oct 2021 |
| Utility: BACK-ILLUMINATED SENSOR AND A METHOD OF MANUFACTURING A SENSOR USING A SILICON ON INSULATOR WAFER Filling date: 6 Sep 2025 Issue date: 14 Oct 2021 | 10 Mar 2021 | 14 Oct 2021 |
| Utility: Process monitoring of deep structures with X-ray scatterometry Filling date: 6 Sep 2025 Issue date: 12 Oct 2021 | 5 Jun 2020 | 12 Oct 2021 |
| Utility: Soft x-ray optics with improved filtering Filling date: 6 Sep 2025 Issue date: 12 Oct 2021 | 6 Apr 2020 | 12 Oct 2021 |
| Utility: Mid-infrared spectroscopy for measurement of high aspect ratio structures Filling date: 6 Sep 2025 Issue date: 5 Oct 2021 | 13 Jan 2020 | 5 Oct 2021 |
| Utility: System and method for defining flexible regions on a sample during inspection Filling date: 6 Sep 2025 Issue date: 21 Sep 2021 | 15 Jun 2020 | 21 Sep 2021 |
| Utility: System and method for reducing printable defects on extreme ultraviolet pattern masks Filling date: 6 Sep 2025 Issue date: 14 Sep 2021 | 16 Sep 2020 | 14 Sep 2021 |
| Utility: Unsupervised learning-based reference selection for enhanced defect inspection sensitivity Filling date: 6 Sep 2025 Issue date: 14 Sep 2021 | 4 Sep 2020 | 14 Sep 2021 |
| Utility: Methods and systems for measurement of thick films and high aspect ratio structures Filling date: 6 Sep 2025 Issue date: 14 Sep 2021 | 20 May 2020 | 14 Sep 2021 |
| Utility: System and method for pumping laser sustained plasma with interlaced pulsed illumination sources Filling date: 6 Sep 2025 Issue date: 14 Sep 2021 | 14 Feb 2020 | 14 Sep 2021 |
| Utility: Defect candidate generation for inspection Filling date: 6 Sep 2025 Issue date: 7 Sep 2021 | 15 Oct 2019 | 7 Sep 2021 |
| Utility: Pattern-to-design alignment for one-dimensional unique structures Filling date: 6 Sep 2025 Issue date: 7 Sep 2021 | 23 Sep 2019 | 7 Sep 2021 |
| Utility: Back-illuminated sensor and a method of manufacturing a sensor Filling date: 6 Sep 2025 Issue date: 7 Sep 2021 | 5 Sep 2019 | 7 Sep 2021 |
| Utility: BROADBAND ULTRAVIOLET ILLUMINATION SOURCES Filling date: 6 Sep 2025 Issue date: 2 Sep 2021 | 17 May 2021 | 2 Sep 2021 |
| Utility: SYSTEM AND METHOD FOR ENHANCING DATA PROCESSING THROUGHPUT USING LESS EFFECTIVE PIXEL WHILE MAINTAINING WAFER WARP COVERAGE Filling date: 6 Sep 2025 Issue date: 2 Sep 2021 | 14 May 2021 | 2 Sep 2021 |
| Utility: GENERATIVE ADVERSARIAL NETWORKS (GANs) FOR SIMULATING SPECIMEN IMAGES Filling date: 6 Sep 2025 Issue date: 2 Sep 2021 | 8 Feb 2021 | 2 Sep 2021 |
| Utility: Apparatus, method and computer program product for defect detection in work pieces Filling date: 6 Sep 2025 Issue date: 31 Aug 2021 | 2 Nov 2020 | 31 Aug 2021 |
| Utility: Visualization of three-dimensional semiconductor structures Filling date: 6 Sep 2025 Issue date: 24 Aug 2021 | 28 Aug 2020 | 24 Aug 2021 |
| Utility: Parameter-stable misregistration measurement amelioration in semiconductor devices Filling date: 6 Sep 2025 Issue date: 24 Aug 2021 | 23 Aug 2019 | 24 Aug 2021 |
| Utility: Inspection sensitivity improvements for optical and electron beam inspection Filling date: 6 Sep 2025 Issue date: 17 Aug 2021 | 22 Jul 2019 | 17 Aug 2021 |
| Utility: Deep learning networks for nuisance filtering Filling date: 6 Sep 2025 Issue date: 10 Aug 2021 | 24 Oct 2019 | 10 Aug 2021 |
| Utility: Metrology target for scanning metrology Filling date: 6 Sep 2025 Issue date: 27 Jul 2021 | 10 Oct 2019 | 27 Jul 2021 |
| Utility: OPTICAL METROLOGY TOOL EQUIPPED WITH MODULATED ILLUMINATION SOURCES Filling date: 6 Sep 2025 Issue date: 22 Jul 2021 | 5 Apr 2021 | 22 Jul 2021 |
| Utility: System and Method for Analyzing a Sample with a Dynamic Recipe Based on Iterative Experimentation and Feedback Filling date: 6 Sep 2025 Issue date: 22 Jul 2021 | 21 Jan 2020 | 22 Jul 2021 |
| Utility: PROJECTION AND DISTANCE SEGMENTATION ALGORITHM FOR WAFER DEFECT DETECTION Filling date: 6 Sep 2025 Issue date: 15 Jul 2021 | 16 Dec 2020 | 15 Jul 2021 |
| Utility: ADVANCED IN-LINE PART AVERAGE TESTING Filling date: 6 Sep 2025 Issue date: 15 Jul 2021 | 23 Nov 2020 | 15 Jul 2021 |
| Utility: System and Method for Wafer-By-Wafer Overlay Feedforward and Lot-To-Lot Feedback Control Filling date: 6 Sep 2025 Issue date: 15 Jul 2021 | 14 Jan 2020 | 15 Jul 2021 |
| Utility: Multi-dimensional model of optical dispersion Filling date: 6 Sep 2025 Issue date: 13 Jul 2021 | 11 Mar 2020 | 13 Jul 2021 |
| Utility: Scatterometry based methods and systems for measurement of strain in semiconductor structures Filling date: 6 Sep 2025 Issue date: 13 Jul 2021 | 22 Oct 2019 | 13 Jul 2021 |
| Utility: Process optimization using design of experiments and response surface models Filling date: 6 Sep 2025 Issue date: 13 Jul 2021 | 7 Oct 2019 | 13 Jul 2021 |
| Utility: Low profile wafer manipulator Filling date: 6 Sep 2025 Issue date: 13 Jul 2021 | 6 Aug 2019 | 13 Jul 2021 |
| Utility: Methods And Systems For Overlay Measurement Based On Soft X-Ray Scatterometry Filling date: 6 Sep 2025 Issue date: 8 Jul 2021 | 30 Dec 2020 | 8 Jul 2021 |
| Utility: Micro stigmator array for multi electron beam system Filling date: 6 Sep 2025 Issue date: 6 Jul 2021 | 5 Feb 2020 | 6 Jul 2021 |
| Utility: Semiconductor hot-spot and process-window discovery combining optical and electron-beam inspection Filling date: 6 Sep 2025 Issue date: 6 Jul 2021 | 25 Sep 2019 | 6 Jul 2021 |
| Utility: FIELD-TO-FIELD CORRECTIONS USING OVERLAY TARGETS Filling date: 6 Sep 2025 Issue date: 1 Jul 2021 | 12 Mar 2021 | 1 Jul 2021 |
| Utility: THICK PHOTO RESIST LAYER METROLOGY TARGET Filling date: 6 Sep 2025 Issue date: 1 Jul 2021 | 18 Aug 2020 | 1 Jul 2021 |
| Utility: IMPROVED SELF-MOIRE GRATING DESIGN FOR USE IN METROLOGY Filling date: 6 Sep 2025 Issue date: 1 Jul 2021 | 20 Mar 2020 | 1 Jul 2021 |
| Utility: METHOD OF MEASURING MISREGISTRATION IN THE MANUFACTURE OF TOPOGRAPHIC SEMICONDUCTOR DEVICE WAFERS Filling date: 6 Sep 2025 Issue date: 1 Jul 2021 | 14 Feb 2020 | 1 Jul 2021 |
| Utility: Removable opaque coating for accurate optical topography measurements on top surfaces of transparent films Filling date: 6 Sep 2025 Issue date: 29 Jun 2021 | 9 Oct 2019 | 29 Jun 2021 |
| Utility: SYSTEM AND METHOD FOR MEASURING MISREGISTRATION OF SEMICONDUCTOR DEVICE WAFERS UTILIZING INDUCED TOPOGRAPHY Filling date: 6 Sep 2025 Issue date: 24 Jun 2021 | 14 Feb 2020 | 24 Jun 2021 |
