| Utility: Integration of an Optical Height Sensor in Mask Inspection Tools Filling date: 6 Sep 2025 Issue date: 23 Jun 2022 | 21 Jun 2021 | 23 Jun 2022 |
| Utility: SYSTEM AND METHOD FOR AUTOMATICALLY IDENTIFYING DEFECT-BASED TEST COVERAGE GAPS IN SEMICONDUCTOR DEVICES Filling date: 6 Sep 2025 Issue date: 23 Jun 2022 | 14 May 2021 | 23 Jun 2022 |
| Utility: Programmable and reconfigurable mask with MEMS micro-mirror array for defect detection Filling date: 6 Sep 2025 Issue date: 21 Jun 2022 | 27 Aug 2020 | 21 Jun 2022 |
| Utility: SYSTEM AND METHOD FOR PUMPING LASER SUSTAINED PLASMA WITH AN ILLUMINATION SOURCE HAVING MODIFIED PUPIL POWER DISTRIBUTION Filling date: 6 Sep 2025 Issue date: 16 Jun 2022 | 28 Feb 2022 | 16 Jun 2022 |
| Utility: SYSTEM AND METHOD FOR DETERMINING POST BONDING OVERLAY Filling date: 6 Sep 2025 Issue date: 16 Jun 2022 | 28 Jan 2021 | 16 Jun 2022 |
| Utility: Strontium tetraborate as optical coating material Filling date: 6 Sep 2025 Issue date: 14 Jun 2022 | 8 Jan 2021 | 14 Jun 2022 |
| Utility: System and method for tilt calculation based on overlay metrology measurements Filling date: 6 Sep 2025 Issue date: 14 Jun 2022 | 2 Nov 2020 | 14 Jun 2022 |
| Utility: System and method for photomultiplier tube image correction Filling date: 6 Sep 2025 Issue date: 14 Jun 2022 | 24 Sep 2020 | 14 Jun 2022 |
| Utility: System and method for application of harmonic detectivity as a quality indicator for imaging-based overlay measurements Filling date: 6 Sep 2025 Issue date: 14 Jun 2022 | 8 Sep 2020 | 14 Jun 2022 |
| Utility: Darkfield imaging of grating target structures for overlay measurement Filling date: 6 Sep 2025 Issue date: 14 Jun 2022 | 18 Aug 2020 | 14 Jun 2022 |
| Utility: Tilted slit confocal system configured for automated focus detection and tracking Filling date: 6 Sep 2025 Issue date: 7 Jun 2022 | 17 Aug 2020 | 7 Jun 2022 |
| Utility: Device-like overlay metrology targets displaying Moire effects Filling date: 6 Sep 2025 Issue date: 7 Jun 2022 | 16 Jul 2020 | 7 Jun 2022 |
| Utility: System and method for error reduction for metrology measurements Filling date: 6 Sep 2025 Issue date: 7 Jun 2022 | 14 Jul 2020 | 7 Jun 2022 |
| Utility: Metrology system and method for measuring diagonal diffraction-based overlay targets Filling date: 6 Sep 2025 Issue date: 7 Jun 2022 | 12 Jun 2020 | 7 Jun 2022 |
| Utility: Characterization System and Method With Guided Defect Discovery Filling date: 6 Sep 2025 Issue date: 2 Jun 2022 | 18 Feb 2022 | 2 Jun 2022 |
| Utility: IMAGING OVERLAY TARGETS USING MOIRE ELEMENTS AND ROTATIONAL SYMMETRY ARRANGEMENTS Filling date: 6 Sep 2025 Issue date: 2 Jun 2022 | 18 Feb 2022 | 2 Jun 2022 |
| Utility: METHOD OF MEASURING MISREGISTRATION IN THE MANUFACTURE OF TOPOGRAPHIC SEMICONDUCTOR DEVICE WAFERS Filling date: 6 Sep 2025 Issue date: 2 Jun 2022 | 16 Feb 2022 | 2 Jun 2022 |
| Utility: Measurement modes for overlay Filling date: 6 Sep 2025 Issue date: 31 May 2022 | 12 Oct 2020 | 31 May 2022 |
| Utility: Droplet generation for a laser produced plasma light source Filling date: 6 Sep 2025 Issue date: 24 May 2022 | 23 Nov 2020 | 24 May 2022 |
| Utility: Combined transmitted and reflected light imaging of internal cracks in semiconductor devices Filling date: 6 Sep 2025 Issue date: 24 May 2022 | 12 Jul 2020 | 24 May 2022 |
| Utility: System and Method for Error Reduction for Metrology Measurements Filling date: 6 Sep 2025 Issue date: 19 May 2022 | 14 Jul 2020 | 19 May 2022 |
| Utility: Electron beam system for inspection and review of 3D devices Filling date: 6 Sep 2025 Issue date: 17 May 2022 | 7 Apr 2021 | 17 May 2022 |
| Utility: Common path mode fiber tip diffraction interferometer for wavefront measurement Filling date: 6 Sep 2025 Issue date: 17 May 2022 | 13 Mar 2020 | 17 May 2022 |
| Utility: Scaling metric for quantifying metrology sensitivity to process variation Filling date: 6 Sep 2025 Issue date: 17 May 2022 | 13 Jan 2020 | 17 May 2022 |
| Utility: SYSTEM AND METHOD FOR INSPECTION AND METROLOGY OF FOUR SIDES OF SEMICONDUCTOR DEVICES Filling date: 6 Sep 2025 Issue date: 12 May 2022 | 25 May 2021 | 12 May 2022 |
| Utility: Deep generative models for optical or other mode selection Filling date: 6 Sep 2025 Issue date: 10 May 2022 | 14 Jul 2021 | 10 May 2022 |
| Utility: Image alignment setup for specimens with intra- and inter-specimen variations using unsupervised learning and adaptive database generation methods Filling date: 6 Sep 2025 Issue date: 10 May 2022 | 28 May 2021 | 10 May 2022 |
| Utility: Print check repeater defect detection Filling date: 6 Sep 2025 Issue date: 10 May 2022 | 30 Apr 2021 | 10 May 2022 |
| Utility: Determining focus settings for specimen scans Filling date: 6 Sep 2025 Issue date: 10 May 2022 | 8 Mar 2021 | 10 May 2022 |
| Utility: Localized purge module for substrate handling Filling date: 6 Sep 2025 Issue date: 26 Apr 2022 | 11 Sep 2020 | 26 Apr 2022 |
| Utility: Method for measuring an electric property of a test sample Filling date: 6 Sep 2025 Issue date: 19 Apr 2022 | 18 Mar 2020 | 19 Apr 2022 |
| Utility: Grey-mode scanning scatterometry overlay metrology Filling date: 6 Sep 2025 Issue date: 12 Apr 2022 | 17 Feb 2021 | 12 Apr 2022 |
| Utility: Pupil-plane beam scanning for metrology Filling date: 6 Sep 2025 Issue date: 12 Apr 2022 | 6 Jan 2021 | 12 Apr 2022 |
| Utility: System, method, and target for wafer alignment Filling date: 6 Sep 2025 Issue date: 12 Apr 2022 | 5 Jan 2021 | 12 Apr 2022 |
| Utility: ELECTRON SOURCE WITH MAGNETIC SUPPRESSOR ELECTRODE Filling date: 6 Sep 2025 Issue date: 7 Apr 2022 | 28 Dec 2020 | 7 Apr 2022 |
| Utility: Method and apparatus for beam stabilization and reference correction for EUV inspection Filling date: 6 Sep 2025 Issue date: 5 Apr 2022 | 3 Dec 2020 | 5 Apr 2022 |
| Utility: Advanced in-line part average testing Filling date: 6 Sep 2025 Issue date: 5 Apr 2022 | 23 Nov 2020 | 5 Apr 2022 |
| Utility: Alignment of a Specimen for Inspection and Other Processes Filling date: 6 Sep 2025 Issue date: 31 Mar 2022 | 25 Jan 2021 | 31 Mar 2022 |
| Utility: SYSTEMS AND METHODS FOR DETERMINING MEASUREMENT LOCATION IN SEMICONDUCTOR WAFER METROLOGY Filling date: 6 Sep 2025 Issue date: 31 Mar 2022 | 13 Jan 2021 | 31 Mar 2022 |
| Utility: Methods And Systems For Determining Quality Of Semiconductor Measurements Filling date: 6 Sep 2025 Issue date: 24 Mar 2022 | 24 Sep 2020 | 24 Mar 2022 |
| Utility: Method of measuring misregistration in the manufacture of topographic semiconductor device wafers Filling date: 6 Sep 2025 Issue date: 22 Mar 2022 | 14 Feb 2020 | 22 Mar 2022 |
| Utility: SYSTEMS AND METHODS FOR SCATTEROMETRIC SINGLE-WAVELENGTH MEASUREMENT OF MISREGISTRATION AND AMELIORATION THEREOF Filling date: 6 Sep 2025 Issue date: 17 Mar 2022 | 28 Jan 2021 | 17 Mar 2022 |
| Utility: Reference image generation for semiconductor applications Filling date: 6 Sep 2025 Issue date: 15 Mar 2022 | 19 Feb 2020 | 15 Mar 2022 |
| Utility: MAGNETIC IMMERSION ELECTRON GUN Filling date: 6 Sep 2025 Issue date: 10 Mar 2022 | 2 Sep 2021 | 10 Mar 2022 |
| Utility: UNSUPERVISED PATTERN SYNONYM DETECTION USING IMAGE HASHING Filling date: 6 Sep 2025 Issue date: 10 Mar 2022 | 1 Sep 2021 | 10 Mar 2022 |
| Utility: BINNING-ENHANCED DEFECT DETECTION METHOD FOR THREE-DIMENSIONAL WAFER STRUCTURES Filling date: 6 Sep 2025 Issue date: 10 Mar 2022 | 23 Jun 2021 | 10 Mar 2022 |
| Utility: Laser produced plasma illuminator with low atomic number cryogenic target Filling date: 6 Sep 2025 Issue date: 8 Mar 2022 | 21 Oct 2020 | 8 Mar 2022 |
| Utility: Variable aperture mask Filling date: 6 Sep 2025 Issue date: 8 Mar 2022 | 12 May 2020 | 8 Mar 2022 |
| Utility: ACTIVE RETICLE CARRIER FOR IN SITU STAGE CORRECTION Filling date: 6 Sep 2025 Issue date: 3 Mar 2022 | 26 Aug 2021 | 3 Mar 2022 |
| Utility: Coolant Microleak Sensor for a Vacuum System Filling date: 6 Sep 2025 Issue date: 3 Mar 2022 | 20 Aug 2021 | 3 Mar 2022 |
