KLA
Patents, Design & Utilities

Last updated:

List of all KLA patents 357 in total

Status Patent
Application
Utility: ELECTRON GUN AND ELECTRON MICROSCOPE External link
Filling date: 6 Sep 2025 Issue date: 16 Apr 2020
Application
Utility: DISPOSITIONING DEFECTS DETECTED ON EXTREME ULTRAVIOLET PHOTOMASKS External link
Filling date: 6 Sep 2025 Issue date: 26 Mar 2020
Application
Utility: DETECTING DEFECTS IN A LOGIC REGION ON A WAFER External link
Filling date: 6 Sep 2025 Issue date: 19 Mar 2020
Application
Utility: Process Temperature Measurement Device Fabrication Techniques and Methods of Calibration and Data Interpolation of the Same External link
Filling date: 6 Sep 2025 Issue date: 12 Mar 2020
Application
Utility: Multi-Wavelength Interferometry for Defect Classification External link
Filling date: 6 Sep 2025 Issue date: 5 Mar 2020
Application
Utility: LOW PROFILE WAFER MANIPULATOR External link
Filling date: 6 Sep 2025 Issue date: 6 Feb 2020
Application
Utility: Apparatus and Method for Measuring Topography and Gradient of the Surfaces, Shape, and Thickness of Patterned and Unpatterned Wafers External link
Filling date: 6 Sep 2025 Issue date: 30 Jan 2020

Showing 350 to 357 of 357 patents.