KLA
Patents, Design & Utilities
Last updated:
List of all KLA patents 357 in total
| Status | Patent |
|---|---|
Application | Utility: Computer Assisted Weak Pattern Detection and Quantification System Filling date: 6 Sep 2025 Issue date: 26 Nov 2020 |
Application | Utility: Single Cell In-Die Metrology Targets and Measurement Methods Filling date: 6 Sep 2025 Issue date: 26 Nov 2020 |
Application | Utility: PER-SITE RESIDUALS ANALYSIS FOR ACCURATE METROLOGY MEASUREMENTS Filling date: 6 Sep 2025 Issue date: 26 Nov 2020 |
Application | Utility: STRONTIUM TETRABORATE AS OPTICAL COATING MATERIAL Filling date: 6 Sep 2025 Issue date: 12 Nov 2020 |
Grant | Utility: Method of analyzing and utilizing landscapes to reduce or eliminate inaccuracy in overlay optical metrology Filling date: 6 Sep 2025 Issue date: 10 Nov 2020 |
Application | Utility: Verification Metrology Targets and Their Design Filling date: 6 Sep 2025 Issue date: 5 Nov 2020 |
Application | Utility: System and Method for Generation of Wafer Inspection Critical Areas Filling date: 6 Sep 2025 Issue date: 22 Oct 2020 |
Application | Utility: Methods And Systems For Combining X-Ray Metrology Data Sets To Improve Parameter Estimation Filling date: 6 Sep 2025 Issue date: 22 Oct 2020 |
Grant | Utility: Multi-mirror laser sustained plasma light source Filling date: 6 Sep 2025 Issue date: 20 Oct 2020 |
Grant | Utility: Apparatus and method for measuring topography and gradient of the surfaces, shape, and thickness of patterned and unpatterned wafers Filling date: 6 Sep 2025 Issue date: 20 Oct 2020 |
Application | Utility: LEARNABLE DEFECT DETECTION FOR SEMICONDUCTOR APPLICATIONS Filling date: 6 Sep 2025 Issue date: 15 Oct 2020 |
Application | Utility: Stochastic Reticle Defect Dispositioning Filling date: 6 Sep 2025 Issue date: 15 Oct 2020 |
Application | Utility: Defect Candidate Generation for Inspection Filling date: 6 Sep 2025 Issue date: 15 Oct 2020 |
Application | Utility: USING ABSOLUTE Z-HEIGHT VALUES FOR SYNERGY BETWEEN TOOLS Filling date: 6 Sep 2025 Issue date: 8 Oct 2020 |
Application | Utility: Automated Focusing System For Tracking Specimen Surface with a Configurable Focus Offset Filling date: 6 Sep 2025 Issue date: 8 Oct 2020 |
Application | Utility: Process Monitoring Of Deep Structures With X-Ray Scatterometry Filling date: 6 Sep 2025 Issue date: 24 Sep 2020 |
Application | Utility: Full Beam Metrology For X-Ray Scatterometry Systems Filling date: 6 Sep 2025 Issue date: 24 Sep 2020 |
Application | Utility: MAGNETO-OPTIC KERR EFFECT METROLOGY SYSTEMS Filling date: 6 Sep 2025 Issue date: 24 Sep 2020 |
Application | Utility: System and Method for Converting Backside Surface Roughness to Frontside Overlay Filling date: 6 Sep 2025 Issue date: 24 Sep 2020 |
Application | Utility: Multi-Dimensional Model Of Optical Dispersion Filling date: 6 Sep 2025 Issue date: 17 Sep 2020 |
Application | Utility: COLLECTING AND RECYCLING RARE GASES IN SEMICONDUCTOR PROCESSING EQUIPMENT Filling date: 6 Sep 2025 Issue date: 17 Sep 2020 |
Application | Utility: Methods And Systems For Measurement Of Thick Films And High Aspect Ratio Structures Filling date: 6 Sep 2025 Issue date: 10 Sep 2020 |
Grant | Utility: Dispersion model for band gap tracking Filling date: 6 Sep 2025 Issue date: 8 Sep 2020 |
Application | Utility: Variable Aperture Mask Filling date: 6 Sep 2025 Issue date: 27 Aug 2020 |
Application | Utility: REFERENCE IMAGE GENERATION FOR SEMICONDUCTOR APPLICATIONS Filling date: 6 Sep 2025 Issue date: 27 Aug 2020 |
Application | Utility: System and Method for Pumping Laser Sustained Plasma with Interlaced Pulsed Illumination Sources Filling date: 6 Sep 2025 Issue date: 27 Aug 2020 |
Application | Utility: PLASMONIC PHOTOCATHODE EMITTERS AT ULTRAVIOLET AND VISIBLE WAVELENGTHS Filling date: 6 Sep 2025 Issue date: 20 Aug 2020 |
Application | Utility: DELIVERY OF LIGHT INTO A VACUUM CHAMBER USING AN OPTICAL FIBER Filling date: 6 Sep 2025 Issue date: 20 Aug 2020 |
Application | Utility: DESIGN FILE SELECTION FOR TEST IMAGE TO DESIGN ALIGNMENT Filling date: 6 Sep 2025 Issue date: 20 Aug 2020 |
Application | Utility: Sensitive Particle Detection with Spatially-Varying Polarization Rotator and Polarizer Filling date: 6 Sep 2025 Issue date: 20 Aug 2020 |
Application | Utility: System and Method for Inspection Using Tensor Decomposition and Singular Value Decomposition Filling date: 6 Sep 2025 Issue date: 30 Jul 2020 |
Application | Utility: Scaling Metric for Quantifying Metrology Sensitivity to Process Variation Filling date: 6 Sep 2025 Issue date: 30 Jul 2020 |
Application | Utility: Mid-Infrared Spectroscopy For Measurement Of High Aspect Ratio Structures Filling date: 6 Sep 2025 Issue date: 30 Jul 2020 |
Application | Utility: Methods And Systems For Inspection Of Semiconductor Structures With Automatically Generated Defect Features Filling date: 6 Sep 2025 Issue date: 23 Jul 2020 |
Application | Utility: Image Noise Reduction Using Stacked Denoising Auto-Encoder Filling date: 6 Sep 2025 Issue date: 16 Jul 2020 |
Grant | Utility: Scanning differential interference contrast in an imaging system design Filling date: 6 Sep 2025 Issue date: 7 Jul 2020 |
Application | Utility: Field-to-Field Corrections Using Overlay Targets Filling date: 6 Sep 2025 Issue date: 25 Jun 2020 |
Application | Utility: Care Area Based Swath Speed for Throughput and Sensitivity Improvement Filling date: 6 Sep 2025 Issue date: 25 Jun 2020 |
Application | Utility: Scatterometry Based Methods And Systems For Measurement Of Strain In Semiconductor Structures Filling date: 6 Sep 2025 Issue date: 25 Jun 2020 |
Application | Utility: Joint Electron-Optical Columns for Flood-Charging and Image-Forming in Voltage Contrast Wafer Inspections Filling date: 6 Sep 2025 Issue date: 18 Jun 2020 |
Application | Utility: Detection and Correction of System Responses in Real-Time Filling date: 6 Sep 2025 Issue date: 18 Jun 2020 |
Application | Utility: BACK-ILLUMINATED SENSOR AND A METHOD OF MANUFACTURING A SENSOR Filling date: 6 Sep 2025 Issue date: 18 Jun 2020 |
Application | Utility: INSPECTION SENSITIVITY IMPROVEMENTS FOR OPTICAL AND ELECTRON BEAM INSPECTION Filling date: 6 Sep 2025 Issue date: 11 Jun 2020 |
Application | Utility: Soft Gripper With Multizone Control to Allow Individual Joint Articulation Filling date: 6 Sep 2025 Issue date: 21 May 2020 |
Application | Utility: Radial Polarizer for Particle Detection Filling date: 6 Sep 2025 Issue date: 14 May 2020 |
Application | Utility: System and Method for Determining Type and Size of Defects on Blank Reticles Filling date: 6 Sep 2025 Issue date: 7 May 2020 |
Application | Utility: Shape-Distortion Standards for Calibrating Measurement Tools for Nominally Flat Objects Filling date: 6 Sep 2025 Issue date: 30 Apr 2020 |
Application | Utility: SCANNING DIFFERENTIAL INTERFERENCE CONTRAST IN AN IMAGING SYSTEM DESIGN Filling date: 6 Sep 2025 Issue date: 30 Apr 2020 |
Application | Utility: REMOVABLE OPAQUE COATING FOR ACCURATE OPTICAL TOPOGRAPHY MEASUREMENTS ON TOP SURFACES OF TRANSPARENT FILMS Filling date: 6 Sep 2025 Issue date: 23 Apr 2020 |
Application | Utility: Computationally Efficient X-ray Based Overlay Measurement Filling date: 6 Sep 2025 Issue date: 16 Apr 2020 |
Showing 300 to 350 of 357 patents.