KLA
Patents, Design & Utilities
Last updated:
List of all KLA patents 357 in total
| Status | Patent |
|---|---|
Application | Utility: Setting Up Inspection of a Specimen Filling date: 7 Sep 2025 Issue date: 3 Mar 2022 |
Application | Utility: Programmable and Reconfigurable Mask with MEMS Micro-Mirror Array for Defect Detection Filling date: 7 Sep 2025 Issue date: 3 Mar 2022 |
Grant | Utility: System and method for protecting optics from vacuum ultraviolet light Filling date: 7 Sep 2025 Issue date: 1 Mar 2022 |
Application | Utility: Scanning Electron Microscope Image Anchoring to Design for Array Filling date: 7 Sep 2025 Issue date: 24 Feb 2022 |
Grant | Utility: Laser produced plasma illuminator with liquid sheet jet target Filling date: 7 Sep 2025 Issue date: 22 Feb 2022 |
Grant | Utility: Strontium tetraborate as optical glass material Filling date: 7 Sep 2025 Issue date: 22 Feb 2022 |
Grant | Utility: Characterization system and method with guided defect discovery Filling date: 7 Sep 2025 Issue date: 22 Feb 2022 |
Grant | Utility: Imaging overlay targets using Moire elements and rotational symmetry arrangements Filling date: 7 Sep 2025 Issue date: 22 Feb 2022 |
Application | Utility: OPTICAL IMAGE CONTRAST METRIC FOR OPTICAL TARGET SEARCH Filling date: 7 Sep 2025 Issue date: 17 Feb 2022 |
Grant | Utility: Per-site residuals analysis for accurate metrology measurements Filling date: 7 Sep 2025 Issue date: 15 Feb 2022 |
Application | Utility: MATERIAL RECOVERY SYSTEMS FOR OPTICAL COMPONENTS Filling date: 7 Sep 2025 Issue date: 10 Feb 2022 |
Grant | Utility: Sensitive particle detection with spatially-varying polarization rotator and polarizer Filling date: 7 Sep 2025 Issue date: 8 Feb 2022 |
Grant | Utility: Sample positioning system and method Filling date: 7 Sep 2025 Issue date: 8 Feb 2022 |
Grant | Utility: Frequency conversion using stacked strontium tetraborate plates Filling date: 7 Sep 2025 Issue date: 1 Feb 2022 |
Grant | Utility: Arrayed column detector Filling date: 7 Sep 2025 Issue date: 1 Feb 2022 |
Grant | Utility: Multi-environment polarized infrared reflectometer for semiconductor metrology Filling date: 7 Sep 2025 Issue date: 25 Jan 2022 |
Application | Utility: DEVICE-LIKE OVERLAY METROLOGY TARGETS DISPLAYING MOIRE EFFECTS Filling date: 7 Sep 2025 Issue date: 20 Jan 2022 |
Application | Utility: Metrology Targets for High Topography Semiconductor Stacks Filling date: 7 Sep 2025 Issue date: 20 Jan 2022 |
Grant | Utility: Determining metrology-like information for a specimen using an inspection tool Filling date: 7 Sep 2025 Issue date: 11 Jan 2022 |
Grant | Utility: System and method for wafer-by-wafer overlay feedforward and lot-to-lot feedback control Filling date: 7 Sep 2025 Issue date: 11 Jan 2022 |
Application | Utility: Process-Induced Displacement Characterization During Semiconductor Production Filling date: 7 Sep 2025 Issue date: 6 Jan 2022 |
Application | Utility: TARGET AND ALGORITHM TO MEASURE OVERLAY BY MODELING BACK SCATTERING ELECTRONS ON OVERLAPPING STRUCTURES Filling date: 7 Sep 2025 Issue date: 6 Jan 2022 |
Grant | Utility: Plasmonic photocathode emitters Filling date: 7 Sep 2025 Issue date: 4 Jan 2022 |
Application | Utility: Process Monitoring Of Deep Structures With X-Ray Scatterometry Filling date: 7 Sep 2025 Issue date: 30 Dec 2021 |
Application | Utility: ENABLING SCANNING ELECTRON MICROSCOPE IMAGING WHILE PREVENTING SAMPLE DAMAGE ON SENSITIVE LAYERS USED IN SEMICONDUCTOR MANUFACTURING PROCESSES Filling date: 7 Sep 2025 Issue date: 30 Dec 2021 |
Application | Utility: Semiconductor Overlay Measurements using Machine Learning Filling date: 7 Sep 2025 Issue date: 30 Dec 2021 |
Application | Utility: Performance Optimized Scanning Sequence for eBeam Metrology and Inspection Filling date: 7 Sep 2025 Issue date: 30 Dec 2021 |
Grant | Utility: Performance optimized scanning sequence for eBeam metrology and inspection Filling date: 7 Sep 2025 Issue date: 28 Dec 2021 |
Grant | Utility: Six degree of freedom workpiece stage Filling date: 7 Sep 2025 Issue date: 28 Dec 2021 |
Application | Utility: Frequency Conversion Using Stacked Strontium Tetraborate Plates Filling date: 7 Sep 2025 Issue date: 16 Dec 2021 |
Application | Utility: Metrology System and Method for Measuring Diagonal Diffraction-Based Overlay Targets Filling date: 7 Sep 2025 Issue date: 16 Dec 2021 |
Grant | Utility: System and method for semiconductor device print check alignment Filling date: 7 Sep 2025 Issue date: 14 Dec 2021 |
Application | Utility: METROLOGY TARGET FOR ONE-DIMENSIONAL MEASUREMENT OF PERIODIC MISREGISTRATION Filling date: 7 Sep 2025 Issue date: 9 Dec 2021 |
Application | Utility: Fleet Matching Of Semiconductor Metrology Tools Without Dedicated Quality Control Wafers Filling date: 7 Sep 2025 Issue date: 2 Dec 2021 |
Application | Utility: IMAGING SYSTEM FOR BURIED METROLOGY TARGETS Filling date: 7 Sep 2025 Issue date: 2 Dec 2021 |
Application | Utility: MODE SELECTION AND DEFECT DETECTION TRAINING Filling date: 7 Sep 2025 Issue date: 25 Nov 2021 |
Application | Utility: Measurement Modes for Overlay Filling date: 7 Sep 2025 Issue date: 25 Nov 2021 |
Application | Utility: MULTIPLE-TOOL PARAMETER SET CALIBRATION AND MISREGISTRATION MEASUREMENT SYSTEM AND METHOD Filling date: 7 Sep 2025 Issue date: 25 Nov 2021 |
Application | Utility: DEFECT SIZE MEASUREMENT USING DEEP LEARNING METHODS Filling date: 7 Sep 2025 Issue date: 25 Nov 2021 |
Application | Utility: SELECTION OF REGIONS OF INTEREST FOR MEASUREMENT OF MISREGISTRATION AND AMELIORATION THEREOF Filling date: 7 Sep 2025 Issue date: 25 Nov 2021 |
Grant | Utility: Systems and methods for advanced defect ablation protection Filling date: 7 Sep 2025 Issue date: 23 Nov 2021 |
Grant | Utility: Periodic semiconductor device misregistration metrology system and method Filling date: 7 Sep 2025 Issue date: 23 Nov 2021 |
Application | Utility: APPARATUS AND METHOD FOR ROTATING AN OPTICAL OBJECTIVE Filling date: 7 Sep 2025 Issue date: 18 Nov 2021 |
Application | Utility: SYSTEM, METHOD, AND TARGET FOR WAFER ALIGNMENT Filling date: 7 Sep 2025 Issue date: 18 Nov 2021 |
Application | Utility: MULTI-CONTROLLER INSPECTION SYSTEM Filling date: 7 Sep 2025 Issue date: 11 Nov 2021 |
Grant | Utility: Image noise reduction using stacked denoising auto-encoder Filling date: 7 Sep 2025 Issue date: 9 Nov 2021 |
Application | Utility: PRINT CHECK REPEATER DEFECT DETECTION Filling date: 7 Sep 2025 Issue date: 4 Nov 2021 |
Application | Utility: TRAINING A MACHINE LEARNING MODEL TO GENERATE HIGHER RESOLUTION IMAGES FROM INSPECTION IMAGES Filling date: 7 Sep 2025 Issue date: 4 Nov 2021 |
Grant | Utility: Misregistration metrology by using fringe Moire and optical Moire effects Filling date: 7 Sep 2025 Issue date: 2 Nov 2021 |
Application | Utility: Measuring Temperature-Modulated Properties of a Test Sample Filling date: 7 Sep 2025 Issue date: 28 Oct 2021 |
Showing 100 to 150 of 357 patents.