KLA
Patents, Design & Utilities
Last updated:
List of all KLA patents 357 in total
| Status | Patent |
|---|---|
Application | Utility: PATTERN-TO-DESIGN ALIGNMENT FOR ONE-DIMENSIONAL UNIQUE STRUCTURES Filling date: 6 Sep 2025 Issue date: 25 Mar 2021 |
Application | Utility: SYSTEM AND METHOD FOR APPLICATION OF HARMONIC DETECTIVITY AS A QUALITY INDICATOR FOR IMAGING-BASED OVERLAY MEASUREMENTS Filling date: 6 Sep 2025 Issue date: 18 Mar 2021 |
Application | Utility: Periodic Semiconductor Device Misregistration Metrology System and Method Filling date: 6 Sep 2025 Issue date: 18 Mar 2021 |
Grant | Utility: Sensitive particle detection with spatially-varying polarization rotator and polarizer Filling date: 6 Sep 2025 Issue date: 16 Mar 2021 |
Application | Utility: Automatic Teaching of Substrate Handling for Production and Process-Control Tools Filling date: 6 Sep 2025 Issue date: 11 Mar 2021 |
Application | Utility: Imaging Overlay Targets Using Moire Elements and Rotational Symmetry Arrangements Filling date: 6 Sep 2025 Issue date: 11 Mar 2021 |
Grant | Utility: Radial polarizer for particle detection Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 |
Grant | Utility: Electron gun and electron microscope Filling date: 6 Sep 2025 Issue date: 9 Mar 2021 |
Application | Utility: SENSOR MODULE FOR SCANNING ELECTRON MICROSCOPY APPLICATIONS Filling date: 6 Sep 2025 Issue date: 4 Mar 2021 |
Application | Utility: Methods And Systems For Semiconductor Metrology Based On Wavelength Resolved Soft X-Ray Reflectometry Filling date: 6 Sep 2025 Issue date: 4 Mar 2021 |
Application | Utility: Systems And Methods For Combined Reflectometry And Photoelectron Spectroscopy Filling date: 6 Sep 2025 Issue date: 25 Feb 2021 |
Application | Utility: System and Method to Adjust A Kinetics Model of Surface Reactions During Plasma Processing Filling date: 6 Sep 2025 Issue date: 25 Feb 2021 |
Application | Utility: APPARATUS, METHOD AND COMPUTER PROGRAM PRODUCT FOR DEFECT DETECTION IN WORK PIECES Filling date: 6 Sep 2025 Issue date: 18 Feb 2021 |
Application | Utility: Laser Closed Power Loop with an Acousto-Optic Modulator for Power Modulation Filling date: 6 Sep 2025 Issue date: 18 Feb 2021 |
Application | Utility: VACUUM ACTUATOR CONTAINMENT FOR MOLECULAR CONTAMINANT AND PARTICLE MITIGATION Filling date: 6 Sep 2025 Issue date: 18 Feb 2021 |
Application | Utility: DESIGN-ASSISTED INSPECTION FOR DRAM AND 3D NAND DEVICES Filling date: 6 Sep 2025 Issue date: 18 Feb 2021 |
Grant | Utility: Strontium tetraborate as optical coating material Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: File selection for test image to design alignment Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Detecting defects in a logic region on a wafer Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Application | Utility: Semiconductor Hot-Spot and Process-Window Discovery Combining Optical and Electron-Beam Inspection Filling date: 6 Sep 2025 Issue date: 11 Feb 2021 |
Application | Utility: VAPOR AS A PROTECTANT AND LIFETIME EXTENDER IN OPTICAL SYSTEMS Filling date: 6 Sep 2025 Issue date: 11 Feb 2021 |
Application | Utility: METHOD FOR PROCESS MONITORING WITH OPTICAL INSPECTIONS Filling date: 6 Sep 2025 Issue date: 4 Feb 2021 |
Application | Utility: System and Method for Enhancing Data Processing Throughput Using Less Effective Pixel While Maintaining Wafer Warp Coverage Filling date: 6 Sep 2025 Issue date: 4 Feb 2021 |
Application | Utility: Systems and Methods for MOKE Metrology with Consistent MRAM Die Orientation Filling date: 6 Sep 2025 Issue date: 28 Jan 2021 |
Application | Utility: System and Method for Determining Defects Using Physics-Based Image Perturbations Filling date: 6 Sep 2025 Issue date: 28 Jan 2021 |
Application | Utility: OVERLAY MEASUREMENT TARGETS DESIGN Filling date: 6 Sep 2025 Issue date: 28 Jan 2021 |
Application | Utility: Combined Transmitted and Reflected Light Imaging of Internal Cracks in Semiconductor Devices Filling date: 6 Sep 2025 Issue date: 28 Jan 2021 |
Application | Utility: Automatic Recipe Optimization for Overlay Metrology System Filling date: 6 Sep 2025 Issue date: 28 Jan 2021 |
Application | Utility: System and Method for Rendering SEM Images and Predicting Defect Imaging Conditions of Substrates Using 3D Design Filling date: 6 Sep 2025 Issue date: 28 Jan 2021 |
Application | Utility: MULTIPLE-TOOL PARAMETER SET CONFIGURATION AND MISREGISTRATION MEASUREMENT SYSTEM AND METHOD Filling date: 6 Sep 2025 Issue date: 28 Jan 2021 |
Application | Utility: APPARATUS, METHOD AND COMPUTER PROGRAM PRODUCT FOR DEFECT DETECTION IN WORK PIECES Filling date: 6 Sep 2025 Issue date: 21 Jan 2021 |
Application | Utility: High Efficiency Laser-Sustained Plasma Light Source Filling date: 6 Sep 2025 Issue date: 21 Jan 2021 |
Application | Utility: PARAMETER-STABLE MISREGISTRATION MEASUREMENT AMELIORATION IN SEMICONDUCTOR DEVICES Filling date: 6 Sep 2025 Issue date: 21 Jan 2021 |
Application | Utility: Strontium Tetraborate as Optical Glass Material Filling date: 6 Sep 2025 Issue date: 14 Jan 2021 |
Application | Utility: Methods And Systems For Optical Surface Defect Material Characterization Filling date: 6 Sep 2025 Issue date: 14 Jan 2021 |
Application | Utility: SYSTEMS AND METHODS FOR SELECTING DEFECT DETECTION METHODS FOR INSPECTION OF A SPECIMEN Filling date: 6 Sep 2025 Issue date: 14 Jan 2021 |
Application | Utility: Metrology Target for Scanning Metrology Filling date: 6 Sep 2025 Issue date: 31 Dec 2020 |
Application | Utility: SIX DEGREE OF FREEDOM WORKPIECE STAGE Filling date: 6 Sep 2025 Issue date: 24 Dec 2020 |
Application | Utility: Multi-Stage, Multi-Zone Substrate Positioning Systems Filling date: 6 Sep 2025 Issue date: 24 Dec 2020 |
Application | Utility: EUV In-Situ Linearity Calibration for TDI Image Sensors Using Test Photomasks Filling date: 6 Sep 2025 Issue date: 24 Dec 2020 |
Application | Utility: METRICS FOR ASYMMETRIC WAFER SHAPE CHARACTERIZATION Filling date: 6 Sep 2025 Issue date: 24 Dec 2020 |
Application | Utility: CONTROLLING PRESSURE IN A CAVITY OF A LIGHT SOURCE Filling date: 6 Sep 2025 Issue date: 24 Dec 2020 |
Application | Utility: Visualization of Three-Dimensional Semiconductor Structures Filling date: 6 Sep 2025 Issue date: 17 Dec 2020 |
Grant | Utility: Dispositioning defects detected on extreme ultraviolet photomasks Filling date: 6 Sep 2025 Issue date: 15 Dec 2020 |
Application | Utility: Broadband Ultraviolet Illumination Sources Filling date: 6 Sep 2025 Issue date: 10 Dec 2020 |
Application | Utility: In Situ Process Chamber Chuck Cleaning by Cleaning Substrate Filling date: 6 Sep 2025 Issue date: 10 Dec 2020 |
Grant | Utility: Magneto-optic systems with multi-ID disk positioning Filling date: 6 Sep 2025 Issue date: 8 Dec 2020 |
Application | Utility: DETERMINING ONE OR MORE CHARACTERISTICS OF LIGHT IN AN OPTICAL SYSTEM Filling date: 6 Sep 2025 Issue date: 3 Dec 2020 |
Application | Utility: Wave-Front Aberration Metrology of Extreme Ultraviolet Mask Inspection Systems Filling date: 6 Sep 2025 Issue date: 3 Dec 2020 |
Application | Utility: Optical Etendue Matching Methods for Extreme Ultraviolet Metrology Filling date: 6 Sep 2025 Issue date: 3 Dec 2020 |
Showing 250 to 300 of 357 patents.