Entegris
Utility Patents
Last updated:
List of all Entegris patents 135 in total
| Status | Patent |
|---|---|
Grant | Utility: Hard abrasive particle-free polishing of hard materials Filling date: 6 Sep 2025 Issue date: 3 Aug 2021 |
Grant | Utility: Silicon implantation in substrates and provision of silicon precursor compositions therefor Filling date: 6 Sep 2025 Issue date: 13 Jul 2021 |
Grant | Utility: Silicon nitride etching composition and method Filling date: 6 Sep 2025 Issue date: 6 Jul 2021 |
Grant | Utility: Bulk process gas purification systems Filling date: 6 Sep 2025 Issue date: 6 Jul 2021 |
Grant | Utility: Boron-doped amorphous carbon hard mask and related methods Filling date: 6 Sep 2025 Issue date: 29 Jun 2021 |
Grant | Utility: Cold sintering of solid precursors Filling date: 6 Sep 2025 Issue date: 15 Jun 2021 |
Grant | Utility: System and method for removing airborne molecular contaminants from gas streams Filling date: 6 Sep 2025 Issue date: 1 Jun 2021 |
Grant | Utility: Triiodosilylamine precursor compounds Filling date: 6 Sep 2025 Issue date: 27 Apr 2021 |
Grant | Utility: Airborne molecular contamination filter cartridge system with combustible filter cartridge and reusable frame Filling date: 6 Sep 2025 Issue date: 27 Apr 2021 |
Grant | Utility: Tungsten post-CMP cleaning composition Filling date: 6 Sep 2025 Issue date: 27 Apr 2021 |
Grant | Utility: Composition and process for selectively etching p-doped polysilicon relative to silicon nitride Filling date: 6 Sep 2025 Issue date: 27 Apr 2021 |
Grant | Utility: Blended potting resins and use thereof Filling date: 6 Sep 2025 Issue date: 20 Apr 2021 |
Grant | Utility: Articles coated with fluoro-annealed films Filling date: 6 Sep 2025 Issue date: 30 Mar 2021 |
Grant | Utility: Formulations to selectively etch silicon germanium relative to germanium Filling date: 6 Sep 2025 Issue date: 23 Mar 2021 |
Grant | Utility: Microporous polyamide-imide membranes Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Hydrogenated isotopically enriched boront trifluoride dopant source gas composition Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Heat transfer to ampoule trays Filling date: 6 Sep 2025 Issue date: 19 Jan 2021 |
Grant | Utility: Silicon carbide filter membrane and methods of use Filling date: 6 Sep 2025 Issue date: 19 Jan 2021 |
Grant | Utility: Solid precursor-based delivery of fluid utilizing controlled solids morphology Filling date: 6 Sep 2025 Issue date: 19 Jan 2021 |
Grant | Utility: Wafer shipper with stacked support rings Filling date: 6 Sep 2025 Issue date: 19 Jan 2021 |
Grant | Utility: Ion implantation processes and apparatus using gallium Filling date: 6 Sep 2025 Issue date: 12 Jan 2021 |
Grant | Utility: Coatings for glass-shaping molds and molds comprising the same Filling date: 6 Sep 2025 Issue date: 5 Jan 2021 |
Grant | Utility: Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor deposition of cobalt Filling date: 6 Sep 2025 Issue date: 22 Dec 2020 |
Grant | Utility: Substrate cushion brace retainer Filling date: 6 Sep 2025 Issue date: 22 Dec 2020 |
Grant | Utility: Cyclopentadienyl titanium alkoxides with ozone activated ligands for ALD of TiO2 Filling date: 6 Sep 2025 Issue date: 22 Dec 2020 |
Grant | Utility: Bottom opening pod with magnetically coupled casssettes Filling date: 6 Sep 2025 Issue date: 1 Dec 2020 |
Grant | Utility: Smart package Filling date: 6 Sep 2025 Issue date: 24 Nov 2020 |
Grant | Utility: Gas supply vessel Filling date: 6 Sep 2025 Issue date: 17 Nov 2020 |
Grant | Utility: AlON coated substrate with optional yttria overlayer Filling date: 6 Sep 2025 Issue date: 17 Nov 2020 |
Grant | Utility: Alloys of Co to reduce stress Filling date: 6 Sep 2025 Issue date: 6 Oct 2020 |
Grant | Utility: Grafted ultra high molecular weight polyethylene microporous membranes Filling date: 6 Sep 2025 Issue date: 6 Oct 2020 |
Grant | Utility: High purity gas purifier Filling date: 6 Sep 2025 Issue date: 29 Sep 2020 |
Grant | Utility: Post-etch residue removal for advanced node beol processing Filling date: 6 Sep 2025 Issue date: 29 Sep 2020 |
Grant | Utility: Nodule ratios for targeted enhanced cleaning performance Filling date: 6 Sep 2025 Issue date: 29 Sep 2020 |
Grant | Utility: Substrate container with improved substrate retainer and door latch assist mechanism Filling date: 6 Sep 2025 Issue date: 22 Sep 2020 |
Grant | Utility: Wafer contact surface protrusion profile with improved particle performance Filling date: 6 Sep 2025 Issue date: 8 Sep 2020 |
Grant | Utility: Post chemical mechanical polishing formulations and method of use Filling date: 6 Sep 2025 Issue date: 4 Aug 2020 |
Grant | Utility: Wafer container with external passive getter module Filling date: 6 Sep 2025 Issue date: 4 Aug 2020 |
Grant | Utility: Vacuum chuck with polymeric embossments Filling date: 6 Sep 2025 Issue date: 4 Aug 2020 |
Grant | Utility: Wafer container with latching mechanism for large diameter wafers Filling date: 6 Sep 2025 Issue date: 28 Jul 2020 |
Grant | Utility: Carbon electrode and lithium ion hybrid capacitor comprising same Filling date: 6 Sep 2025 Issue date: 7 Jul 2020 |
Grant | Utility: Liquid dispensing systems with gas removal and sensing capabilities Filling date: 6 Sep 2025 Issue date: 9 Jun 2020 |
Grant | Utility: Depth filtration media with multiple organic and/or inorganic materials Filling date: 6 Sep 2025 Issue date: 2 Jun 2020 |
Grant | Utility: Internal purge diffuser with offset manifold Filling date: 6 Sep 2025 Issue date: 2 Jun 2020 |
Grant | Utility: Compositions and methods for etching silicon nitride-containing substrates Filling date: 6 Sep 2025 Issue date: 12 May 2020 |
Grant | Utility: Diaphragm valve with total valve cavity evacuation Filling date: 6 Sep 2025 Issue date: 12 May 2020 |
Grant | Utility: Aminoiodosilanes and methods of synthesizing these aminoiodosilanes Filling date: 6 Sep 2025 Issue date: 5 May 2020 |
Grant | Utility: Methods and assemblies using fluorine containing and inert gases for plasma flood gun operation Filling date: 6 Sep 2025 Issue date: 14 Apr 2020 |
Grant | Utility: Substrate container with window retention spring Filling date: 6 Sep 2025 Issue date: 17 Mar 2020 |
Grant | Utility: Anti-rotation device for hydraulic connectors Filling date: 6 Sep 2025 Issue date: 10 Mar 2020 |
Showing 50 to 100 of 135 patents.