| Utility: Uniform flow behavior in an electroplating cell Filling date: 6 Sep 2025 Issue date: 14 Jul 2020 | 16 Mar 2018 | 14 Jul 2020 |
| Utility: Removal of electroplating bath additives Filling date: 6 Sep 2025 Issue date: 14 Jul 2020 | 12 Feb 2018 | 14 Jul 2020 |
| Utility: Radiofrequency (RF) filter for multi-frequency RF bias Filling date: 6 Sep 2025 Issue date: 14 Jul 2020 | 6 Oct 2017 | 14 Jul 2020 |
| Utility: Systems and methods for achieving uniformity across a redistribution layer Filling date: 6 Sep 2025 Issue date: 14 Jul 2020 | 14 Mar 2017 | 14 Jul 2020 |
| Utility: Self limiting lateral atomic layer etch Filling date: 6 Sep 2025 Issue date: 14 Jul 2020 | 1 Mar 2017 | 14 Jul 2020 |
| Utility: SYSTEMS AND METHODS FOR TUNING AN IMPEDANCE MATCHING NETWORK IN A STEP-WISE FASHION Filling date: 6 Sep 2025 Issue date: 9 Jul 2020 | 23 Mar 2020 | 9 Jul 2020 |
| Utility: METHOD TO CREATE AIR GAPS Filling date: 6 Sep 2025 Issue date: 9 Jul 2020 | 20 Mar 2020 | 9 Jul 2020 |
| Utility: TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING Filling date: 6 Sep 2025 Issue date: 9 Jul 2020 | 20 Mar 2020 | 9 Jul 2020 |
| Utility: INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL AND PRECURSOR GAS TO A DOWNSTREAM CHAMBER TO ENABLE REMOTE PLASMA FILM DEPOSITION Filling date: 6 Sep 2025 Issue date: 9 Jul 2020 | 16 Mar 2020 | 9 Jul 2020 |
| Utility: SELECTIVE DEPOSITION OF SILICON OXIDE Filling date: 6 Sep 2025 Issue date: 9 Jul 2020 | 16 Mar 2020 | 9 Jul 2020 |
| Utility: Systems and Methods for Controlling Substrate Approach Toward a Target Horizontal Plane Filling date: 6 Sep 2025 Issue date: 9 Jul 2020 | 13 Mar 2020 | 9 Jul 2020 |
| Utility: Apparatus for Thermal Control of Tubing Assembly and Associated Methods Filling date: 6 Sep 2025 Issue date: 9 Jul 2020 | 13 Mar 2020 | 9 Jul 2020 |
| Utility: METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY Filling date: 6 Sep 2025 Issue date: 9 Jul 2020 | 13 Jan 2020 | 9 Jul 2020 |
| Utility: SPLIT CHAMBER ASSEMBLY Filling date: 6 Sep 2025 Issue date: 9 Jul 2020 | 4 Jan 2019 | 9 Jul 2020 |
| Utility: METAL CONTAMINATION REDUCTION IN SUBSTRATE PROCESSING SYSTEMS WITH TRANSFORMER COUPLED PLASMA Filling date: 6 Sep 2025 Issue date: 9 Jul 2020 | 3 Jan 2019 | 9 Jul 2020 |
| Utility: DISTANCE MEASUREMENT BETWEEN GAS DISTRIBUTION DEVICE AND SUBSTRATE SUPPORT AT HIGH TEMPERATURES Filling date: 6 Sep 2025 Issue date: 9 Jul 2020 | 3 Jan 2019 | 9 Jul 2020 |
| Utility: Method to recess cobalt for gate metal application Filling date: 6 Sep 2025 Issue date: 7 Jul 2020 | 30 Aug 2019 | 7 Jul 2020 |
| Utility: Defect control and stability of DC bias in RF plasma-based substrate processing systems using molecular reactive purge gas Filling date: 6 Sep 2025 Issue date: 7 Jul 2020 | 8 Aug 2018 | 7 Jul 2020 |
| Utility: Using modeling to determine ion energy associated with a plasma system Filling date: 6 Sep 2025 Issue date: 7 Jul 2020 | 9 Nov 2017 | 7 Jul 2020 |
| Utility: End effector assembly for clean/dirty substrate handling Filling date: 6 Sep 2025 Issue date: 7 Jul 2020 | 29 Aug 2017 | 7 Jul 2020 |
| Utility: Matched TCR joule heater designs for electrostatic chucks Filling date: 6 Sep 2025 Issue date: 7 Jul 2020 | 13 Oct 2016 | 7 Jul 2020 |
| Utility: METAL FILL PROCESS FOR THREE-DIMENSIONAL VERTICAL NAND WORDLINE Filling date: 6 Sep 2025 Issue date: 2 Jul 2020 | 10 Aug 2018 | 2 Jul 2020 |
| Utility: Wafer positioning pedestal for semiconductor processing Filling date: 6 Sep 2025 Issue date: 30 Jun 2020 | 15 Jul 2019 | 30 Jun 2020 |
| Utility: Estimation of lifetime remaining for a consumable-part in a semiconductor manufacturing chamber Filling date: 6 Sep 2025 Issue date: 30 Jun 2020 | 7 Aug 2018 | 30 Jun 2020 |
| Utility: Thickness compensation by modulation of number of deposition cycles as a function of chamber accumulation for wafer to wafer film thickness matching Filling date: 6 Sep 2025 Issue date: 30 Jun 2020 | 16 Oct 2017 | 30 Jun 2020 |
| Utility: Chamber member of a plasma source and pedestal with radially outward positioned lift pins for translation of a substrate c-ring Filling date: 6 Sep 2025 Issue date: 30 Jun 2020 | 9 Feb 2017 | 30 Jun 2020 |
| Utility: SUBSTRATE PROCESSING SYSTEM WITH TANDEM SOURCE ACTIVATION FOR CVD Filling date: 6 Sep 2025 Issue date: 25 Jun 2020 | 2 Mar 2020 | 25 Jun 2020 |
| Utility: DEPOSITION TOOL AND METHOD FOR DEPOSITING METAL OXIDE FILMS ON ORGANIC MATERIALS Filling date: 6 Sep 2025 Issue date: 25 Jun 2020 | 28 Feb 2020 | 25 Jun 2020 |
| Utility: PLASMA ETCHING DEVICE WITH PLASMA ETCH RESISTANT COATING Filling date: 6 Sep 2025 Issue date: 25 Jun 2020 | 24 Feb 2020 | 25 Jun 2020 |
| Utility: Minimization of carbon loss in ALD SiO2 deposition on hardmask films Filling date: 6 Sep 2025 Issue date: 23 Jun 2020 | 1 Jul 2019 | 23 Jun 2020 |
| Utility: Control of current density in an electroplating apparatus Filling date: 6 Sep 2025 Issue date: 23 Jun 2020 | 10 Jan 2019 | 23 Jun 2020 |
| Utility: Electro-oxidative metal removal in through mask interconnect fabrication Filling date: 6 Sep 2025 Issue date: 23 Jun 2020 | 19 Jul 2018 | 23 Jun 2020 |
| Utility: Electrostatic chuck filter box and mounting bracket Filling date: 6 Sep 2025 Issue date: 23 Jun 2020 | 17 May 2018 | 23 Jun 2020 |
| Utility: Air cooled faraday shield and methods for using the same Filling date: 6 Sep 2025 Issue date: 23 Jun 2020 | 31 Jan 2018 | 23 Jun 2020 |
| Utility: Atomic layer etching methods and apparatus Filling date: 6 Sep 2025 Issue date: 23 Jun 2020 | 20 Dec 2017 | 23 Jun 2020 |
| Utility: Identifying components associated with a fault in a plasma system Filling date: 6 Sep 2025 Issue date: 23 Jun 2020 | 8 Dec 2017 | 23 Jun 2020 |
| Utility: Multi-plane heater for semiconductor substrate support Filling date: 6 Sep 2025 Issue date: 23 Jun 2020 | 11 Dec 2015 | 23 Jun 2020 |
| Utility: Separation of Plasma Suppression and Wafer Edge to Improve Edge Film Thickness Uniformity Filling date: 6 Sep 2025 Issue date: 18 Jun 2020 | 27 Feb 2020 | 18 Jun 2020 |
| Utility: COMBINER AND DISTRIBUTOR FOR ADJUSTING IMPEDANCES OR POWER ACROSS MULTIPLE PLASMA PROCESSING STATIONS Filling date: 6 Sep 2025 Issue date: 18 Jun 2020 | 21 Feb 2020 | 18 Jun 2020 |
| Utility: VACUUM CHAMBER OPENING SYSTEM Filling date: 6 Sep 2025 Issue date: 18 Jun 2020 | 17 Dec 2018 | 18 Jun 2020 |
| Utility: ETCHING CARBON LAYER USING DOPED CARBON AS A HARD MASK Filling date: 6 Sep 2025 Issue date: 18 Jun 2020 | 14 Dec 2018 | 18 Jun 2020 |
| Utility: REAL-TIME HEALTH MONITORING OF SEMICONDUCTOR MANUFACTURING EQUIPMENT Filling date: 6 Sep 2025 Issue date: 18 Jun 2020 | 13 Dec 2018 | 18 Jun 2020 |
| Utility: RF antenna producing a uniform near-field Poynting vector Filling date: 6 Sep 2025 Issue date: 16 Jun 2020 | 15 Jul 2019 | 16 Jun 2020 |
| Utility: Etching substrates using ALE and selective deposition Filling date: 6 Sep 2025 Issue date: 16 Jun 2020 | 21 Mar 2019 | 16 Jun 2020 |
| Utility: FEATURE FILL WITH NUCLEATION INHIBITION Filling date: 6 Sep 2025 Issue date: 11 Jun 2020 | 18 Feb 2020 | 11 Jun 2020 |
| Utility: FEATURE FILL WITH MULTI-STAGE NUCLEATION INHIBITION Filling date: 6 Sep 2025 Issue date: 11 Jun 2020 | 10 Feb 2020 | 11 Jun 2020 |
| Utility: ACTUATOR TO ADJUST DYNAMICALLY SHOWERHEAD TILT IN A SEMICONDUCTOR- PROCESSING APPARATUS Filling date: 6 Sep 2025 Issue date: 11 Jun 2020 | 12 Dec 2019 | 11 Jun 2020 |
| Utility: ENDPOINT SENSOR BASED CONTROL INCLUDING ADJUSTMENT OF AN EDGE RING PARAMETER FOR EACH SUBSTRATE PROCESSED TO MAINTAIN ETCH RATE UNIFORMITY Filling date: 6 Sep 2025 Issue date: 11 Jun 2020 | 10 Dec 2018 | 11 Jun 2020 |
| Utility: Selective atomic layer deposition with post-dose treatment Filling date: 6 Sep 2025 Issue date: 9 Jun 2020 | 12 Jul 2018 | 9 Jun 2020 |
| Utility: Systems and methods for applying frequency and match tuning in a non-overlapping manner for processing substrate Filling date: 6 Sep 2025 Issue date: 9 Jun 2020 | 15 Nov 2017 | 9 Jun 2020 |
