Lam Research
Patents, Design & Utilities
Last updated:
List of all Lam Research patents 883 in total
| Status | Patent |
|---|---|
Grant | Utility: Apparatus for thermal control of tubing assembly and associated methods Filling date: 6 Sep 2025 Issue date: 17 Mar 2020 |
Application | Utility: TIN OXIDE FILMS IN SEMICONDUCTOR DEVICE MANUFACTURING Filling date: 6 Sep 2025 Issue date: 12 Mar 2020 |
Application | Utility: REDUCED FOOTPRINT PLATFORM ARCHITECTURE WITH LINEAR VACUUM TRANSFER MODULE Filling date: 6 Sep 2025 Issue date: 12 Mar 2020 |
Grant | Utility: Photoresist design layout pattern proximity correction through fast edge placement error prediction via a physics-based etch profile modeling framework Filling date: 6 Sep 2025 Issue date: 10 Mar 2020 |
Grant | Utility: Inductive current sensor on printed circuit board Filling date: 6 Sep 2025 Issue date: 10 Mar 2020 |
Application | Utility: LOW RESISTIVITY FILMS CONTAINING MOLYBDENUM Filling date: 6 Sep 2025 Issue date: 5 Mar 2020 |
Application | Utility: SEGMENTING A MODEL WITHIN A PLASMA SYSTEM Filling date: 6 Sep 2025 Issue date: 5 Mar 2020 |
Application | Utility: TWO-STAGE PIN LIFTER FOR DE-CHUCK OPERATIONS Filling date: 6 Sep 2025 Issue date: 5 Mar 2020 |
Application | Utility: Modular Recipe Controlled Calibration (MRCC) Apparatus Used to Balance Plasma in Multiple Station System Filling date: 6 Sep 2025 Issue date: 5 Mar 2020 |
Application | Utility: SOFTWARE EMULATOR FOR HARDWARE COMPONENTS IN A GAS DELIVERY SYSTEM OF SUBSTRATE PROCESSING SYSTEM Filling date: 6 Sep 2025 Issue date: 5 Mar 2020 |
Application | Utility: USING IDENTIFIERS TO MAP EDGE RING PART NUMBERS ONTO SLOT NUMBERS Filling date: 6 Sep 2025 Issue date: 5 Mar 2020 |
Application | Utility: METHOD AND APPARATUS FOR PROVIDING STATION TO STATION UNIFORMITY Filling date: 6 Sep 2025 Issue date: 5 Mar 2020 |
Application | Utility: CONFINEMENT RING WITH EXTENDED LIFE Filling date: 6 Sep 2025 Issue date: 5 Mar 2020 |
Grant | Utility: Multi-level pulsing of DC and RF signals Filling date: 6 Sep 2025 Issue date: 3 Mar 2020 |
Grant | Utility: Feature fill with multi-stage nucleation inhibition Filling date: 6 Sep 2025 Issue date: 3 Mar 2020 |
Grant | Utility: Feature fill with nucleation inhibition Filling date: 6 Sep 2025 Issue date: 3 Mar 2020 |
Grant | Utility: Staircase encapsulation in 3D NAND fabrication Filling date: 6 Sep 2025 Issue date: 3 Mar 2020 |
Grant | Utility: Differentially pumped reactive gas injector Filling date: 6 Sep 2025 Issue date: 3 Mar 2020 |
Grant | Utility: Single ALD cycle thickness control in multi-station substrate deposition systems Filling date: 6 Sep 2025 Issue date: 3 Mar 2020 |
Grant | Utility: Tandem source activation for CVD of films Filling date: 6 Sep 2025 Issue date: 3 Mar 2020 |
Application | Utility: SHOWERHEAD WITH AIR-GAPPED PLENUMS AND OVERHEAD ISOLATION GAS DISTRIBUTOR Filling date: 6 Sep 2025 Issue date: 27 Feb 2020 |
Application | Utility: SYSTEMS AND METHODS FOR REDUCING POWER REFLECTED TOWARDS A HIGHER FREQUENCY RF GENERATOR DURING A PERIOD OF A LOWER RF GENERATOR AND FOR USING A RELATIONSHIP TO REDUCE REFLECTED POWER Filling date: 6 Sep 2025 Issue date: 27 Feb 2020 |
Application | Utility: ELECTROCHEMICAL DOPING OF THIN METAL LAYERS EMPLOYING UNDERPOTENTIAL DEPOSITION AND THERMAL TREATMENT Filling date: 6 Sep 2025 Issue date: 27 Feb 2020 |
Application | Utility: SUPPRESSING INTERFACIAL REACTIONS BY VARYING THE WAFER TEMPERATURE THROUGHOUT DEPOSITION Filling date: 6 Sep 2025 Issue date: 27 Feb 2020 |
Application | Utility: CONFORMAL DAMAGE-FREE ENCAPSULATION OF CHALCOGENIDE MATERIALS Filling date: 6 Sep 2025 Issue date: 27 Feb 2020 |
Application | Utility: EXTRACTING REAL-TIME DATA FROM ETHERCAT SENSOR BUS IN A SUBSTRATE PROCESSING SYSTEM Filling date: 6 Sep 2025 Issue date: 27 Feb 2020 |
Application | Utility: CERAMIC BASEPLATE WITH CHANNELS HAVING NON-SQUARE CORNERS Filling date: 6 Sep 2025 Issue date: 27 Feb 2020 |
Application | Utility: METHOD AND APPARATUS FOR MODULATING FILM UNIFORMITY Filling date: 6 Sep 2025 Issue date: 27 Feb 2020 |
Application | Utility: METHOD FOR ETCHING AN ETCH LAYER Filling date: 6 Sep 2025 Issue date: 27 Feb 2020 |
Grant | Utility: Multi-level parameter and frequency pulsing with a low angular spread Filling date: 6 Sep 2025 Issue date: 25 Feb 2020 |
Grant | Utility: Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing Filling date: 6 Sep 2025 Issue date: 25 Feb 2020 |
Grant | Utility: Method of etch model calibration using optical scatterometry Filling date: 6 Sep 2025 Issue date: 25 Feb 2020 |
Grant | Utility: Method for preventing line bending during metal fill process Filling date: 6 Sep 2025 Issue date: 25 Feb 2020 |
Grant | Utility: Pad raising mechanism in wafer positioning pedestal for semiconductor processing Filling date: 6 Sep 2025 Issue date: 25 Feb 2020 |
Application | Utility: SYMMETRIC PRECURSOR DELIVERY Filling date: 6 Sep 2025 Issue date: 20 Feb 2020 |
Application | Utility: MODIFICATION OF SNO2 SURFACE FOR EUV LITHOGRAPHY Filling date: 6 Sep 2025 Issue date: 20 Feb 2020 |
Grant | Utility: Methods of encapsulation Filling date: 6 Sep 2025 Issue date: 18 Feb 2020 |
Grant | Utility: Atomic layer etching of tantalum Filling date: 6 Sep 2025 Issue date: 18 Feb 2020 |
Grant | Utility: Selective deposition of etch-stop layer for enhanced patterning Filling date: 6 Sep 2025 Issue date: 18 Feb 2020 |
Grant | Utility: Designer atomic layer etching Filling date: 6 Sep 2025 Issue date: 18 Feb 2020 |
Grant | Utility: Continuous and pulsed RF plasma for etching metals Filling date: 6 Sep 2025 Issue date: 18 Feb 2020 |
Grant | Utility: Equipment front end module gas recirculation Filling date: 6 Sep 2025 Issue date: 18 Feb 2020 |
Grant | Utility: Ultrathin atomic layer deposition film accuracy thickness control Filling date: 6 Sep 2025 Issue date: 18 Feb 2020 |
Grant | Utility: Methods of fault detection for multiplexed heater array Filling date: 6 Sep 2025 Issue date: 18 Feb 2020 |
Application | Utility: MODULE INCLUDING METALLIZED CERAMIC TUBES FOR RF AND GAS DELIVERY Filling date: 6 Sep 2025 Issue date: 13 Feb 2020 |
Application | Utility: METHOD TO CLEAN SNO2 FILM FROM CHAMBER Filling date: 6 Sep 2025 Issue date: 13 Feb 2020 |
Application | Utility: PROGRESSIVE HEATING OF COMPONENTS OF SUBSTRATE PROCESSING SYSTEMS USING TCR ELEMENT-BASED HEATERS Filling date: 6 Sep 2025 Issue date: 13 Feb 2020 |
Application | Utility: CONTROLLING SHOWERHEAD HEATING VIA RESISTIVE THERMAL MEASUREMENTS Filling date: 6 Sep 2025 Issue date: 13 Feb 2020 |
Application | Utility: HYBRID FLOW METROLOGY FOR IMPROVED CHAMBER MATCHING Filling date: 6 Sep 2025 Issue date: 13 Feb 2020 |
Application | Utility: CHEMICAL VAPOR DEPOSITION TOOL FOR PREVENTING OR SUPPRESSING ARCING Filling date: 6 Sep 2025 Issue date: 13 Feb 2020 |
Showing 600 to 650 of 883 patents.