| Utility: CONDITIONING CHAMBER COMPONENT Filling date: 6 Sep 2025 Issue date: 8 Jul 2021 | 24 Mar 2021 | 8 Jul 2021 |
| Utility: DIRECT FREQUENCY TUNING FOR MATCHLESS PLASMA SOURCE IN SUBSTRATE PROCESSING SYSTEMS Filling date: 6 Sep 2025 Issue date: 8 Jul 2021 | 8 Aug 2019 | 8 Jul 2021 |
| Utility: Wafer positioning pedestal for semiconductor processing Filling date: 6 Sep 2025 Issue date: 6 Jul 2021 | 16 Jun 2020 | 6 Jul 2021 |
| Utility: Metal contamination reduction in substrate processing systems with transformer coupled plasma Filling date: 6 Sep 2025 Issue date: 6 Jul 2021 | 3 Jan 2019 | 6 Jul 2021 |
| Utility: Methods and systems for controlling wafer fabrication process Filling date: 6 Sep 2025 Issue date: 6 Jul 2021 | 14 Sep 2018 | 6 Jul 2021 |
| Utility: Method and apparatus for determining process rate Filling date: 6 Sep 2025 Issue date: 6 Jul 2021 | 3 Aug 2017 | 6 Jul 2021 |
| Utility: METHOD OF IMPROVING DEPOSITION INDUCED CD IMBALANCE USING SPATIALLY SELECTIVE ASHING OF CARBON BASED FILM Filling date: 6 Sep 2025 Issue date: 1 Jul 2021 | 17 Mar 2021 | 1 Jul 2021 |
| Utility: MODULAR RECIPE CONTROLLED CALIBRATION (MRCC) APPARATUS USED TO BALANCE PLASMA IN MULTIPLE STATION SYSTEM Filling date: 6 Sep 2025 Issue date: 1 Jul 2021 | 17 Mar 2021 | 1 Jul 2021 |
| Utility: Systems and methods for achieving peak ion energy enhancement with a low angular spread Filling date: 6 Sep 2025 Issue date: 29 Jun 2021 | 6 Aug 2019 | 29 Jun 2021 |
| Utility: Dynamic modulation of cross flow manifold during elecroplating Filling date: 6 Sep 2025 Issue date: 29 Jun 2021 | 5 Jun 2019 | 29 Jun 2021 |
| Utility: Gap fill using carbon-based films Filling date: 6 Sep 2025 Issue date: 29 Jun 2021 | 16 Nov 2018 | 29 Jun 2021 |
| Utility: Methods and systems for advanced ion control for etching processes Filling date: 6 Sep 2025 Issue date: 29 Jun 2021 | 20 Nov 2017 | 29 Jun 2021 |
| Utility: Method of controlling a patterning process, lithographic apparatus, metrology apparatus lithographic cell and associated computer program Filling date: 6 Sep 2025 Issue date: 29 Jun 2021 | 16 Feb 2017 | 29 Jun 2021 |
| Utility: Methods and Systems for Advanced Ion Control for Etching Processes Filling date: 6 Sep 2025 Issue date: 24 Jun 2021 | 9 Mar 2021 | 24 Jun 2021 |
| Utility: ALTERNATIVE INTEGRATION FOR REDISTRIBUTION LAYER PROCESS Filling date: 6 Sep 2025 Issue date: 24 Jun 2021 | 26 Jul 2019 | 24 Jun 2021 |
| Utility: DETECTING WAFER STATUS IN A WAFER CHUCK ASSEMBLY Filling date: 6 Sep 2025 Issue date: 17 Jun 2021 | 1 Mar 2021 | 17 Jun 2021 |
| Utility: EDGE RING ARRANGEMENT WITH MOVEABLE EDGE RINGS Filling date: 6 Sep 2025 Issue date: 17 Jun 2021 | 22 Feb 2021 | 17 Jun 2021 |
| Utility: GAS MIXER Filling date: 6 Sep 2025 Issue date: 17 Jun 2021 | 2 Feb 2021 | 17 Jun 2021 |
| Utility: COMPACT HIGH DENSITY PLASMA SOURCE Filling date: 6 Sep 2025 Issue date: 17 Jun 2021 | 26 Jul 2019 | 17 Jun 2021 |
| Utility: Multiple-output radiofrequency matching module and associated methods Filling date: 6 Sep 2025 Issue date: 15 Jun 2021 | 13 Apr 2020 | 15 Jun 2021 |
| Utility: Amorphous carbon layer opening process Filling date: 6 Sep 2025 Issue date: 15 Jun 2021 | 28 Jan 2019 | 15 Jun 2021 |
| Utility: Real-time health monitoring of semiconductor manufacturing equipment Filling date: 6 Sep 2025 Issue date: 15 Jun 2021 | 13 Dec 2018 | 15 Jun 2021 |
| Utility: Use of voltage and current measurements to control dual zone ceramic pedestals Filling date: 6 Sep 2025 Issue date: 8 Jun 2021 | 27 Apr 2020 | 8 Jun 2021 |
| Utility: Vacuum pump protection against deposition byproduct buildup Filling date: 6 Sep 2025 Issue date: 8 Jun 2021 | 26 Sep 2019 | 8 Jun 2021 |
| Utility: Systems and methods for calibrating scalar field contribution values for a limited number of sensors including a temperature value of an electrostatic chuck and estimating temperature distribution profiles based on calibrated values Filling date: 6 Sep 2025 Issue date: 8 Jun 2021 | 9 Jul 2019 | 8 Jun 2021 |
| Utility: Modification of SNO.sub.2 surface for EUV lithography Filling date: 6 Sep 2025 Issue date: 8 Jun 2021 | 14 Aug 2018 | 8 Jun 2021 |
| Utility: Tin oxide thin film spacers in semiconductor device manufacturing Filling date: 6 Sep 2025 Issue date: 8 Jun 2021 | 22 Sep 2017 | 8 Jun 2021 |
| Utility: ELECTROSTATICALLY CLAMPED EDGE RING Filling date: 6 Sep 2025 Issue date: 3 Jun 2021 | 12 Feb 2021 | 3 Jun 2021 |
| Utility: SUBSTRATE SUPPORT WITH IMPROVED PROCESS UNIFORMITY Filling date: 6 Sep 2025 Issue date: 3 Jun 2021 | 18 Jan 2021 | 3 Jun 2021 |
| Utility: ZINCATING AND DOPING OF METAL LINER FOR LINER PASSIVATION AND ADHESION IMPROVEMENT Filling date: 6 Sep 2025 Issue date: 3 Jun 2021 | 28 Jun 2019 | 3 Jun 2021 |
| Utility: OXIDATION RESISTANT PROTECTIVE LAYER IN CHAMBER CONDITIONING Filling date: 6 Sep 2025 Issue date: 3 Jun 2021 | 6 Dec 2018 | 3 Jun 2021 |
| Utility: Symmetric precursor delivery Filling date: 6 Sep 2025 Issue date: 1 Jun 2021 | 17 Aug 2018 | 1 Jun 2021 |
| Utility: Electrostatic chuck design for cooling-gas light-up prevention Filling date: 6 Sep 2025 Issue date: 1 Jun 2021 | 10 Aug 2018 | 1 Jun 2021 |
| Utility: Optimized low energy / high productivity deposition system Filling date: 6 Sep 2025 Issue date: 1 Jun 2021 | 11 Jan 2018 | 1 Jun 2021 |
| Utility: RESIST AND ETCH MODELING Filling date: 6 Sep 2025 Issue date: 27 May 2021 | 8 Apr 2019 | 27 May 2021 |
| Utility: COPPER ELECTROFILL ON NON-COPPER LINER LAYERS Filling date: 6 Sep 2025 Issue date: 27 May 2021 | 5 Apr 2019 | 27 May 2021 |
| Utility: Integrated showerhead with improved hole pattern for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition Filling date: 6 Sep 2025 Issue date: 25 May 2021 | 7 Dec 2018 | 25 May 2021 |
| Utility: TUNABLE UPPER PLASMA-EXCLUSION-ZONE RING FOR A BEVEL ETCHER Filling date: 6 Sep 2025 Issue date: 20 May 2021 | 29 Jan 2021 | 20 May 2021 |
| Utility: Method and Apparatus for Anisotropic Pattern Etching and Treatment Filling date: 6 Sep 2025 Issue date: 20 May 2021 | 29 Jan 2021 | 20 May 2021 |
| Utility: COPPER ELECTRODEPOSITION SEQUENCE FOR THE FILLING OF COBALT LINED FEATURES Filling date: 6 Sep 2025 Issue date: 20 May 2021 | 26 Jan 2021 | 20 May 2021 |
| Utility: Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 29 Aug 2019 | 18 May 2021 |
| Utility: Plasma apparatus for high aspect ratio selective lateral etch using cyclic passivation and etching Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 7 Mar 2019 | 18 May 2021 |
| Utility: Monoenergetic ion generation for controlled etch Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 13 Jul 2018 | 18 May 2021 |
| Utility: Temperature-tuned substrate support for substrate processing systems Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 12 May 2017 | 18 May 2021 |
| Utility: Components such as edge rings including chemical vapor deposition (CVD) diamond coating with high purity SP3 bonds for plasma processing systems Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 9 Feb 2017 | 18 May 2021 |
| Utility: Systems and methods for performing edge ring characterization Filling date: 6 Sep 2025 Issue date: 18 May 2021 | 11 Jan 2017 | 18 May 2021 |
| Utility: APPARATUS WITH OPTICAL CAVITY FOR DETERMINING PROCESS RATE Filling date: 6 Sep 2025 Issue date: 13 May 2021 | 20 Jan 2021 | 13 May 2021 |
| Utility: DEPOSITION OF PURE METAL FILMS Filling date: 6 Sep 2025 Issue date: 13 May 2021 | 25 Jul 2019 | 13 May 2021 |
| Utility: ATOMIC LAYER ETCH AND DEPOSITION PROCESSING SYSTEMS INCLUDING A LENS CIRCUIT WITH A TELE-CENTRIC LENS, AN OPTICAL BEAM FOLDING ASSEMBLY, OR A POLYGON SCANNER Filling date: 6 Sep 2025 Issue date: 13 May 2021 | 2 May 2019 | 13 May 2021 |
| Utility: DETERMINING AND CONTROLLING SUBSTRATE TEMPERATURE DURING SUBSTRATE PROCESSING Filling date: 6 Sep 2025 Issue date: 13 May 2021 | 8 Apr 2019 | 13 May 2021 |
