Lam Research
Patents, Design & Utilities
Last updated:
List of all Lam Research patents 883 in total
| Status | Patent |
|---|---|
Grant | Utility: Deposition of aluminum oxide etch stop layers Filling date: 6 Sep 2025 Issue date: 13 Oct 2020 |
Grant | Utility: Active showerhead Filling date: 6 Sep 2025 Issue date: 13 Oct 2020 |
Grant | Utility: Method and apparatus for providing station to station uniformity Filling date: 6 Sep 2025 Issue date: 13 Oct 2020 |
Grant | Utility: Electrostatic chuck assembly incorporation a gasket for distributing RF power to a ceramic embedded electrode Filling date: 6 Sep 2025 Issue date: 13 Oct 2020 |
Grant | Utility: Selective inhibition in atomic layer deposition of silicon-containing films Filling date: 6 Sep 2025 Issue date: 13 Oct 2020 |
Grant | Utility: Edge ring dimensioned to extend lifetime of elastomer seal in a plasma processing chamber Filling date: 6 Sep 2025 Issue date: 13 Oct 2020 |
Application | Utility: Air Cooled Faraday Shield and Methods for Using the Same Filling date: 6 Sep 2025 Issue date: 8 Oct 2020 |
Application | Utility: ELECTROSTATIC CHUCK FILTER BOX AND MOUNTING BRACKET Filling date: 6 Sep 2025 Issue date: 8 Oct 2020 |
Grant | Utility: Additively manufactured gas distribution manifold Filling date: 6 Sep 2025 Issue date: 6 Oct 2020 |
Grant | Utility: Enhanced automatic wafer centering system and techniques for same Filling date: 6 Sep 2025 Issue date: 6 Oct 2020 |
Grant | Utility: Eliminating yield impact of stochastics in lithography Filling date: 6 Sep 2025 Issue date: 6 Oct 2020 |
Application | Utility: WAFER POSITIONING PEDESTAL FOR SEMICONDUCTOR PROCESSING Filling date: 6 Sep 2025 Issue date: 1 Oct 2020 |
Application | Utility: ATOMIC LAYER ETCHING METHODS AND APPARATUS Filling date: 6 Sep 2025 Issue date: 1 Oct 2020 |
Application | Utility: REMOVAL OF ELECTROPLATING BATH ADDITIVES Filling date: 6 Sep 2025 Issue date: 1 Oct 2020 |
Application | Utility: BOTTOM AND MIDDLE EDGE RINGS Filling date: 6 Sep 2025 Issue date: 1 Oct 2020 |
Grant | Utility: Fiducial-filtering automatic wafer centering process and associated system Filling date: 6 Sep 2025 Issue date: 29 Sep 2020 |
Grant | Utility: Wafer transport assembly with integrated buffers Filling date: 6 Sep 2025 Issue date: 29 Sep 2020 |
Application | Utility: Confinement Ring for Use in a Plasma Processing System Filling date: 6 Sep 2025 Issue date: 24 Sep 2020 |
Application | Utility: THICKNESS COMPENSATION BY MODULATION OF NUMBER OF DEPOSITION CYCLES AS A FUNCTION OF CHAMBER ACCUMULATION FOR WAFER TO WAFER FILM THICKNESS MATCHING Filling date: 6 Sep 2025 Issue date: 24 Sep 2020 |
Grant | Utility: Atomic layer etching using a combination of plasma and vapor treatments Filling date: 6 Sep 2025 Issue date: 22 Sep 2020 |
Grant | Utility: RF voltage sensor incorporating multiple voltage dividers for detecting RF voltages at a pickup device of a substrate support Filling date: 6 Sep 2025 Issue date: 22 Sep 2020 |
Grant | Utility: Cobalt etch back Filling date: 6 Sep 2025 Issue date: 22 Sep 2020 |
Grant | Utility: Method and apparatus for determining etch process parameters Filling date: 6 Sep 2025 Issue date: 22 Sep 2020 |
Grant | Utility: Methods and apparatus for controlling delivery of cross flowing and impinging electrolyte during electroplating Filling date: 6 Sep 2025 Issue date: 22 Sep 2020 |
Grant | Utility: Chemical deposition chamber having gas seal Filling date: 6 Sep 2025 Issue date: 22 Sep 2020 |
Grant | Utility: Low resistivity films containing molybdenum Filling date: 6 Sep 2025 Issue date: 15 Sep 2020 |
Grant | Utility: Cluster tool system with step ladder assembly Filling date: 6 Sep 2025 Issue date: 15 Sep 2020 |
Grant | Utility: Selective deposition of silicon nitride on silicon oxide using catalytic control Filling date: 6 Sep 2025 Issue date: 15 Sep 2020 |
Grant | Utility: Monitoring electrolytes during electroplating Filling date: 6 Sep 2025 Issue date: 15 Sep 2020 |
Grant | Utility: Methods for controlling plasma glow discharge in a plasma chamber Filling date: 6 Sep 2025 Issue date: 15 Sep 2020 |
Application | Utility: Frequency Tuning for a Matchless Plasma Source Filling date: 6 Sep 2025 Issue date: 10 Sep 2020 |
Application | Utility: ATOMIC LAYER ETCH OF TUNGSTEN FOR ENHANCED TUNGSTEN DEPOSITION FILL Filling date: 6 Sep 2025 Issue date: 10 Sep 2020 |
Grant | Utility: Method to form ultrashallow junctions using atomic layer deposition and annealing Filling date: 6 Sep 2025 Issue date: 8 Sep 2020 |
Grant | Utility: Methods and systems for determining a fault in a gas heater channel Filling date: 6 Sep 2025 Issue date: 8 Sep 2020 |
Grant | Utility: Automated replacement of consumable parts using interfacing chambers Filling date: 6 Sep 2025 Issue date: 8 Sep 2020 |
Grant | Utility: Power switching system for ESC with array of thermal control elements Filling date: 6 Sep 2025 Issue date: 8 Sep 2020 |
Application | Utility: CONTROL OF CURRENT DENSITY IN AN ELECTROPLATING APPARATUS Filling date: 6 Sep 2025 Issue date: 3 Sep 2020 |
Application | Utility: ELECTRO-OXIDATIVE METAL REMOVAL IN THROUGH MASK INTERCONNECT FABRICATION Filling date: 6 Sep 2025 Issue date: 3 Sep 2020 |
Grant | Utility: Methods of encapsulation Filling date: 6 Sep 2025 Issue date: 1 Sep 2020 |
Grant | Utility: Segmenting a model within a plasma system Filling date: 6 Sep 2025 Issue date: 1 Sep 2020 |
Grant | Utility: Showerhead tilt mechanism Filling date: 6 Sep 2025 Issue date: 1 Sep 2020 |
Grant | Utility: High energy atomic layer etching Filling date: 6 Sep 2025 Issue date: 1 Sep 2020 |
Grant | Utility: Extracting real-time data from EtherCAT sensor bus in a substrate processing system Filling date: 6 Sep 2025 Issue date: 1 Sep 2020 |
Grant | Utility: Hybrid flow metrology for improved chamber matching Filling date: 6 Sep 2025 Issue date: 1 Sep 2020 |
Grant | Utility: Method and apparatus for synchronized pressure regulation of separated anode chamber Filling date: 6 Sep 2025 Issue date: 1 Sep 2020 |
Grant | Utility: Ex situ coating of chamber components for semiconductor processing Filling date: 6 Sep 2025 Issue date: 1 Sep 2020 |
Grant | Utility: Geometrically selective deposition of a dielectric film Filling date: 6 Sep 2025 Issue date: 1 Sep 2020 |
Grant | Utility: Laminated heater with different heater trace materials Filling date: 6 Sep 2025 Issue date: 1 Sep 2020 |
Grant | Utility: System and method for determining field non-uniformities of a wafer processing chamber using a wafer processing parameter Filling date: 6 Sep 2025 Issue date: 1 Sep 2020 |
Application | Utility: VARIABLE DEPTH EDGE RING FOR ETCH UNIFORMITY CONTROL Filling date: 6 Sep 2025 Issue date: 27 Aug 2020 |
Showing 350 to 400 of 883 patents.