| Utility: Isotropic atomic layer etch for silicon oxides using no activation Filling date: 6 Sep 2025 Issue date: 9 Jun 2020 | 21 Jul 2016 | 9 Jun 2020 |
| Utility: MULTI-LEVEL PARAMETER AND FREQUENCY PULSING WITH A LOW ANGULAR SPREAD Filling date: 6 Sep 2025 Issue date: 4 Jun 2020 | 6 Feb 2020 | 4 Jun 2020 |
| Utility: MOMENT CANCELLING PAD RAISING MECHANISM IN WAFER POSITIONING PEDESTAL FOR SEMICONDUCTOR PROCESSING Filling date: 6 Sep 2025 Issue date: 4 Jun 2020 | 5 Feb 2020 | 4 Jun 2020 |
| Utility: PAD RAISING MECHANISM IN WAFER POSITIONING PEDESTAL FOR SEMICONDUCTOR PROCESSING Filling date: 6 Sep 2025 Issue date: 4 Jun 2020 | 4 Feb 2020 | 4 Jun 2020 |
| Utility: ONE-PIECE ANODE FOR TUNING ELECTROPLATING AT AN EDGE OF A SUBSTRATE Filling date: 6 Sep 2025 Issue date: 4 Jun 2020 | 30 Nov 2018 | 4 Jun 2020 |
| Utility: DYNAMIC SHEATH CONTROL WITH EDGE RING LIFT Filling date: 6 Sep 2025 Issue date: 4 Jun 2020 | 29 Nov 2018 | 4 Jun 2020 |
| Utility: Methods and apparatuses for electroplating and seed layer detection Filling date: 6 Sep 2025 Issue date: 2 Jun 2020 | 30 Jul 2019 | 2 Jun 2020 |
| Utility: Frequency tuning for a matchless plasma source Filling date: 6 Sep 2025 Issue date: 2 Jun 2020 | 14 Mar 2018 | 2 Jun 2020 |
| Utility: MULTI-LEVEL PULSING OF DC AND RF SIGNALS Filling date: 6 Sep 2025 Issue date: 28 May 2020 | 31 Jan 2020 | 28 May 2020 |
| Utility: SELECTIVE DEPOSITION OF ETCH-STOP LAYER FOR ENHANCED PATTERNING Filling date: 6 Sep 2025 Issue date: 28 May 2020 | 15 Jan 2020 | 28 May 2020 |
| Utility: Chamber with vertical support stem for symmetric conductance and RF delivery Filling date: 6 Sep 2025 Issue date: 26 May 2020 | 12 Aug 2019 | 26 May 2020 |
| Utility: RF generator for generating a modulated frequency or an inter-modulated frequency Filling date: 6 Sep 2025 Issue date: 26 May 2020 | 17 May 2019 | 26 May 2020 |
| Utility: Method for selective deposition using a base-catalyzed inhibitor Filling date: 6 Sep 2025 Issue date: 26 May 2020 | 2 Oct 2018 | 26 May 2020 |
| Utility: Multiple-output radiofrequency matching module and associated methods Filling date: 6 Sep 2025 Issue date: 26 May 2020 | 24 Apr 2018 | 26 May 2020 |
| Utility: Deposition of Aluminum oxide etch stop layers Filling date: 6 Sep 2025 Issue date: 26 May 2020 | 22 Nov 2017 | 26 May 2020 |
| Utility: Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity Filling date: 6 Sep 2025 Issue date: 26 May 2020 | 13 Sep 2017 | 26 May 2020 |
| Utility: Connections between laminated heater and heater voltage inputs Filling date: 6 Sep 2025 Issue date: 26 May 2020 | 3 May 2017 | 26 May 2020 |
| Utility: PERIPHERAL RF FEED AND SYMMETRIC RF RETURN FOR SYMMETRIC RF DELIVERY Filling date: 6 Sep 2025 Issue date: 21 May 2020 | 23 Jan 2020 | 21 May 2020 |
| Utility: INTEGRATING ATOMIC SCALE PROCESSES: ALD (ATOMIC LAYER DEPOSITION) AND ALE (ATOMIC LAYER ETCH) Filling date: 6 Sep 2025 Issue date: 21 May 2020 | 21 Nov 2019 | 21 May 2020 |
| Utility: Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer Filling date: 6 Sep 2025 Issue date: 19 May 2020 | 6 Mar 2019 | 19 May 2020 |
| Utility: Removing bubbles from plating cells Filling date: 6 Sep 2025 Issue date: 19 May 2020 | 1 May 2018 | 19 May 2020 |
| Utility: Turbomolecular pump deposition control and particle management Filling date: 6 Sep 2025 Issue date: 19 May 2020 | 15 Mar 2018 | 19 May 2020 |
| Utility: Atomic layer deposition and etch for reducing roughness Filling date: 6 Sep 2025 Issue date: 19 May 2020 | 21 Nov 2017 | 19 May 2020 |
| Utility: Substrate pedestal module including backside gas delivery tube and method of making Filling date: 6 Sep 2025 Issue date: 19 May 2020 | 28 Jul 2017 | 19 May 2020 |
| Utility: Conical wafer centering and holding device for semiconductor processing Filling date: 6 Sep 2025 Issue date: 19 May 2020 | 20 Dec 2016 | 19 May 2020 |
| Utility: Silicon-based deposition for semiconductor processing Filling date: 6 Sep 2025 Issue date: 19 May 2020 | 23 Aug 2016 | 19 May 2020 |
| Utility: Moveable edge coupling ring for edge process control during semiconductor wafer processing Filling date: 6 Sep 2025 Issue date: 19 May 2020 | 6 May 2015 | 19 May 2020 |
| Utility: METHODS OF ENCAPSULATION Filling date: 6 Sep 2025 Issue date: 14 May 2020 | 10 Jan 2020 | 14 May 2020 |
| Utility: ULTRATHIN ATOMIC LAYER DEPOSITION FILM ACCURACY THICKNESS CONTROL Filling date: 6 Sep 2025 Issue date: 14 May 2020 | 10 Jan 2020 | 14 May 2020 |
| Utility: Systems and methods for tuning to reduce reflected power in multiple states Filling date: 6 Sep 2025 Issue date: 12 May 2020 | 15 Aug 2019 | 12 May 2020 |
| Utility: Using identifiers to map edge ring part numbers onto slot numbers Filling date: 6 Sep 2025 Issue date: 12 May 2020 | 30 Aug 2018 | 12 May 2020 |
| Utility: Auto-calibration to a station of a process module that spins a wafer Filling date: 6 Sep 2025 Issue date: 12 May 2020 | 5 Jun 2018 | 12 May 2020 |
| Utility: Copper electrodeposition on cobalt lined features Filling date: 6 Sep 2025 Issue date: 12 May 2020 | 30 Mar 2018 | 12 May 2020 |
| Utility: Cathode RF asymmetry detection probe for semiconductor RF plasma processing equipment Filling date: 6 Sep 2025 Issue date: 12 May 2020 | 6 Oct 2017 | 12 May 2020 |
| Utility: Variable depth edge ring for etch uniformity control Filling date: 6 Sep 2025 Issue date: 12 May 2020 | 2 Feb 2017 | 12 May 2020 |
| Utility: Oxidizing treatment of aluminum nitride films in semiconductor device manufacturing Filling date: 6 Sep 2025 Issue date: 12 May 2020 | 28 Jun 2016 | 12 May 2020 |
| Utility: Reducing backside deposition at wafer edge Filling date: 6 Sep 2025 Issue date: 12 May 2020 | 19 Dec 2014 | 12 May 2020 |
| Utility: MONOLITHIC GAS DISTRIBUTION MANIFOLD AND VARIOUS CONSTRUCTION TECHNIQUES AND USE CASES THEREFOR Filling date: 6 Sep 2025 Issue date: 7 May 2020 | 23 Dec 2019 | 7 May 2020 |
| Utility: METHOD FOR PREVENTING LINE BENDING DURING METAL FILL PROCESS Filling date: 6 Sep 2025 Issue date: 7 May 2020 | 21 Dec 2019 | 7 May 2020 |
| Utility: ENHANCED AUTOMATIC WAFER CENTERING SYSTEM AND TECHNIQUES FOR SAME Filling date: 6 Sep 2025 Issue date: 7 May 2020 | 5 Nov 2018 | 7 May 2020 |
| Utility: Pre-treatment method to improve selectivity in a selective deposition process Filling date: 6 Sep 2025 Issue date: 5 May 2020 | 6 Aug 2018 | 5 May 2020 |
| Utility: Selective electroless electrochemical atomic layer deposition in an aqueous solution without external voltage bias Filling date: 6 Sep 2025 Issue date: 5 May 2020 | 3 Aug 2018 | 5 May 2020 |
| Utility: Selective growth of metal-containing hardmask thin films Filling date: 6 Sep 2025 Issue date: 5 May 2020 | 28 Jun 2018 | 5 May 2020 |
| Utility: Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal Filling date: 6 Sep 2025 Issue date: 28 Apr 2020 | 29 Jul 2019 | 28 Apr 2020 |
| Utility: Matchless plasma source for semiconductor wafer fabrication Filling date: 6 Sep 2025 Issue date: 28 Apr 2020 | 18 Mar 2019 | 28 Apr 2020 |
| Utility: Mutually induced filters Filling date: 6 Sep 2025 Issue date: 28 Apr 2020 | 16 Jul 2018 | 28 Apr 2020 |
| Utility: Use of voltage and current measurements to control dual zone ceramic pedestals Filling date: 6 Sep 2025 Issue date: 28 Apr 2020 | 7 May 2018 | 28 Apr 2020 |
| Utility: Method monitoring chamber drift Filling date: 6 Sep 2025 Issue date: 28 Apr 2020 | 27 Feb 2018 | 28 Apr 2020 |
| Utility: System for coordinating pressure pulses and RF modulation in a small volume confined process reactor Filling date: 6 Sep 2025 Issue date: 28 Apr 2020 | 19 Oct 2015 | 28 Apr 2020 |
| Utility: Apparatus for spatial and temporal control of temperature on a substrate Filling date: 6 Sep 2025 Issue date: 28 Apr 2020 | 24 Jul 2014 | 28 Apr 2020 |
