Lam Research
Patents, Design & Utilities
Last updated:
List of all Lam Research patents 883 in total
| Status | Patent |
|---|---|
Application | Utility: SYSTEMS FOR COOLING RF HEATED CHAMBER COMPONENTS Filling date: 6 Sep 2025 Issue date: 18 Feb 2021 |
Grant | Utility: Apparatus and method for electrodeposition of metals with the use of an ionically resistive ionically permeable element having spatially tailored resistivity Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Electrostatically clamped edge ring Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Articulated direct-mount inductor and associated systems and methods Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Methods for controlling clamping of insulator-type substrate on electrostatic-type substrate support structure Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Grant | Utility: Carrier plate for use in plasma processing systems Filling date: 6 Sep 2025 Issue date: 16 Feb 2021 |
Application | Utility: ELECTROSTATIC CHUCK (ESC) PEDESTAL VOLTAGE ISOLATION Filling date: 6 Sep 2025 Issue date: 11 Feb 2021 |
Application | Utility: MANIFOLD VALVE FOR MULTIPLE PRECURSORS Filling date: 6 Sep 2025 Issue date: 11 Feb 2021 |
Grant | Utility: Feature fill with multi-stage nucleation inhibition Filling date: 6 Sep 2025 Issue date: 9 Feb 2021 |
Grant | Utility: Monolithic gas distribution manifold and various construction techniques and use cases therefor Filling date: 6 Sep 2025 Issue date: 9 Feb 2021 |
Grant | Utility: Active control of radial etch uniformity Filling date: 6 Sep 2025 Issue date: 9 Feb 2021 |
Application | Utility: OPTICAL METROLOGY IN MACHINE LEARNING TO CHARACTERIZE FEATURES Filling date: 6 Sep 2025 Issue date: 4 Feb 2021 |
Application | Utility: AMORPHOUS CARBON LAYER OPENING PROCESS Filling date: 6 Sep 2025 Issue date: 4 Feb 2021 |
Grant | Utility: Systems and methods for reducing power reflected towards a higher frequency RF generator during a period of a lower RF generator and for using a relationship to reduce reflected power Filling date: 6 Sep 2025 Issue date: 2 Feb 2021 |
Grant | Utility: Substrate support with improved process uniformity Filling date: 6 Sep 2025 Issue date: 2 Feb 2021 |
Application | Utility: MODIFYING FERROELECTRIC PROPERTIES OF HAFNIUM OXIDE WITH HAFNIUM NITRIDE LAYERS Filling date: 6 Sep 2025 Issue date: 28 Jan 2021 |
Grant | Utility: Selective deposition of silicon oxide Filling date: 6 Sep 2025 Issue date: 26 Jan 2021 |
Grant | Utility: Endpoint sensor based control including adjustment of an edge ring parameter for each substrate processed to maintain etch rate uniformity Filling date: 6 Sep 2025 Issue date: 26 Jan 2021 |
Grant | Utility: Asymmetric wafer bow compensation by chemical vapor deposition Filling date: 6 Sep 2025 Issue date: 26 Jan 2021 |
Grant | Utility: Substrate processing chamber with showerhead having cooled faceplate Filling date: 6 Sep 2025 Issue date: 26 Jan 2021 |
Grant | Utility: Halogen removal module and associated systems and methods Filling date: 6 Sep 2025 Issue date: 26 Jan 2021 |
Application | Utility: IN SITU INVERSE MASK PATTERNING Filling date: 6 Sep 2025 Issue date: 21 Jan 2021 |
Application | Utility: CAPPING LAYER FOR A HAFNIUM OXIDE-BASED FERROELECTRIC MATERIAL Filling date: 6 Sep 2025 Issue date: 21 Jan 2021 |
Application | Utility: CHAMFER-LESS VIA INTEGRATION SCHEME Filling date: 6 Sep 2025 Issue date: 21 Jan 2021 |
Grant | Utility: Ceramic foam for helium light-up suppression Filling date: 6 Sep 2025 Issue date: 19 Jan 2021 |
Grant | Utility: Asymmetric wafer bow compensation by physical vapor deposition Filling date: 6 Sep 2025 Issue date: 19 Jan 2021 |
Grant | Utility: In-situ chamber clean end point detection systems and methods using computer vision systems Filling date: 6 Sep 2025 Issue date: 19 Jan 2021 |
Grant | Utility: Maintenance mode power supply system Filling date: 6 Sep 2025 Issue date: 19 Jan 2021 |
Application | Utility: METHODS FOR MAKING EUV PATTERNABLE HARD MASKS Filling date: 6 Sep 2025 Issue date: 14 Jan 2021 |
Application | Utility: ELECTROSTATIC CHUCK WITH SEAL SURFACE Filling date: 6 Sep 2025 Issue date: 14 Jan 2021 |
Grant | Utility: Edge seal configurations for a lower electrode assembly Filling date: 6 Sep 2025 Issue date: 12 Jan 2021 |
Grant | Utility: Electrostatic chuck including clamp electrode assembly forming portion of Faraday cage for RF delivery and associated methods Filling date: 6 Sep 2025 Issue date: 12 Jan 2021 |
Application | Utility: WAFER TRANSPORT ASSEMBLY WITH INTEGRATED BUFFERS Filling date: 6 Sep 2025 Issue date: 7 Jan 2021 |
Application | Utility: ATOMIC LAYER ETCHING AND SMOOTHING OF REFRACTORY METALS AND OTHER HIGH SURFACE BINDING ENERGY MATERIALS Filling date: 6 Sep 2025 Issue date: 7 Jan 2021 |
Application | Utility: PLASMA ETCHING CHEMISTRIES OF HIGH ASPECT RATIO FEATURES IN DIELECTRICS Filling date: 6 Sep 2025 Issue date: 7 Jan 2021 |
Application | Utility: SELECTIVE DEPOSITION USING HYDROLYSIS Filling date: 6 Sep 2025 Issue date: 7 Jan 2021 |
Application | Utility: ELECTROSTATIC CHUCKS WITH COOLANT GAS ZONES AND CORRESPONDING GROOVE AND MONOPOLAR ELECTROSTATIC CLAMPING ELECTRODE PATTERNS Filling date: 6 Sep 2025 Issue date: 7 Jan 2021 |
Application | Utility: METHOD AND APPARATUS FOR PROVIDING STATION TO STATION UNIFORMITY Filling date: 6 Sep 2025 Issue date: 31 Dec 2020 |
Application | Utility: WAFER CHUCK ASSEMBLY Filling date: 6 Sep 2025 Issue date: 31 Dec 2020 |
Application | Utility: SUBSTRATE PROCESSING SYSTEM INCLUDING COIL WITH RF POWERED FARADAY SHIELD Filling date: 6 Sep 2025 Issue date: 31 Dec 2020 |
Application | Utility: SYSTEMS AND METHODS FOR FLOW MONITORING IN A PRECURSOR VAPOR SUPPLY SYSTEM OF A SUBSTRATE PROCESSING SYSTEM Filling date: 6 Sep 2025 Issue date: 31 Dec 2020 |
Application | Utility: High Speed Synchronization Of Plasma Source/Bias Power Delivery Filling date: 6 Sep 2025 Issue date: 31 Dec 2020 |
Application | Utility: SYSTEMS AND METHODS FOR HOMOGENOUS INTERMIXING OF PRECURSORS IN ALLOY ATOMIC LAYER DEPOSITION Filling date: 6 Sep 2025 Issue date: 31 Dec 2020 |
Grant | Utility: Flow through line charge volume Filling date: 6 Sep 2025 Issue date: 29 Dec 2020 |
Grant | Utility: Fault detection using showerhead voltage variation Filling date: 6 Sep 2025 Issue date: 29 Dec 2020 |
Grant | Utility: Auxiliary circuit in RF matching network for frequency tuning assisted dual-level pulsing Filling date: 6 Sep 2025 Issue date: 29 Dec 2020 |
Grant | Utility: Temperature controlled substrate support assembly Filling date: 6 Sep 2025 Issue date: 29 Dec 2020 |
Application | Utility: ELIMINATING YIELD IMPACT OF STOCHASTICS IN LITHOGRAPHY Filling date: 6 Sep 2025 Issue date: 24 Dec 2020 |
Application | Utility: HIGH ENERGY ATOMIC LAYER ETCHING Filling date: 6 Sep 2025 Issue date: 24 Dec 2020 |
Application | Utility: SELF-LIMITING GROWTH Filling date: 6 Sep 2025 Issue date: 24 Dec 2020 |
Showing 250 to 300 of 883 patents.